NTEGRA spectra: Cutting edge of molecular sciences - NT-MDT

NTEGRA spectra:
Cutting edge of molecular sciences

NTEGRA Spectra for non-transparent samples
High Aperture AFM
The only commercial AFM on the market
integrated with 100x high NA objective in
upright geometry
With technical questions contact:
Pavel Dorozhkin, dorozhkin@ntmdt.ru
Vasiliy Gavrilyuk, gavrilyuk@ntmdt.ru

Fully functional “AFM+3D confocal Raman microscope” system
for non-transparent samples
Optomechanical unit
(excitation, confocal and spectrometer modules)
High NA objective
High Aperture AFM

AFM with 100x 0.7 NA objective in upright configuration –
for non-transparent samples
CCD video camera
Probe
deflectometer
Optical AFM head
(100x,0.7 NA
objective inside)
Imaging optics
Beam splitter 2
Beam splitter 1
AFM probe
Excitation light
Scattered light
Laser
deflectometer
objective
Laser
input&scanning
module
XYZ scanner
Sample
The only commercial AFM in the world integrated with 100x high
NA objective in upright configuration !!!

Laser input & scanning module
To video camera
6
Dichroic
mirror
2
5
Angle scanning
7 mirror
3
1
100x, 0.7 NA
objective
AFM probe
8
From / to
confocal module
Light input-output & scanning module:
2D confocal microscope regime by scanning mirror 7
Fine focus adjustment of the excitation beam by moving lens 3
Adjustable height and orientation of the entrance aperture (mirror 8)
Dichroic mirror 6 allows the sample & probe observation with highest optical resolution

Laser input & scanning module
Laser input & scanning module allows:
- Scan excitation beam along field of view of 100x objective (up to
100 µm) and get 2D confocal image
- Precisely position laser beam at any sample point (for example at
the apex of AFM tip) and fix it there - thanks to closed-loop
operation of the scanning mirror #7
This is a crucial option for TERS experiment

Integration with standard (Solar-TII) spectrometer
Optomechanical unit (excitation &
confocal modules, spectrometer)
Laser input/scanning module
High Aperture AFM
Fully functional “AFM + optical microscope + 3D confocal Raman
microscope” system for non-transparent samples
Scanning by both sample and laser beam

NTEGRA can be integrated with other spectrometers
Thanks to its open geometry, NT- MDT NTEGRA system can be integrated with
most spectrographs available on the market to provide fully functional “AFM +
optical microscope + confocal Raman microscope” system

High Aperture Head – various realizations
High Aperture head units
Units
STM
AFM
670
AFM
830
1
Objective unit
**
**
**
2
STM probe unit
**
3
AFM probe holder unit
**
**
4
Optical microscope with LED illuminator
*
*
*
5
Light input-output system
*
*
*
6
AFM control system, 670 nm laser
**
7
AFM control system, 830 nm laser
**
8
Objective Z-piezodrive
*
*
*
9
Piezodriven steering mirror
*
*
*

High Aperture Head: AFM setup
Objective holder unit:
Fine XYZ positioning
Mitutoyo 100x M PlanApo
objective
– NA = 0.7, F = 2 mm
– 6 mm working distance.
– 0.4 μm optical resolution
Infinity corrected optics
Bright Field and Dark Field
objectives available

High Aperture Head – STM setup
Objective holder unit:
Fine XYZ positioning
Mitutoyo 100x M PlanApo
objective
– NA = 0.7, F = 2 mm
– 6 mm working distance.
– 0.4 μm optical resolution
Infinity corrected optics
Bright Field and Dark Field
objectives available
High aperture head: STM setup

Optical AFM (100x objective) with thermohead
TV camera + objective
N.B. The system is currently
in development status
light coupling
and scanning unit
AFM with 100x,
0.7 NA objective
thermohead
Temperature range: -30-60°C . Heat up time

Simultaneous imaging and AFM scanning
Atomic Force Microscopy:
Observe the sample surface during
the scanning process
The high NA objective enables
sample imaging even under the probe
tip
Available for both standard contact
and semi contact AFM modes
Probe tip
AFM topography and optical image of a
rectangular 5 μm crater on the sample
surface

Simultaneous imaging and AFM scanning
Cantilever
1 µm height letters are
readable – thanks to
100x objective
(see next slide for AFM)
Black spot at the apex of
cantilever is the exact
point there the tip
touches substrate !!!
AFM probe over a structured Si substrate. View through 0.7NA 100x objective
Apex of opaque Si tip looks transparent on the image!
This unique observation is due to high aperture (0.7 NA) of the imaging objective

Simultaneous imaging and AFM scanning
1 µm height letters (see previous slide) can now be resolved
with ultimate nanometer-scale resolution of AFM
Topography 12.6x12.6 µm 2 Topography 12.6x12.6 µm 2
AFM-image from the same sample area as on previous slide

Simultaneous imaging and AFM scanning
µm –scale features are perfectly resolved –
thanks to the 100x & 0.7 NA objective
Cantilever
1.5 µm width electrode
AFM probe (Nanosensors, AdvancedTEC series) over a Si
substrate with metal electrodes.
View through 0.7NA 100x objective
Apex of opaque Si tip looks transparent on the image!
This unique observation is due to high aperture
(0.7 NA) of the imaging objective.
AFM image
under the tip, 6x6 µm
Black spot at the apex of
cantilever is the exact
point there the tip
touches substrate !!!

Ready for TERS experiments on non-transparent
samples
Laser scanning module allows to position laser beam precisely at the apex of AFM
tip and fix it there - thanks to closed-loop operation of the scanning mirror
Cantilever
AFM probe on Si substrate. Laser spot (

AFM + two types of confocal microscopy
AFM topography
__ 1μm
__ 1μm
Confocal
Raman, 520 cm -1
Scanning by
stage
Si/SiO 2
grating
Confocal Raman,
520 cm -1
Scanning by mirror !

Sample rough positioning is performed with 10x
(or any other magnification) objective
It takes ~5 seconds to
exchange objectives
1x1 mm 2
10x objective module
Cantilever
100x100 µm 2
100x objective + AFM
Objectives are placed with a few µm
precision to ensure staying exactly
on the same sample place
Optical images of patterned Si substrate

High Aperture Head – main Values
1. Fully functional 3D confocal microscope for non-transparent
(and transparent) samples
2. Two types confocal microscopy in one instrument:
scanning by sample & scanning by beam
3. AFM probe directly under 100x 0.7 NA objective !
- AFM scanning simultaneously with sample imaging (at nearly
highest possible resolution of 0.4 µm !) and confocal scanning
- Best suited for TERS and other tip-enhanced experiments
- Good AFM performance (Z-noise ~0.04 nm RMS, preliminary)
The only commercial AFM on the market integrated with 100x
high NA objective in upright geometry