High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...
High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...
High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...
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Wafer-Fused SHIP <strong>APD</strong><br />
• Silicon Hetero<strong>in</strong>terface<br />
Photodetector (SHIP)<br />
• Wafer-Fused Si<br />
Multiplication Region<br />
Au/Zn Contact<br />
PMGI<br />
• Mesa Isolated (20-30 µm)<br />
• Backside Illum<strong>in</strong>ation<br />
• Bandwidth= 13 GHz<br />
• Ga<strong>in</strong>xBandwidth= 315<br />
GHz<br />
• Reliability Issue<br />
n-type Si Substrate<br />
p-type Implant<br />
p+ InGaAs<br />
n- InGaAs<br />
Bond<strong>in</strong>g<br />
Interface<br />
WOCC-2005