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High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

Planar Separate

Planar Separate Absorption, Multiplication (SAM) APD Structure p-metal SiNx layer P+ Diffusion Guard Ring n- InP cap layer n+ InP Multi. n- InGaAsP layer n- InGaAs abs. layer n+ InP Buffer n+ InP Sub. AR coating n-metal WOCC-2005

Planar SACM/SACGM APD • InGaAs/InP Two-step MOCVD • Planar Structure • Etch and Regrowth Charge and Multiplication Region • Diffusion controlled Multiplication Layer (single Diffusion or Well Etching- Diffusion) • Xd ~ 0.2-0.4 µm • GB product = 122 GHz • Noise Ratio k~0.45 • No Implant tcharge n-Metal AR SiO 2 p+ InP Xj n- InP Multiplication n InP Charge Grading Layer n InGaAs n- InGaAs Absorption n- InP Buffer n+ InP Substrate Xd tmesa tInGaAs tBuffer WOCC-2005

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