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High Performance, Low Cost PIN, APD Receivers in Fiber Optical ...

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Wafer-Fused SHIP <strong>APD</strong><br />

• Silicon Hetero<strong>in</strong>terface<br />

Photodetector (SHIP)<br />

• Wafer-Fused Si<br />

Multiplication Region<br />

Au/Zn Contact<br />

PMGI<br />

• Mesa Isolated (20-30 µm)<br />

• Backside Illum<strong>in</strong>ation<br />

• Bandwidth= 13 GHz<br />

• Ga<strong>in</strong>xBandwidth= 315<br />

GHz<br />

• Reliability Issue<br />

n-type Si Substrate<br />

p-type Implant<br />

p+ InGaAs<br />

n- InGaAs<br />

Bond<strong>in</strong>g<br />

Interface<br />

WOCC-2005

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