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Dimensional Measurement using Vision Systems - NPL Publications ...

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<strong>Measurement</strong> Good Practice Guide No. 39<br />

Figure 28: Intensity profile of a dark line on a bright background.<br />

For high power microscopy, the true edge of a feature will be located at some point<br />

between the 25% - 50% intensity level, as the illumination will be partially coherent (see<br />

section 2.8). Under these conditions, the correct threshold may be found experimentally,<br />

by measuring the dimensions of a calibrated feature at varying thresholds within the 25% -<br />

50% range. The formula for calculating the true edge threshold is given in equation 15.<br />

t = i (b + (a – b))<br />

…..(15)<br />

Where ; t = Grey scale intensity threshold of the camera<br />

i = True edge intensity threshold, expressed as a decimal fraction, i.e. 30% = 0.3<br />

b = Mean dark level intensity<br />

a = Mean bright level intensity<br />

It is worth noting that the intensity profile in Figure 28 is of a straight edge and is the<br />

average profile over 500 pixel rows on the y-axis. Figure 29 shows the comparison of an<br />

averaged intensity profile and the profile of an edge along a single row of pixels. The<br />

difference between the two calculated 50% thresholds is only 4 grey scale values, and for<br />

most applications, is negligible. However, where possible, straight edges and averaging<br />

should be used, as the noise level on the profile is reduced and the dynamic grey scale<br />

range is more accurate.<br />

51

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