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MicroProbe Vx-RF Probe Card Technology - Semiconductor Wafer ...

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Outline<br />

• <strong>Vx</strong>-<strong>RF</strong> <strong>Technology</strong> Overview<br />

– Problem Statement and Requirements<br />

– Approach<br />

– Characterization Data<br />

• <strong>Wafer</strong>-Test Results<br />

– Bump-probe interaction<br />

– Cleaning<br />

– Qualification Methodology and Results<br />

• Summary and Conclusions<br />

June 7 to 10, 2009<br />

IEEE SW Test Workshop 2

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