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High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

Resonant-Cavity

Resonant-Cavity InGaAs/InAlAS SACM APD • Resonant-Cavity Structure • High QE ~ 75% • Mesa Isolated • SACM Configuration • Thin InAlAs Multiplication Region (200 nm) • Lower Noise k ~ 0.18 • Bandwidth>20 GHz • High Gain-Bandwidth Product Probe Metal hυ Dielectric DBR Metal Ring Contact InGaAs Cap Ring Contact p+ InAlAs 50 nm InAlAs Spacer 60 nm InGaAs Abs. Layer 50 nm InAlAs Spacer Polyimide APD Active Region n+ InAlAs/InGaAs DBR n+ InP Buffer Layer Semi-Insulating InP Substrate WOCC-2005 150 nm p-InAlAs Charge 200 nm InAlAs Multiplication n+ InAlAs

Wafer-Fused SHIP APD • Silicon Heterointerface Photodetector (SHIP) • Wafer-Fused Si Multiplication Region Au/Zn Contact PMGI • Mesa Isolated (20-30 µm) • Backside Illumination • Bandwidth= 13 GHz • GainxBandwidth= 315 GHz • Reliability Issue n-type Si Substrate p-type Implant p+ InGaAs n- InGaAs Bonding Interface WOCC-2005

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