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An Analysis of Contact Resistance between Probe Tip and Gold Pad

An Analysis of Contact Resistance between Probe Tip and Gold Pad

An Analysis of Contact Resistance between Probe Tip and Gold Pad

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Key Points<br />

• Modeling <strong>of</strong> Ti Oxide Creation<br />

• Probing Result <strong>of</strong> Fine Pitch Bump<br />

• The Surface <strong>An</strong>alysis <strong>of</strong> <strong>Gold</strong> <strong>Pad</strong><br />

• Ohmic Heating by Work Function Difference<br />

• <strong>Contact</strong> <strong>Resistance</strong> Measurement by ATE<br />

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