16.06.2014 Views

PRiMELiNE - Roth & Rau AG

PRiMELiNE - Roth & Rau AG

PRiMELiNE - Roth & Rau AG

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Metal Contact Deposition tool<br />

After chemical preparation the substrates are automatically<br />

transferred into the metal contact deposition tool. The back contact<br />

processing is accomplished with a dedicated PVD process,<br />

within this process several metal materials can be sputtered onto<br />

the CdS / CdTe layer stack in order to optimize sheet resistance of<br />

the sputtered layers. Sputtered layer composition and processing<br />

conditions may be optimized depending on customer requirements.<br />

The metal contact deposition tool is explicitly designed for exceptional<br />

high production performance with long uninterrupted<br />

sputtering times and a synchronized sputter target lifetime<br />

with optimized preventive maintenance intervals to achieve high<br />

tool uptime.<br />

Key features:<br />

Short substrate edge leading,<br />

layer stack facing upwards<br />

Cycle time < 60 sec.<br />

Long uninterrupted sputter campaigns<br />

High process stability and accuracy<br />

High yield, high reliability, high availability<br />

Maintenance friendly<br />

Vacuum pumps included<br />

Integrated substrate heating for hot sputtering<br />

Integrated filtration of exhaust gases<br />

Integrated cooling zone<br />

All Back Contact Deposition tools are designed to comply with the<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar principle of delivering only environmental<br />

friendly tools, as also realized in the entire <strong>PRiMELiNE</strong> CdTe turnkey<br />

production line, which is designed to keep the "environmental<br />

footprint" as small as possible: All fab emissions are post-treated<br />

already at tool-level so that virtually no contaminated or hazardous<br />

substances can be released to the environment, and used<br />

processing fluids are recycled for minimal consumption values.<br />

Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Back-Contact Cluster (80 MW)<br />

Project duration<br />

Cluster content<br />

13 months<br />

– Etching station with closed loop DI-water<br />

supply and wastewater treatment<br />

– 2 conveyors<br />

– Buffer station incl. 3 storage boxes<br />

– Back-contact magnetron sputtering machine<br />

– Substrate cooling section<br />

– EHS equipment

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!