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STRUCTURE, MORPHOLOGY AND OPTICAL PROPERTIES OF Al - DOPED ZnO THIN FILMS
Figure 1. EDAX analysis of ZnO and AZO thin films (d=8cm for both samples)
4
3
(002)
AlZnO, d=8 cm, D=27nm
I/I (002)
2
ZnO, d=8cm, D=51nm
1
ZnO, d=4cm, D=17nm
ZnO, d=2cm, D=9nm
0
35 40 45 50 55 60 65 70
2θ(degrees)
Figure 2. The XRD spectra of ZnO and AZO films grown at the same substrate
temperature and varying distance d between target and substrate.
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