High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...
High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...
High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...
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Planar SACM/SACGM <strong>APD</strong><br />
• InGaAs/InP Two-step<br />
MOCVD<br />
• Planar Structure<br />
• Etch and Regrowth Charge<br />
and Multiplication Region<br />
• Diffusion controlled<br />
Multiplication Layer (s<strong>in</strong>gle<br />
Diffusion or Well Etch<strong>in</strong>g-<br />
Diffusion)<br />
• Xd ~ 0.2-0.4 µm<br />
• GB product = 122 GHz<br />
• Noise Ratio k~0.45<br />
• No Implant<br />
tcharge<br />
n-Metal AR SiO 2<br />
p+ InP<br />
Xj<br />
n- InP Multiplication<br />
n InP Charge<br />
Grad<strong>in</strong>g Layer<br />
n InGaAs<br />
n- InGaAs Absorption<br />
n- InP Buffer<br />
n+ InP Substrate<br />
Xd<br />
tmesa<br />
tInGaAs<br />
tBuffer<br />
WOCC-2005
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