High Speed 3D Probe Mark Inspection - Semiconductor Wafer Test ...

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Smoothed 3D Profile

June 7 to 10, 2009

IEEE SW Test Workshop 14

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Smoothed 3D Profile June 7 to 10, 2009 IEEE SW Test Workshop 14

Strengths / Weaknesses • Relatively believable measurement variation across wafer. • Throughput at presented resolution (4mm swath) – 15 WPH 150mm – 8 WPH 200mm – 5 WPH 300mm • Throughput at 6mm swath (Adequate resolution with presented probe footprint) – 30 WPH 150mm – 16 WPH 200mm – 10 WPH 300mm • Artifacts must be understood – Comparison of Height map to Intensity map June 7 to 10, 2009 IEEE SW Test Workshop 15

Page 1 and 2: June 7-10, 2009 San Diego, CA High
Page 3 and 4: Objective • Apply a 3D scanning l
Page 5 and 6: L - 3D Height in Color Scale R - In
Page 7 and 8: Probe Depth Measurements June 7 to
Page 9 and 10: Probe Marks ‣ Raw data: ‣ X Res
Page 11 and 12: Probe Marks: Right Pad ‣ Pink are
Page 13: Artifacts Due to Laser Angle Multip

High Speed 3D Probe Mark Inspection - Semiconductor Wafer Test ...

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