An Analysis of Contact Resistance between Probe Tip and Gold Pad
An Analysis of Contact Resistance between Probe Tip and Gold Pad
An Analysis of Contact Resistance between Probe Tip and Gold Pad
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<strong>Contact</strong> <strong>Resistance</strong> <strong>of</strong> <strong>Gold</strong> <strong>Pad</strong><br />
C. ToF‐SIMS <strong>An</strong>alysis<br />
TiO2<br />
• Finding <strong>of</strong> Insulation Ingredient<br />
TiO<br />
TiW + 2H 2 O 2 →<br />
(TiO 2 ↓) +2H 2 O<br />
Ti<br />
Sputter Time (sec)<br />
11