Cu-Pillar Bump Probing: Utilizing a 50Âµm Pitch Fine Pitch Vertical ...

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Cu‐Pillar Structure

25µm

Side View

Solder Bump

Cu‐Pillar

25µm

Initial Bump Height : ~25 +/‐3µm

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Cu‐Pillar Structure 25µm Side View Solder Bump Cu‐Pillar 25µm Initial Bump Height : ~25 +/‐3µm 9

Page 1 and 2: Cu‐Pillar Bump Probing: Utilizing
Page 3 and 4: Introduction • Next Generation Fl
Page 5 and 6: Testing/Probing challenges • Prob
Page 7: Prober Equipment Utilized Tester Do
Page 11 and 12: PROBE CARD CHALLENGES 11
Page 13 and 14: Scalability Challenges • Guide Pl
Page 15 and 16: PROBE CARD DATA 15
Page 17 and 18: Tip Alignment • Probe Tip Alignme
Page 19 and 20: Resistance on Gold • Max Total Re
Page 21 and 22: Test Method In Out 25µm 25 µm 25
Page 23 and 24: • Electrical Tests Tests in Proce

Cu-Pillar Bump Probing: Utilizing a 50Âµm Pitch Fine Pitch Vertical ...

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