Cu-Pillar Bump Probing: Utilizing a 50Âµm Pitch Fine Pitch Vertical ...

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Probe Force

• Contact Force of 2.5 gf @ 50µm OT

• Preferred Bump Probing OT 25 to 40µm

– Minimize Bump Damage

– Accommodate Bump Co‐planarity Across Wafer

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with Pyramid Probe Cards - Semiconductor Wafer Test Workshop

Probe Force • Contact Force of 2.5 gf @ 50µm OT • Preferred Bump Probing OT 25 to 40µm – Minimize Bump Damage – Accommodate Bump Co‐planarity Across Wafer 16

Tip Alignment • Probe Tip Alignment –0.3 mil Radial 17

Page 1 and 2: Cu‐Pillar Bump Probing: Utilizing
Page 3 and 4: Introduction • Next Generation Fl
Page 5 and 6: Testing/Probing challenges • Prob
Page 7 and 8: Prober Equipment Utilized Tester Do
Page 9 and 10: Cu‐Pillar Structure 25µm Side Vi
Page 11 and 12: PROBE CARD CHALLENGES 11
Page 13 and 14: Scalability Challenges • Guide Pl
Page 15: PROBE CARD DATA 15
Page 19 and 20: Resistance on Gold • Max Total Re
Page 21 and 22: Test Method In Out 25µm 25 µm 25
Page 23 and 24: • Electrical Tests Tests in Proce

Cu-Pillar Bump Probing: Utilizing a 50Âµm Pitch Fine Pitch Vertical ...

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