PRiMELiNE - Roth & Rau AG
PRiMELiNE - Roth & Rau AG
PRiMELiNE - Roth & Rau AG
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<strong>PRiMELiNE</strong><br />
Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />
Metal Contact Deposition tool<br />
After chemical preparation the substrates are automatically<br />
transferred into the metal contact deposition tool. The back contact<br />
processing is accomplished with a dedicated PVD process,<br />
within this process several metal materials can be sputtered onto<br />
the CdS / CdTe layer stack in order to optimize sheet resistance of<br />
the sputtered layers. Sputtered layer composition and processing<br />
conditions may be optimized depending on customer requirements.<br />
The metal contact deposition tool is explicitly designed for exceptional<br />
high production performance with long uninterrupted<br />
sputtering times and a synchronized sputter target lifetime<br />
with optimized preventive maintenance intervals to achieve high<br />
tool uptime.<br />
Key features:<br />
Short substrate edge leading,<br />
layer stack facing upwards<br />
Cycle time < 60 sec.<br />
Long uninterrupted sputter campaigns<br />
High process stability and accuracy<br />
High yield, high reliability, high availability<br />
Maintenance friendly<br />
Vacuum pumps included<br />
Integrated substrate heating for hot sputtering<br />
Integrated filtration of exhaust gases<br />
Integrated cooling zone<br />
All Back Contact Deposition tools are designed to comply with the<br />
<strong>Roth</strong> & <strong>Rau</strong> CTF Solar principle of delivering only environmental<br />
friendly tools, as also realized in the entire <strong>PRiMELiNE</strong> CdTe turnkey<br />
production line, which is designed to keep the "environmental<br />
footprint" as small as possible: All fab emissions are post-treated<br />
already at tool-level so that virtually no contaminated or hazardous<br />
substances can be released to the environment, and used<br />
processing fluids are recycled for minimal consumption values.<br />
Turnkey Cluster<br />
<strong>PRiMELiNE</strong> CdTe Back-Contact Cluster (80 MW)<br />
Project duration<br />
Cluster content<br />
13 months<br />
– Etching station with closed loop DI-water<br />
supply and wastewater treatment<br />
– 2 conveyors<br />
– Buffer station incl. 3 storage boxes<br />
– Back-contact magnetron sputtering machine<br />
– Substrate cooling section<br />
– EHS equipment