PRiMELiNE - Roth & Rau AG

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PRiMELiNE Turnkey Solutions by Roth & Rau Key features: Short substrate edge leading Chemical layer facing upwards Cycle times < 60 s Integrated recycling of used rinsing DI water No chemical additives needed Integrated dryer Safety housing Turnkey Cluster PRiMELiNE CdTe Coating Cluster plus PRiMELiNE CdTe Activation Cluster (80 MW) Project duration 14 months Cluster content Coating Cluster – CdS/CdTe Coating (CSS) – Substrate Cooling Section – Vacuum System – Closed Loop Water cooling System – Safety Housings Activation Cluster – Conveyor – Conveyor EX, Conveyor EX SEL, Conveyor EX SEL Inspection, Conveyor EX LEL, Conveyor LEL, Conveyor SEL, Conveyor SEL Inspection – Activation Coating Unit – Rotary Table EX – Corner Transfer EX – Activation Furnace – Corner Transfer – Rotary Table – Cascade Rinsing + Closed Loop DI Water Regeneration – Safety Housings – Relevant EHS provisions – EHS Equipment
PRiMELiNE CdTe Back-Contact Cluster (80 MW) CdTe Thin Film PV Modules have been recognized as the markets most cost efficient solution for PV applications. To support cost efficient, proven processing Roth & Rau CTF Solar offers processing clusters and tools for all CdTe customers worldwide that can be seamlessly integrated into new production lines as well as into existing fabrication lines. The Roth & Rau CTF Solar chosen cluster design provides to the customer specific process knowledge combined with suitable process equipment and processing materials, project management and equipment startup in order to enhance product quality and module efficiencies. All PRiMELiNE CdTe Clusters are capable of processing standard module sizes of 1200 x 1600 mm (other dimensions on request), with a throughput of up to 70 modules per hour. Basis for the design of all PRiMELiNE CdTe Cluster Tools is the innovative yet proven PRiMELiNE CdTe Turnkey production line. A major process in manufacturing of CdTe PV modules is the formation of the back contact which allows for efficient collection of generated PV current. The Roth & Rau CTF Solar Back Contact cluster can be retrofitted for tools in existing production lines while adding improved module performance for shorter payback times of investments. In order to achieve high CdTe PV Module energy efficiencies, a low resistance back contact needs to be integrated into the CdTe Solar Module. This process step requires state-of-the-art know-how of CdTe surface preparation, back contact material selection, deposition technology, and equipment design to integrate the metallic back contact in the design of the CdTe PV module. In consequence, all sub-processes within this cluster are carefully adapted to each other and individually optimized with regard to etching rate, layer sequence, layer thickness, process homogeneity. The Roth & Rau CTF Solar Back-Contact processing provides for one of the lowest available film resistivity that enables high solar module energy efficiencies, high fill factor, long term stability, and compatibility with subsequent backend processes such as bus bar application and lamination. For a seamless integration into existing production lines the PRiMELiNE CdTe Back Contact Cluster uses a standardized SECS/ GEM protocol, substrate-ID-tracking (virtual / DMC reader), and adaptable horizontal communication with adjacent process tools. Nevertheless, the cluster can be operated also fully autonomous, with recipe administration on Cluster level. All sub-processes are decoupled by a substrat buffer stations which allow for scheduled maintenance of single tools without interruption of production of other cluster tools. This provides for a high cluster uptime and a flexible maintenance planning. In detail, the PRiMELiNE CdTe Back Contact Cluster consists of a CdTe Surface Preparation tool and a Metal Contact Deposition tool. CdTe Surface Preparation Tool The surface preparation consists of an etching step to prepare the CdS / CdTe layer stack before it is fed into the metal deposition equipment. The target of the preparation process is to establish a p+-doped layer of defined thickness on top of the CdTe surface by removing the existing Cd while simultaneously enrichening Te by a special etching process. Any liquid residues are removed by subsequent rinsing of the substrate with DI water. Set up of the etching solution is done in a chemical cabinet located next to the core process modules of the machine. Drained etching solution is collected and treated in a waste water subsystem. Traces of hazardous gases that may be generated during processing of the substrate are safely exhausted to a customized filtration unit. Key features: Short substrate edge leading Chemical layer facing upwards Cycle time < 60 s Selectable composition of etchingsolution Actively controlled etching rate and composition of etching solution with automatic compensation for selective consumption of components Integrated substrate rinsing and drying, integrated exhaust filtration Optionally available with a closed loop for flushing DI-water - no external DI-water supply required No release of contaminated waste water
Page 1 and 2: PRiMELiNE CdTe Cadmium Telluride Fa
Page 3 and 4: PRiMELiNE CdTe Laser Cluster (80 MW
Page 5 and 6: PRiMELiNE CdTe Coating Cluster (80
Page 7: PRiMELiNE Turnkey Solutions by Roth
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Page 13 and 14: Turnkey Cluster PRiMELiNE CdTe Back
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PRiMELiNE - Roth & Rau AG

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