12.01.2015 Views

2012 e-catalog - STIL

2012 e-catalog - STIL

2012 e-catalog - STIL

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

NON CONTACT MEASUREMENT SOLUTIONS<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTROCOLORIMETERS<br />

GONIOPHOTOMETERS<br />

www.stilsa.com<br />

<strong>2012</strong> e-<strong>catalog</strong><br />

WORLD LEADER IN CONFOCAL CHROMATIC DISTANCE SENSORS<br />

E1204


Coming soon<br />

SELECTION<br />

GUIDE<br />

<strong>2012</strong>, A SIGNIFICANT BREAKTROUGH FOR VISION SYSTEM<br />

• CONFOCAL CHROMATIC VISION FOR Automatc Optcal Inspecton: 3D VISION (*)<br />

(*) 3D VISION system combines a real 3D measurement and microscopy image:<br />

- Confocal chromatc measurement in TTL (through the lens),<br />

- High contrast,<br />

- High lateral resoluton,<br />

- Perfect focus in the extended measuring range.<br />

Table of contents<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

• Selecton guide.................................................................................4<br />

• 3D Metrology products.......................................................................4<br />

Precision class.....................................................................................4<br />

Applicaton type..................................................................................5<br />

Measuring rate.................................................................................6<br />

Scanning mode.................................................................................6<br />

Multi-channel operation......................................................................6<br />

Optical specifications.........................................................................6<br />

Electronic / Software specificatons...............................................................7<br />

Mechanical specificatons.........................................................................7<br />

Value-for-Cost..................................................................................7<br />

Non-contact «point» sensors<br />

• Introducing Chromatc Confocal technology..............................................8<br />

Optcal principle...................................................................................8<br />

Applicatons.......................................................................................9<br />

Product Lines..................................................................................10<br />

• «Bundle» Chromatc Confocal sensors......................................................11<br />

<strong>STIL</strong> Inital sensor line........................................................................11<br />

• Configurable Chromatc Confocal sensors............................................13<br />

The CCS Controller line........................................... .........................13<br />

The CHR Controller line..........................................................................15<br />

Modular optcal pens (CL-MG line)..............................................................18<br />

Classical optcal pens (OP line)...................................................................19<br />

Miniature optcal pens (ENDO line)..............................................................20<br />

• Introducing Spectral Confocal Interferometry technology............................22<br />

Optcal principle...................................................................................22<br />

The DUO controller line..........................................................................23<br />

Interferometric optcal pens (OPILB line)........................................................25<br />

• Fiber optc cables................................................................................26<br />

• Accessories......................................................................................27<br />

• Software...........................................................................................29<br />

4<br />

8<br />

2<br />

www.stlsa.com


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Table of contents<br />

Non-contact «line» sensors<br />

34<br />

• MPLS180 «line» sensors.........................................................................34<br />

MPLS180 optcal principle.........................................................................34<br />

Basic sensor consttuton..........................................................................35<br />

Optoelectronic controllers: technical specificatons..............................................35<br />

• Optcal heads.....................................................................................36<br />

Non-contact 3D Measurement Systems<br />

• MICROMESURE 2 Systems...................................................................38<br />

Applicatons......................................................................................39<br />

Industrial and Research Laboratories Fields....................................................39<br />

Optons & Accessories...........................................................................39<br />

• Technical specificatons......................................................................39<br />

Scanning system Specificatons.................................................................39<br />

Optoelectronic Controllers Specificatons .....................................................40<br />

Optcal Pens and video camera Specificatons.................................................40<br />

• Software.........................................................................................41<br />

Control and Acquisiton Software Functons....................................................41<br />

Post Processing Software Functons............................................................. 42<br />

38<br />

Non-contact Spectrocolorimeter<br />

• Introducing Colorimetry.........................................................................44<br />

Applicatons..................................................................................... 44<br />

• RUBY Spectrocolorimeter...................................................................44<br />

• Technical specificatons............ ................................................... 45<br />

• Software.......................................................................................46<br />

DLL for RUBY controllers.......................................................................46<br />

RUBY MANAGER software......................................................................47<br />

Goniophotometers<br />

• REFLET introducton and features ....................................... ............. 48<br />

REFLET technical specificatons and applications.......................................... 49<br />

• DIAMOND introducton and applications........................................... 50<br />

• Optons......................................................................................... 51<br />

44<br />

48<br />

Outline dimensions<br />

• Point sensors.................................................................................. 53<br />

• Line sensors...................................................................................68<br />

• Goniophotometers..........................................................................71<br />

52<br />

www.stlsa.com 3


Selecton guide<br />

SELECTION<br />

GUIDE<br />

General selection guide<br />

Application<br />

See<br />

• Measure the Shape of a sample<br />

• Measure the Distance of a sample (auto-focusing)<br />

• Measure the Thickness of a sample or a coating<br />

• Measure the Roughness of a surface<br />

3D Metrology Products<br />

Selecton Guide<br />

(on this page)<br />

SENSORS<br />

• Measure or compare the Color of a sample<br />

• Measure the Spectrum reflected,<br />

transmitted or emitted from a sample or a light source<br />

• Measure the Angular distribution of light beam reflected, transmitted or emitted<br />

from a sample (BRDF/BTDF)<br />

Non Contact spectrocolorimeter<br />

(page 44)<br />

Goniophotometers<br />

(page 48)<br />

3D SYSTEMS<br />

3D Metrology products selection guide<br />

<strong>STIL</strong> SA proposes a large number of products for high quality 3D metrology.<br />

For selectng the right product one should consider several criteria:<br />

• Precision class,<br />

• Applicaton type,<br />

• Measuring rate,<br />

• Scanning mode,<br />

• Mult-channel operaton,<br />

• technical specificatons,<br />

• Value-for-Cost.<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Precision class<br />

Class Axial Resolution (1) Measuring Range Technology Products<br />

Sub-nano-Metrology from 0.3 nm up to 135 µm<br />

Nano-Metrology<br />

from 8.0 nm<br />

(1) Smallest measurable step.<br />

(2) Alone or mounted on a MICROMESURE 3D measuring system.<br />

Several measuring<br />

ranges available:<br />

from 130 µm to<br />

42 mm<br />

CONFOCAL<br />

SPECTRAL<br />

INTERFEROMETRY<br />

(page 22)<br />

CHROMATIC<br />

CONFOCAL<br />

IMAGING<br />

(page 8)<br />

<strong>STIL</strong>-DUO controller (2) with OPILB optcal pen<br />

CCS-PRIMA, <strong>STIL</strong>-INITIAL, <strong>STIL</strong>-DUO or CHR-<br />

150L controller (2) with a CL-MG, OP or Endo<br />

series optcal pen<br />

MPLS 180 sensor<br />

4<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

Application type<br />

Application<br />

Products<br />

MEASURING THE SHAPE OR DISTANCE OF A SAMPLE<br />

General case<br />

• A point sensor controller (1)(2) with a CL-MG- series<br />

• MPLS 180 sensor<br />

Long working distance<br />

• CCS-Prima, <strong>STIL</strong>-Duo, CHR-150L controller (2) with a OP- series optcal pen<br />

Inside a cavity (diam. from 7 mm)<br />

• A point sensor controller (1)(2) with a miniature (Endo series) optcal pen<br />

Rough metallic samples<br />

• A point sensor controller (1)(2) with any optcal pen. Optmal performances are achieved with an optcal pen<br />

whose spot size is inferior to 7 µm<br />

• MPLS 180 sensor. Optcal performances are achieved with the Microview optcal head<br />

Mirror-like samples / Low-reflectivity samples<br />

• A point sensor controller (1)(2) with an optcal pen whose photometric efficiency is low / high respectvely<br />

• MPLS 180 sensor.<br />

Sub-Nanometrology applications<br />

(see «precision class»)<br />

• <strong>STIL</strong>-DUO controller (2) with an OPILB- series distance-mode optcal pen<br />

Special requirements (3)<br />

Contact us<br />

MEASURING ROUGHNESS<br />

Measurable Ra:<br />

from 12 nm (with CL1MG210 optcal pen)<br />

from 50 nm (with CL3MG140 optcal pen)<br />

• A point sensor controller (1)(2) with a CL-MG- series or OP- series optcal pen whose spot size is inferior to 7 µm<br />

Sub-nanometric applications<br />

Measurable Ra: from 0.75 nm<br />

• <strong>STIL</strong>-DUO controller (1)(2) with a OPILB- series distance-mode optcal pen<br />

MEASURING THICKNESS<br />

• Measurable Thickness limits:<br />

7.5 µm-175 µm (with CL1MG210 optcal pen)<br />

0.6 mm-34 mm (with CL6MG35 optcal pen)<br />

• A point sensor controller (1)(2) with a CLMG- series or an OP- series optcal pen<br />

• Resolution: 35 nm (with CL1MG210 optcal pen)<br />

Thin films / Very high precision<br />

Measurable Thickness limits: 0.4 µm-90 µm<br />

Resolution: from 0.3 nm<br />

• <strong>STIL</strong>-DUO controller (1)(2) with a OPILB- series thickness-mode optcal pen<br />

(1) Point sensor controller = CCS-Prima, <strong>STIL</strong>-Initial, <strong>STIL</strong>-Duo or CHR-150L controller.<br />

(2) Alone or mounted on a MICROMESURE 3Dmeasuring system.<br />

(3) Measuring through a window or through a coatng, Side-looking optcal pen, Vacuum chamber, Harsh environments, Highly diffusing samples...<br />

E1204<br />

www.stlsa.com 5


Selecton guide<br />

SELECTION<br />

GUIDE<br />

Measuring rate<br />

Ultra-high rate<br />

Requirement Measuring rate Products<br />

Up to 324,000 points/s<br />

(1800 lines/s)<br />

• MPLS 180 sensor<br />

Standard rate<br />

Up to 2,000 points/s<br />

Up to 1,000 points/s<br />

• CCS-Prima, <strong>STIL</strong>-Initial, <strong>STIL</strong>-Duo controllers (*)<br />

• CHR-150L controller (*)<br />

(*) With a suitable optcal pen, alone or mounted on a MICROMESURE 3D measuring system<br />

SENSORS<br />

3D SYSTEMS<br />

Scanning mode<br />

Measuring an area<br />

Requirement Type Products<br />

Measuring a linear or circular profile<br />

Measuring a single point over time<br />

3D<br />

(X,Y,Z)<br />

2D<br />

(X,Z)<br />

1D<br />

(Z)<br />

Multi-channel operation<br />

• MICROMESURE system with any point sensor (*)<br />

• Scanning (3D) MPLS180 sensor<br />

• Static(2D) MPLS180 sensor with the sample on a conveyor belt<br />

• Any point sensor (*) mounted on a user-machine which has at least 2 moton axes<br />

• MICROMESURE system with any point sensor (*)<br />

• Static (2D) MPLS180 sensor<br />

• Any point sensor (*) with the sample on a conveyor belt<br />

• Any point sensor (*) mounted on a user-machine which has at least 1 moton axis<br />

• Any point sensor (*)<br />

(*) Point sensors: CCS-Prima, <strong>STIL</strong>-Duo, <strong>STIL</strong>-Initial or CHR150-L controller with a suitable optcal pen.<br />

Sensor<br />

Multi-channel operation<br />

CHR-150L controller 1,2 or 4 simultaneous channels (1)(2)<br />

SPECTRO<br />

COLORIMETERS<br />

CSS-Prima controller 1,2 or 4 multiplexed channels (1)(3)<br />

<strong>STIL</strong>-Duo controller<br />

<strong>STIL</strong>-Initial controller<br />

MPLS180 sensor<br />

Optical specifications<br />

1 channel for a chromatic confocal optical pen and<br />

1 channel for a interferometric optical pen<br />

The two channels are multiplexed (3)<br />

Single-channel operation only<br />

(1) The number of channels should be specified while ordering, no upgrade is possible later.<br />

(2) Simultaneous channels: all the channels measure at the same tme.<br />

(3) Multplexed channels: all optcal pens may be connected to the controller at the same tme, but only one of them measures.<br />

GONIO<br />

PHOTOMETERS<br />

Optical specifications<br />

• Measuring range<br />

• Axial resolution and accuracy<br />

• Lateral resolution (spot size)<br />

• Working distance<br />

• Maximal measurable slope (°) on specular samples<br />

• Photometric efficiency<br />

• Min/Max measurable thickness<br />

• Min. measurable roughness<br />

See:<br />

• For CCS-Prima, <strong>STIL</strong>-DUO, <strong>STIL</strong>-Initial sensors: See Chromatc Confocal<br />

optcal pen specificatons (Pages 18, 19, 21)<br />

• For <strong>STIL</strong>-Duo sensor: See Interferometric optcal pen specificatons (Pages 26)<br />

• For MPLS180 sensor: See optcal head specificatons (Page 36)<br />

6<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

Electronic/Software specifications<br />

Electronic/Software specifications<br />

• Measuring rate<br />

• Digital output type<br />

• Analog outputs<br />

• Trigger options<br />

• Available software<br />

See:<br />

• For Point sensors:<br />

See controller specificatons (Pages 12, 16, 24)<br />

• For MPLS180 sensor:<br />

See controller specificatons (Pages 35)<br />

Mechanical specifications<br />

For Outline dimensions of all products, see pages (53-70).<br />

Value-for-Cost<br />

• The mult-channel point sensors (multplexed CCS-Prima and simultaneous-channel CHR-150L) allow significant saving<br />

compared to 2 or 4 independent sensors.<br />

• The <strong>STIL</strong>-Duo controller combines 2 complementary technologies (Confocal Spectral Interferometry and Chromatic<br />

Confocal Imaging) in the same controller.<br />

• The <strong>STIL</strong>-Initial sensor («bundle» product suitable for first-tme users and for lab applicatons) is proposed at a very attractve<br />

price. This sensor has some limitatons when compared to the other chromatc confocal point sensors as shown<br />

in the table below.<br />

<strong>STIL</strong>-Initial CCS-Prima CHR-150L<br />

Number of optical pens that are interchangeable on<br />

the same controller<br />

1 (1) up to 20 (2) Up to 6 (2)<br />

Available chromatic confocal optical pen models Some models (3) All models All models<br />

Multi-channel operation No Opton (4) Opton (4)<br />

Output type Digital Digital & Analog Digital & Analog<br />

External Encoder reading capability No Yes No<br />

Controller box type Desktop Industrial Desktop<br />

(1) The optcal pen of the <strong>STIL</strong>-Inital is selected when ordering, no replacement is possible later.<br />

(2) Optcal pens may be connected and disconnected from the controller easily. New optcal pens may be added later to the CCS-Prima and the CHR-150L controllers,<br />

but they should be calibrated at factory on the customer’s controller.<br />

(3) See page (11).<br />

(4) See «Mult-channel operaton» on this selecton guide.<br />

E1204<br />

www.stlsa.com 7


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Introducing Confocal Chromatic technology<br />

The fruits of more than fifteen years of research and development by<br />

our engineers, <strong>STIL</strong>’s optcal sensors offer the best of technology in<br />

response to the most demanding needs in terms of non contact dimensional<br />

measurements.<br />

Based on an innovatve optcal principle which uses the chromatc coding<br />

of space (invented and patented by <strong>STIL</strong>), our sensors allow users<br />

to make measurements on nearly any kind of materials, with an exceptonal<br />

accuracy.<br />

<strong>STIL</strong>’s sensors find applicatons in almost all sectors of industry, be it as<br />

high precision instruments in metrology or research laboratories, or as<br />

quality control tools on producton lines.<br />

Designed for use in industrial environments, the different ranges of<br />

<strong>STIL</strong>’s sensors will appeal to integrators thanks to their easy interfacing<br />

on measurement and inspecton machines, made possible thanks to<br />

the DLL/ dynamic link libraries provided with each instrument.<br />

3D SYSTEMS<br />

Optical principle<br />

Our optcal sensors are based on the highly innovatve Confocal Chromatc Imaging principle (<strong>STIL</strong> SA’s patent).<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

An incident white light pinhole is imaged through a<br />

chromatc objectve into a contnuum of monochromatc<br />

images along the Z-Axis, thus providing a «color coding»<br />

along the optcal axis.<br />

When an object is present in this «colored» field, a<br />

unique wavelength is perfectly focused at its surface<br />

and then reflected into the optcal system.<br />

This backscattered beam passes through a filtering<br />

pinhole into a spectrograph, which determines the<br />

wavelength has been perfectly focused on the object,<br />

and then accurately determine its positon in the<br />

measuring field.<br />

The Confocal Chromatc Imaging gives access to reliable,<br />

accurate and reproducible dimensional measurements<br />

with extremely high resoluton.<br />

8<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

A wide range of applications<br />

Roughness measurement<br />

Our sensors are fully compliant with<br />

the new ISO25178 regulaton and are<br />

able to measure roughness values<br />

down to a few nanometers.<br />

They allow to acquire roughness profiles<br />

much faster than a classical tactle<br />

probe, and without any risk of marking<br />

the surface.<br />

Profilometry & Microtopography<br />

Interfaced with 3D scanning devices, <strong>STIL</strong>’s sensors<br />

give acess to full 2D and 3D measurements of complex<br />

objects or assemblies with submicronic accuracy.<br />

Thickness measurement<br />

The very innovatve Confocal Chromatc<br />

Imaging principle allows measurement<br />

of the thickness of transparent materials,<br />

with extremely high accuracy,<br />

using one single sensor. The thickness<br />

is directly measured from one<br />

side of the<br />

sample.<br />

Autofocus<br />

Thanks to their extended measuring range, <strong>STIL</strong>’s<br />

sensors are the perfect soluton for an accurate<br />

autofocus in vision systems.<br />

Level control<br />

Thanks to their non-contact technology,<br />

our sensors allow detecton and measurement<br />

of fluids’ level.<br />

Online inspection<br />

<strong>STIL</strong> SA’s optcal sensors allow systematc control<br />

on producton lines thanks to their very high<br />

measuring rates and advanced interfacing<br />

capabilites with the manufacturing<br />

chain or the custom inspecton machine.<br />

Vibrometry<br />

Thanks to very high measuring frequencies and nanometric<br />

resoluton, our sensors allow the measurement<br />

of vibratons in objects under test. Their<br />

non-contact design avoids disturbance of the system<br />

under test, and allows analysis and measurement of<br />

difficult to access areas.<br />

E1204<br />

www.stlsa.com 9


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

3D SYSTEMS<br />

Characteristics<br />

High resoluton non contact optcal sensors for 3D measurement with a wide range of applicatons.<br />

Advantages<br />

Characteristics<br />

Confocal setup<br />

Coaxial setup<br />

Chromatic coding/decoding<br />

Optical fiber system<br />

Measuring modes<br />

Benefits<br />

- Exceptonal signal-to-noise rato (SNR)<br />

- High resoluton<br />

- No shadowing effects<br />

- Capability of measuring highly polished surfaces<br />

- No Z scanning required<br />

- High precision<br />

- Small, light weight, passive optcal probe («optcal pen»)<br />

connected to the controller by a fiber optcs cable<br />

- «Distance» (Z-coordinate)<br />

- «Thickness» measurement of transparent materials<br />

- Measure on any type of material (metal, glass, ceramics, semiconductors, paper),<br />

- Measure on polished surfaces (mirrors, wafers) and on rough ones,<br />

- Insensitve to ambient lightng,<br />

- Compatble with harsh environments (high temperature / high pressure / irradiaton),<br />

- ISO 25178 standard compliant,<br />

- Large choice of measuring ranges (100 µm to 42 mm ranges),<br />

- Large choice of optcal pens for specific requirements («endoscopic» pens / radial pens / large working distance /<br />

steep slope / small spot size / through-window measurement...),<br />

- Free software toolkit for an easy interfacing («CCS Manager» utlity, c++ and .net DLL SDK).<br />

Product lines<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Product lines<br />

<strong>STIL</strong> Initial<br />

CCS controller<br />

+ Optical pen(s)<br />

+ Fiber optics cable(s)<br />

CHR controller<br />

+ Optical pen(s)<br />

+ Fiber optics cables(s)<br />

Features<br />

- «Bundle» products including everything you need<br />

- Recent design, many advandced features<br />

- Ideal for first-tme users and research laboratories<br />

- Exceptonal Value-for-Price<br />

- Configurable sensors<br />

- Large choice of interchangeable optcal pens<br />

- Recent design, many advandced features<br />

- Ideal for OEM users and Industrial applicatons<br />

- Very wide range of applicatons<br />

- 2 & 4 selectable-channels models available<br />

- Configurable sensors<br />

- Large choice of interchangeable optcal pens<br />

- 2 & 4 simultaneous-channels models available<br />

10<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

«Bundle» Chromatic Confocal sensors<br />

These sensors measure the alttude (z coordinate) of the sample point located on their optcal axis and the thickness of<br />

transparent samples.<br />

Advantages<br />

- «Bundle» products including everything required for launching a measurement immediately: a controller, an optcal pen<br />

(probe), a fiber optc cable, electrical cables, software tools and a comprehensive user manual,<br />

- Best choice for first-tme users and for research lab applicatons,<br />

- High precision, high resoluton,<br />

- Exceptonal value for price.<br />

<strong>STIL</strong> Initial Sensor Line<br />

<strong>STIL</strong> Inital is a new line of high-resoluton chromatc confocal sensors. 5 models are available, each with a different optcal<br />

pen. Contact us for advice on the best model for your applicaton.<br />

Specifications (*) <strong>STIL</strong> Initial 0.4 <strong>STIL</strong> Initial E1.2 <strong>STIL</strong> Initial E1.2/90 <strong>STIL</strong> Initial 4.0 <strong>STIL</strong> Initial 12<br />

Optical Pen Model CL2-MG140 ENDO 1.2 ENDO 1.2/90° CL4-MG35 CL5-MG35<br />

Measuring Range 0.4 mm 1.2 mm 1.2 mm 4.0 mm 12.0 mm<br />

Working Distance 11.0 mm 2.4 mm 0.4 mm 16.4 mm 29 mm<br />

Axial Resolution 22 nm 100 nm 160 nm 130 nm 400 nm<br />

Accuracy 80 nm 300 nm 800 nm 300 nm 900 nm<br />

(*) See detailed specificatons next page<br />

The <strong>STIL</strong> Inital controller is highly sophistcated, it features extensive synchronizaton opton and advanced measuring modes.<br />

Here are a few examples.<br />

Functions<br />

Application<br />

«Auto-LED» : The LED brightness<br />

adapts itself automatcally<br />

Samples with variable slope e.g lenses<br />

«First peak» : The sensor locks on<br />

the first surface<br />

Topography on transparent objects or<br />

coated samples<br />

«Double Frenquency» : The sensor<br />

selects the optmal measuring rate<br />

automatcally<br />

Samples with high sharp reflectvity variatons,<br />

e.g. mask for microelectronics<br />

«Hold Last Value» : Output data<br />

smoothing<br />

Very difficult samples with many non<br />

measurable points<br />

E1204<br />

www.stlsa.com 11


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

<strong>STIL</strong> Initial: Technical specifications<br />

Controllers<br />

<strong>STIL</strong> initial Series<br />

Model <strong>STIL</strong> Initial 0.4 <strong>STIL</strong> Initial E1.2 <strong>STIL</strong> Initial E1.2 /90 (1) <strong>STIL</strong> Initial 4.0 <strong>STIL</strong> Initial 12<br />

OPTICAL PEN (PROBE)<br />

Model CL2-MG140 ENDO 1.2 ENDO 1.2/90 (1) CL4-MG35 CL5-MG35<br />

Measuring Range 0.4 mm 1.2 mm 1.2 mm 4.0 mm 12.0 mm<br />

Working Distance 11.0 mm 2.4 mm 0.4 mm 16.4 mm 29 mm<br />

Spot Diameter 3.4 µm 15 µm 13 µm 7.2 µm 16.5 µm<br />

Max. Slope Angle (2) (3) +/- 28° +/- 14° +/- 9° +/- 21° +/- 14°<br />

Weight 190 g 10 g 10g 155 g 175 g<br />

Dimensions x L 27mm x 208.9mm 6 mm x 75.2 mm 6 mm x 82 mm 27 mm x 145.5 mm 27 mm x 145.5 mm<br />

Distance Measurement<br />

Axial Resoluton (4)<br />

- With no averaging<br />

- With Averaging 10<br />

22 nm<br />

8 nm<br />

100 nm<br />

35 nm<br />

160 nm<br />

60 nm<br />

130 nm<br />

50 nm<br />

400 nm<br />

180 nm<br />

Accuracy (5) 80 nm 300 nm 800 nm 300 nm 900 nm<br />

Measuring rough metalic samples (9) R NR NR NR NR<br />

Roughness measurement (10)<br />

Min. measurable Ra<br />

30nm NR NR NR NR<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Thickness Measurement (6)<br />

Min. Measurable Thickness (7)(8) 16 µm 75 µm NA 110 µm 450 µm<br />

Max. Measurable Thickness (7)(8) 510 µm 1600 µm NA 5700 µm 16500 µm<br />

CONTROLLER BOX<br />

Measuring Modes<br />

Measuring Rate<br />

Digital Outputs<br />

Digital Resoluton<br />

Synchronizaton<br />

Advandced Features<br />

Power supply / Consumpton<br />

Weight<br />

Dimensions W x H x D<br />

FIBER OPTICS CABLE<br />

«Distance» and «Thickness»<br />

100 Hz to 2000Hz<br />

USB 2.0 and RS232 (up to 460800 baud)<br />

In «Distance» mode: 30 bits<br />

In «Thickness» mode: 15 bits<br />

Input and Output 0V - 5V TTL synchronizaton signals<br />

Extensive trigger capacites<br />

«Double frequency» mode<br />

«Auto LED» mode<br />

«First peak» mode<br />

«Hold last value» mode<br />

«Thickness calibraton»<br />

100V to 240 V AC 50-60 Hz / 25W<br />

1920 g<br />

199 mm x 123.5 mm x 277 mm<br />

(1) Radial (90°) measuring optcal pen.<br />

(2) The maximal angular slope applies to specular (mirror-like) surfaces only. For Diffusing surfaces the maximal slope angle is higher (up to 87° for perfect diffusers).<br />

(3) Measured on a mirror at 100 Hz, with no averaging.<br />

(4) Axial resoluton is defined as the RMS Noise level measured at optmal rate on a statc sample located at the center of the measuring, with no averaging.<br />

(5) Accuracy is defined as the max. error over the entre measuring range, measured immediately after distance calibraton at the following conditons: “Auto-adaptve LED”<br />

mode, optmal rate, slope angle=0°, averaging factor= measuring rate/10.<br />

(6) For obtaining metrological performances in this mode it is recommended to carry out a calibraton on a thickness standard.<br />

(7) These values are for a refractve index of 1.5 (for measuring air gap thickness divide by 1.5).<br />

(8) Typical values, measured at the center of the measuring range at optmal rate, with no averaging.<br />

(9) R = Recommended for measuring rough metallic samples (these samples can be measured with full performances)<br />

NR = Not recommended for measuring rough metallic samples (these samples may be measured, but with reduced performances)<br />

(10) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical..<br />

N.B. : the values are subject to change without notce.<br />

12<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

Configurable Chromatic Confocal «point» sensors<br />

These sensors measure the alttude (z coordinate) of the sample point located on their optcal axis.<br />

They can also measure the thickness of transparent samples.<br />

They consist of a controller (1), an «optcal pen» (optcal probe) (2) and a fiber optc cable (3).<br />

2 controller lines (CCS & CHR), 3 optcal pen lines (CL-MG, OP & ENDO) and different fiber optc cable models are available.<br />

A single controller may be ordered with several interchangeable optcal pens.<br />

(1)<br />

(3)<br />

(2)<br />

Advantages<br />

- Select the CCS or CHR controller, as well as the optcal pen and the fiber optcs cable best suited for your applicaton.<br />

- Large choice of measuring ranges (110 µm - 20 mm),<br />

- Large choice of optcal pens satsfying specific requirements («endoscopic» / radial pens / large working distance / steep<br />

slope / small spot size / through-window measurement..)<br />

The CCS controller line<br />

3 controllers for configurable chromatc confocal sensors featuring different number of channels are available:<br />

- the CCS PRIMA (1 channel), CCS PRIMA 2 (2 channels) and CCS PRIMA 4 (4 channels).<br />

Advantages<br />

- High precision, high resoluton,<br />

- Compatble with all chromatc confocal optcal pens,<br />

- Up to 20 different optcal pens interchangeable on the same controller,<br />

- Digital and analog outputs,<br />

- Synchronized reading of external digital encoders.<br />

CCS PRIMA controllers<br />

- The leading chromatic confocal sensor worldwide,<br />

- The most sophisticated chromatic confocal sensor on the market,<br />

- Recommended for OEM User and Industrial applicatons,<br />

- Improved performances in thickness mode thanks to a specific Thickness calibraton,<br />

- Long lifetme light source,<br />

- Measuring rates: 100 Hz to 2000 Hz.<br />

E1204<br />

www.stlsa.com 13


SPECTRO<br />

COLORIMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

The CCS PRIMA controller is higly sophistcated, it offers extensive synchronizaton optons and advanced measuring modes.<br />

SENSORS<br />

Functions<br />

«Auto-LED» : The LED brightness<br />

adapts itself automatcally<br />

«First peak» : The sensor locks on<br />

the first surface<br />

«Double Frenquency» : The sensor<br />

selects the optmal measuring rate<br />

automatcally<br />

«Hold Last Value» : Output data<br />

smoothing<br />

Application<br />

Samples with variable slope e.g lenses<br />

Topography on transparent objets<br />

Samples with high sharp reflectvity<br />

variatons, e.g. mask for microelectronics<br />

Very difficult samples with many non<br />

measurable points<br />

3D SYSTEMS<br />

2 and 4 CCS Prima Multiplexed Channel Models<br />

- Up to 4 optcal pens connected to a single CCS PRIMA controller<br />

- Multplexed channels, Commutaton tme < 400ms,<br />

- Ideal for automatc inspecton applicatons,<br />

- Save up to 62 % compared to 4 independent controllers.<br />

GONIO<br />

PHOTOMETERS<br />

4 multplexed channels<br />

CCS PRIMA4 Controller<br />

2 multplexed channels<br />

CCS PRIMA2 Controller<br />

14<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

The CHR Controller Line<br />

CHR150-L controllers<br />

- High precision, high resoluton,<br />

- Measuring rate up to 1 KHz,<br />

- Compatble with all optcal pens,<br />

- Long lifetme light source,<br />

- Intergrated control panel.<br />

CHR150 controllers<br />

- Tungsten Halogen light source<br />

2 and 4 CHR150 or CHR150-L simultaneous channel models<br />

- Up to 4 optcal pens connected to a single CHR150-L controller<br />

- All channels measure simultaneously,<br />

- Each channel may be configured independently,<br />

- Save up to 44% compared to 4 independent controllers.<br />

2 Channels CHR150 Controller<br />

E1204<br />

www.stlsa.com 15


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

Controllers for configurable chromatic confocal point sensors:<br />

Technical specifications<br />

Controllers CHR Series CCS Series<br />

Model CHR150 CHR150-L CCS-PRIMA<br />

Measuring frequency<br />

From 30 to 1000 points/sec<br />

User defined<br />

From 30 to 1000 points/sec<br />

User defined<br />

From 100 to 2000 points/sec<br />

User defined<br />

Multchannel version (1) Available (2 & 4 channels) Available (2 & 4 channels) Available (2 &4 channels)<br />

SENSORS<br />

Light source Halogen White LED White LED<br />

Light source brightness setting None Manual Programmable<br />

Advandced Features:<br />

«Lock on first surface»<br />

«Hold Last Value»<br />

«Thickness calibraton»<br />

«Auto LED» (2)<br />

«Autodark» functon (3)<br />

«Double frequency»<br />

No<br />

No<br />

No<br />

No<br />

No<br />

Up to 489 Hz<br />

No<br />

No<br />

No<br />

No<br />

No<br />

Up to 489 Hz<br />

Yes<br />

Yes<br />

Yes<br />

Yes<br />

Yes<br />

Up to 1850 Hz<br />

Measuring modes<br />

Distance<br />

Thickness<br />

Distance<br />

Thickness<br />

Distance<br />

Thickness<br />

Calibraton tables (max) 6 20<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Encoders input (4) No No Yes (up to 3 axes) - TTL signals input - 30 bits counters (> 1 billion steps count)<br />

Digital outputs 15 bits resoluton 30 bits resoluton<br />

Analog outputs 2 configurable outputs [0 – 10 V] - 12 bits resoluton 2 configurable outputs [0 - 10V] - 16 bits resoluton<br />

Digital I/O RS232 (up to 115200 baud») serial link USB2 and RS232/RS422 (up to 46800 baud)<br />

Synchronizaton I/O 1 Synchro input (TTL) / 1 Synchro output (TTL) 1 Synchro input (TTL) / 1 Synchro output (TTL)<br />

Optcal fiber connector<br />

Compatble Optcal pens<br />

E2000 type («push-pull») with «Autoprotect» system<br />

All chromatc confocal pen types<br />

Power supply / consumpton From 85 to 240 V AC / 100 W From 85 to 240 V AC / 25 W 24 V DC / 20 W<br />

Temperature in use 5°C - 40°C<br />

Storage temperature -30°C – 70°C<br />

Relatve humidity in use<br />

5%-80% HR without condensaton<br />

Protecton type IP 40<br />

EMC<br />

EN 61000-6-3 and EN 61000-6-2 compliant<br />

Weight (5) 3.4 kg 1.4 Kg<br />

Dimensions (w x h x d) 316mm x 96mm x 235mm 168mm x 138mm x 120mm<br />

Mechanical interface Table top controller Integrated DIN rail mountng interface<br />

(1) Multplexed channels (CCS) Vs simultaneous multple channels (CHR):<br />

- CCS PRIMA4 multplexed sensor: 1 (out of 4) optcal pen can measure at a tme, the sensor can switch to another optcal<br />

pen in about 400 ms.<br />

- CHR150-2 and CHR150-4 Multple channels: All the optca l pens (2 or 4) can measure simultaneously.<br />

(2) The «Auto Led» functon allows the CCS Prima controller to dynamically adjust the LED light power in order to permanently adapt<br />

it according to the reflectvity of the measured object.<br />

(3) The «Autodark» functon allows a constant and automatc regulaton of the Dark signal level of the CCS controller.<br />

(4) The incremental encoders input port allows the acquisiton of the instant positon of the measuring system moton axes (3 axes<br />

maximum). These measurements are synchronized with the measuring frequency of the sensor.<br />

(5) The specified weight does not include the external light source for the CCS Ultma model.<br />

N.B. : the values are subject to change without notce.<br />

16<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

3D measurement examples: chromatic confocal technology<br />

Intra occular lens (IOL) - Z range: 750µm<br />

3D measurement examples: confocal spectral interferometry<br />

Through Silicon Vias (TSV) array - Via diameters: 5µm to 20µm - Z range 100µm<br />

E1204<br />

www.stlsa.com 17


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

Modular optical pens (CL-MG Line)<br />

CL-MG Line *<br />

Model CL1 CL2 CL3 CL4 CL5 CL6<br />

Measuring range (1) [µm] 130 400 1400 4000 12000 24000<br />

Working distance (2) [mm] 3.3 11 12.7 16.4 29 22<br />

Max. object slope (3) [deg] +/- 42.5° +/- 28° +/- 25° +/- 21° +/- 14° +/- 8.5°<br />

Reference plate (4) - No Yes Yes Yes Yes No<br />

SENSORS<br />

Axial model (5)<br />

-<br />

Radial model (5) -<br />

Standard<br />

Optonal<br />

Magnifier model MG210 MG140 MG210 MG140 MG70 MG140 MG70 MG35 MG20 MG35 MG20 MG35 MG20<br />

LATERAL (XY) PROPERTIES<br />

Spot size (diameter)<br />

Lateral resoluton (6)<br />

[µm]<br />

[µm]<br />

1.9<br />

0.9<br />

2.8<br />

1.4<br />

2.3<br />

1.2<br />

3.4<br />

1.7<br />

6.9<br />

3.5<br />

4<br />

2<br />

8<br />

4<br />

8<br />

4<br />

14<br />

7<br />

14<br />

7<br />

24.5<br />

12.3<br />

16<br />

8<br />

28<br />

14<br />

PHOTOMETRIC EFFICIENCY (7)<br />

Collected energy (relatve) - 5.8 13 5.5 11.5 46 14 56 30 76 40 100 19.2 48<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

MECHANICAL INTERFACE<br />

Length (8)<br />

Diameter (8)<br />

Weight<br />

Performances (9)<br />

DISTANCE MEASUREMENT<br />

Axial resoluton (10)<br />

With no averaging<br />

With averaging 10<br />

Accuracy (11)<br />

Measuring rough metal surface (12)<br />

[mm]<br />

[mm]<br />

[g]<br />

[nm]<br />

[nm]<br />

[nm]<br />

-<br />

253.1<br />

27<br />

268<br />

8<br />

2.7<br />

35<br />

R<br />

217.1<br />

27<br />

195<br />

243.3<br />

27<br />

248<br />

208.9<br />

27<br />

190<br />

22<br />

8<br />

80<br />

R<br />

ROUGHNESS MEASUREMENT<br />

Min. measurable Ra (13) [nm] 12 30 90 170 600 1100<br />

THICKNESS MEASUREMENT (14)<br />

Min. measurable thickness (15)<br />

Max. measurable thickness (15)<br />

[µm]<br />

[µm]<br />

7.5<br />

175<br />

9<br />

175<br />

14<br />

510<br />

14<br />

510<br />

176.1<br />

27<br />

189<br />

22<br />

510<br />

205.9<br />

27<br />

215<br />

R<br />

38<br />

2000<br />

60<br />

20<br />

200<br />

176.1<br />

27<br />

214<br />

NR<br />

40<br />

2000<br />

145.5<br />

27<br />

155<br />

110<br />

5700<br />

130<br />

50<br />

300<br />

NR<br />

131.7<br />

27<br />

140<br />

120<br />

5700<br />

145.5<br />

27<br />

175<br />

350<br />

16500<br />

400<br />

180<br />

800<br />

NR<br />

131.7<br />

27<br />

160<br />

550<br />

16500<br />

167.6<br />

27<br />

195<br />

590<br />

34000<br />

780<br />

300<br />

1500<br />

NR<br />

151.8<br />

27<br />

180<br />

725<br />

34000<br />

GONIO<br />

PHOTOMETERS<br />

N.B. : the values are subject to change without notce.<br />

18<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

Classical optical pens (OP Line)<br />

OP Line<br />

Model OP300VM OP6000 OP8000 OP10000 OP24000 OP42000<br />

Measuring range (1) [µm] 300 6 000 8000 10 000 24 000 42 000<br />

Working distance (2) [mm] 5 28.8 37.2 66.9 223 518<br />

Max object slope (3) [deg] +/- 25° +/- 22° +/- 16° +/- 12° +/- 5° +/- 2.5°<br />

Reference plate (4) - No No Yes Yes Yes No<br />

Axial model (5)<br />

Radial model (5) -<br />

Standard<br />

Optonal<br />

Standard<br />

No<br />

Standard<br />

No<br />

Standard<br />

Optonal<br />

Standard<br />

Optonal<br />

Standard<br />

No<br />

LATERAL (XY) PROPERTIES<br />

Spot size (diameter)<br />

Lateral resoluton (6)<br />

[µm]<br />

[µm]<br />

8<br />

4<br />

12.5<br />

6.25<br />

34<br />

17<br />

51<br />

25.5<br />

100<br />

50<br />

110<br />

55<br />

MECHANICAL INTERFACE<br />

Length (8)<br />

Diameter (8)<br />

Weight<br />

[mm]<br />

[mm]<br />

[g]<br />

127<br />

15<br />

25<br />

205.5<br />

60<br />

727<br />

150<br />

40<br />

400<br />

189<br />

50<br />

640<br />

172.5<br />

59<br />

360<br />

287.2<br />

85<br />

1700<br />

Performances (9)<br />

DISTANCE MEASUREMENT<br />

Axial resoluton (10)<br />

Accuracy (11)<br />

[nm]<br />

[nm]<br />

10<br />

90<br />

250<br />

600<br />

400<br />

800<br />

450<br />

900<br />

1500<br />

3000<br />

4000<br />

40000<br />

Min. measurable thickness (15) [µm] 25 200 300 425 1570 2500<br />

(1) The measuring range depends on the controller model. The numerical values in this table are nominal values for a CCS Prima controller.<br />

(2) The working distance depends on the controller model. The numerical values given in this table are typical values for a CCS-Prima controller.<br />

(3) The max measurable slope angle applies to specular (mirror-like) surfaces only. For scattering surfaces the maximal slope angle is higher (up to 87° for perfect diffusers); however<br />

the intensity of the collected signal decreases with increasing slope angle. The values given in this table were measured on a mirror at a rate of 100 Hz, with no averaging.<br />

(4) The reference plate is a glass window that can be either located inside the optcal pen, or fixed on the same surface.<br />

(5) For “axial” optcal pens the measuring range is parallel to the mechanical axis of the pen.<br />

For “radial” optcal pens the measuring range is normal to the mechanical axis, allowing to measure inside holes.<br />

(6) The lateral resoluton is defined as half the spot diameter.<br />

(7) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this table are<br />

typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a model with low photometric efficiency in order to avoid<br />

saturaton. For measuring diffusive or low-reflectng samples, select a model with high photometric efficiency in order to avoid a poor signal-to-noise rato.<br />

(8) Length and weight excluding the fiber optcs cable. The values given here are for the “axial” model.<br />

(9) The performances given in this table were measured for a CCS Prima controller.<br />

(10) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the center of the measuring<br />

range. Two values are given, with internal averaging set to 1 and to 10, respectvely. This parameter is measured immediately after distance calibraton and is specified on the<br />

calibraton certficate which is delivered with each sensor.<br />

(11) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a 1-nm<br />

accurate encoder. This parameter is measured with the following settings: “Auto-adaptve LED” mode, optmal rate, slope angle=0°, internal averaging = measuring rate/10.<br />

This parameter is measured immediately after distance calibraton and is specified on the calibraton certficate which is delivered with each sensor.<br />

(12) R = Recommended for measuring rough metallic samples (these samples can be measured with full performances)<br />

NR = Not recommended for measuring rough metallic samples (these samples may be measured, but with reduced performances)<br />

(13) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical.<br />

(14) Performances in thickness mode, and in partcular the accuracy of thickness measurement, depend on the characteristcs of the sample as well as on a procedure of “Thickness<br />

calibraton” that should be performed by the user. For more informaton contact us.<br />

(15) Typical values measured at the center of the measuring range at optmal rate, with no averaging.<br />

These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be divided by 1.5)<br />

N.B. : the values are subject to change without notce.<br />

E1204<br />

www.stlsa.com 19


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

Miniature optical pens (ENDO Line)<br />

SENSORS<br />

3D SYSTEMS<br />

<strong>STIL</strong> introduce ENDO, a new line of confocal chromatc pens providing an amazing tny size.<br />

The ENDO optcal pens are ideal for non-contact measurements applicaton in reduced space environnements.<br />

These miniature pens are very useful fot the measurement of holes or cavites with small diameter.<br />

Thanks to their small size (6 mm diameter), their integraton in inspecton machines in the producton line is made easier.<br />

SPECTRO<br />

COLORIMETERS<br />

Working with any <strong>STIL</strong> optoelectronic controllers, the ENDO series allow performing a precise measurement with submicron resoluton.<br />

GONIO<br />

PHOTOMETERS<br />

Axial measuring directon configuraton<br />

20<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

Miniature Series<br />

Model ENDO0.1 ENDO0.3/90 ENDO1.2 ENDO1.2/90 ENDO1.5 ENDO1.5/90<br />

Nominal measuring range (1) [µm] 100 300 1200 1200 1500 1500<br />

Working distance [mm] 1.1 0.8 2.3 0.4 2.1 0.5<br />

Minimum radius measurable (2) [mm] - 3.8 - 3.4 - 3.5<br />

Axial resoluton in distance mode [µm] 0.02 * 0.1 0.15 0.1 *<br />

Axial accuracy in distance mode [µm] 0.05 * 0.2 0.25 0.2 *<br />

Max object slope (3) [deg] +/-24° +/-10° +/- 13° +/- 11° +/- 13° +/- 10°<br />

Spot size diameter [µm] 6.2 6 15 15 7.1 20<br />

Lateral resoluton [µm] 3.1 3 7.5 7.5 3.5 10<br />

Length (4) [mm] 58.9 69.8 75.2 82 100.6 90<br />

Weight (4) [g] 10 * 10 10 12 12<br />

Mechanical diameter [mm] 6 6 6 6 6 6<br />

Measuring directon - Axial Radial Axial Radial Axial Radial<br />

(1) The precise values of the measuring range, the resoluton and the working distance depend on the controller type. The values in these tables are for the<br />

CCS PRIMA controller.<br />

(2) The minimum radius measurable is the distance from the axial axis to the beginning of the measuring range for radial configuraton.<br />

(3) The values in these tables are for specular samples, for diffusive samples, the maximum slope can be much higher. The values are theoretcal.<br />

(4) The length and weight do not include the optcal fiber.<br />

(*) These parameters will be soon available, contact us.<br />

Radial measuring directon configuraton (zoom)<br />

N.B. : the values are subject to change without notce.<br />

E1204<br />

www.stlsa.com 21


GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Introducing Spectral Confocal Interferometry technology<br />

The measurement accuracy in non contact profilometric techniques is generally limited by mechanical vibratons and by positonal<br />

inaccuracies of the micro-scanning table. In order to free the measurement from these environnemental perturbatons, <strong>STIL</strong> has<br />

developed a new vibraton insensitve interferometric method. With this new type of interferometric system, the potental subnanometric<br />

accuracy of interferometric microscopy is effectve.<br />

Moreover this new sensor can be used for measuring transparent films that are too thin to allow the “Chromatc Confocal” technique<br />

to be used. The minimum measurable thickness is 0.4 µm.<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

Confocal Spectral Interferometry principle<br />

The <strong>STIL</strong> interferometric method is based on Spectroscopic Analysis of White Light Interferograms (SAWLI). It consists in analysing<br />

the interference signal observed on a spectrometer in order to measure the air gap thickness between the reference plate and the<br />

sample. The originality of the developed system lies in the fixaton of the reference plate on the inspected object. As reference<br />

plate and sample are fixed together, the mechanical vibratons do not affect the measurements.<br />

The interferometric signal is a channelled spectrum. From this signal, the spectral phase is calculated using a numerical seven<br />

points phase shifting algorithm allowing the measurement of the local height of the analyzed surface with a subnanometric<br />

resoluton.<br />

22<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

The <strong>STIL</strong> DUO controller line<br />

The new sensor <strong>STIL</strong> DUO double technology, a new standard in the world of dimensional measurement.<br />

The sensor <strong>STIL</strong> DUO is the first system in the world that offers two simultaneous measurement technologies: the Confocal<br />

Chromatc and the White Light Spectral Interferometry with an original confocal setup.<br />

By associatng these two technologies (two <strong>STIL</strong> processes) the sensor <strong>STIL</strong> DUO creates a new standard in the world of dimensional<br />

measurement because it allows the user to get the very best out of these two operatng principles:<br />

- <strong>STIL</strong>’s Confocal Chromatc principle makes it possible to work with a large measurement scale going from 130 µm<br />

to 42 mm. This characteristc is perfect for rugosity and surface topography measurements, which give very high<br />

precision results on any type of material, be it reflectve or diffusing. The measurement is in compliance with the<br />

new ISO 25178 standard.<br />

- <strong>STIL</strong>’s Confocal Spectral Interferometry process gives access to sub-nanometric resolutons (


GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Advantages<br />

- Vibraton insensitve (OPILB-RP optcal pen),<br />

- High signal to noise rato (OPILB-RP optcal pen),<br />

- No vertcal scanning required,<br />

- Minimum measurable thickness 0.4 µm,<br />

- Subnanometric resoluton inherent to the optcal principle,<br />

- No cross talk between neighbouring points, thanks to confocality,<br />

- Exceptonnal performances in thickness measurement (0.3 nm resoluton, 10 nm accuracy)<br />

Configurations<br />

The sensor consists of:<br />

- A <strong>STIL</strong> DUO controller,<br />

- One or more interference optcal pen(s),<br />

- One or more chromatc confocal optcal pen(s) (optonal),<br />

- a fiber optc cable for each optcal pen.<br />

3D SYSTEMS<br />

<strong>STIL</strong>-DUO controller: technical specifications<br />

DUO<br />

Measuring frequency<br />

up to 2000 Hz<br />

Wavelength range<br />

400-900 nm<br />

Spectral resoluton<br />

0.6 nm / pixel<br />

SPECTRO<br />

COLORIMETERS<br />

Light Source<br />

Digital outputs<br />

Synchronizaton I/O<br />

Optcal fiber connectors<br />

Humidity limits<br />

Temperature in use<br />

Dimensions<br />

Weigth<br />

Measuring mode:<br />

Distance/Thickness<br />

Tungsten halogen lamp and White LED<br />

Ethernet / RS232<br />

1 input (TTL) / 1 output (TTL)<br />

E2000<br />

5%-80% HR without condensaton<br />

5 - 50° C<br />

376mm x 363mm x 114mm<br />

6 Kg<br />

1- Confocal Chromatc<br />

2- Confocal spectral Interferometry<br />

24<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

Interferometric optical pens (OPILB line)<br />

OPILB Line<br />

Model OPILB-RP OPILB-LWD-D OPILB-LWD-T OPILB<br />

Measuring mode - Distance Distance Thickness Thickness<br />

Measuring range [µm] 135 135 - -<br />

Working distance [mm] 5.3 5.3 5.3 42<br />

Max. object slope [deg] +/- 7° +/- 7° +/- 7° +/- 7°<br />

Reference plate (1) - Yes No No No<br />

Magnifier model MG210 MG140 MG210 MG140 MG70 MG35 MG20 -<br />

LATERAL (XY) PROPERTIES<br />

Spot size (diameter)<br />

Lateral resoluton (2)<br />

[µm]<br />

[µm]<br />

3.8<br />

1.9<br />

5.6<br />

2.8<br />

3.8<br />

1.9<br />

5.6<br />

2.8<br />

11.4<br />

5.7<br />

22.8<br />

11.4<br />

40<br />

20<br />

40<br />

20<br />

MECHANICAL INTERFACE<br />

Length (4)<br />

Diameter (4)<br />

Weight<br />

[mm]<br />

[mm]<br />

[g]<br />

200<br />

27<br />

200<br />

164<br />

27<br />

127<br />

200<br />

27<br />

200<br />

164<br />

27<br />

127<br />

131<br />

27<br />

126<br />

100<br />

27<br />

67<br />

84<br />

27<br />

52<br />

145.5<br />

27<br />

155<br />

Performances<br />

DISTANCE MEASUREMENT<br />

Axial resoluton (5)<br />

Accuracy (6)<br />

Measuring rough metal surface (7)<br />

[nm]<br />

[nm]<br />

-<br />

0.5<br />

10<br />

NR<br />

2<br />

10<br />

NR<br />

- -<br />

ROUGHNESS MEASUREMENT<br />

Min. measurable Ra (8) [nm] 0.5 3 - -<br />

THICKNESS MEASUREMENT<br />

Min. measurable thickness (9)<br />

Max. measurable thickness (9)<br />

Axial resoluton (5)<br />

Accuracy (6)<br />

[µm]<br />

[µm]<br />

[nm]<br />

[nm]<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

0.4<br />

90<br />

0.3<br />

10<br />

0.4<br />

90<br />

0.3<br />

10<br />

0.4<br />

90<br />

0.3<br />

10<br />

0.4<br />

90<br />

0.3<br />

10<br />

(1) The reference plate is placed directly on the sample. The reference plate of the OPILB-RP acts as an absolute reference. It compensates for the mechanical imperfectons<br />

of the scanning system.<br />

(2) The lateral resoluton is defined as half the spot diameter.<br />

(3) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this<br />

table are typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a magnifier model with low photometric<br />

efficiency in order to avoid saturaton. For measuring diffusive or low-reflectng samples, select a magnifier with high photometric efficiency in order to avoid a poor<br />

signal-to-noise rato.<br />

(4) Length and weight excluding the fiber optcs cable.<br />

(5) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the optmal poston.<br />

(6) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a<br />

1-nm accurate encoder.<br />

(7) R = Recommended for measuring metallic samples (these samples can be measured with full performances)<br />

NR = Not recommended for measuring metallic samples (these samples may be measured, but with reduced performances)<br />

(8) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical.<br />

(9) These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be multplied by 1.5)<br />

E1204<br />

www.stlsa.com 25


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Fiber optic cables<br />

E2000 «push/pull» connector<br />

Model Length Core Ø Ø max Sheath Connector type<br />

E50-3 3 m 50/125 µm 2.8 mm Standard E2000<br />

E50-5 5 m 50/125 µm 2.8 mm Standard E2000<br />

E50-10 10 m 50/125 µm 2.8 mm Standard E2000<br />

E20-2 2 m 10/20 µm 1.9 mm Standard E2000<br />

E50-3-M 3 m 50/125 µm 5 mm Metal armored E2000<br />

E50-5-M 5 m 50/125 µm 5 mm Metal armored E2000<br />

E50-10-M 10 m 50/125 µm 5 mm Metal armored E2000<br />

E50-20-M 20 m 50/125 µm 5 mm Metal armored E2000<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

Standard E2000 connector optcal fiber<br />

Metallic armored E2000 connector optcal fiber<br />

FC/APC connector<br />

Model Length Core Ø Ø max Sheath Connector type<br />

F50-3 3 m 50/125 µm 2.8 mm Standard FC/APC<br />

F50-4 4 m 50/125 µm 2.8 mm Standard FC/APC<br />

F50-10 10 m 50/125 µm 2.8 mm Standard FC/APC<br />

F20-2 2 m 10/20 µm 1.9 mm Standard FC/APC<br />

F50-3-M 3 m 50/125 µm 5 mm Metal armored FC/APC<br />

F50-4-M 4 m 50/125 µm 5 mm Metal armored FC/APC<br />

F50-10-M 10 m 50/125 µm 5 mm Metal armored FC/APC<br />

F20-4-M 4 m 10/20 µm 5 mm Metal armored FC/APC<br />

F20-10-M 10 m 10/20 µm 5 mm Metal armored FC/APC<br />

F50-5-M 5 m 10/20 µm 5 mm Metal armored FC/APC<br />

F50-10-M 10 m 10/20 µm 5 mm Metal armored FC/APC<br />

GONIO<br />

PHOTOMETERS<br />

Standard FC/APC connector optcal fiber<br />

Metallic armored FC/APC connector optcal fiber<br />

26<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

Accessories<br />

Mechanical accessories<br />

Model<br />

ST3<br />

DT3x3<br />

Description<br />

Single turreti<br />

Mechanical assembly allowing to combine one magnifier with three different chromatc lenses.<br />

Double turreti<br />

Mechanical assembly allowing to combine three magnifiers with three different chromatc lenses.<br />

The new concept of Modular Optcal Pen (consistng of the combinaton of a<br />

chromatc objectve and an achromatc magnifier) offers the major opportunity<br />

to design a more flexible combinaton : the MULTIPEN which can be available in<br />

two different configuratons : ST and DT.<br />

Based on a microscope turret, the MULTIPEN ST consists of the combinaton of<br />

one achromatc magnifier with three different chromatc lenses, thus offering<br />

three different depths of field in one single mechanical assembly.<br />

The MULTIPEN DT (for double turret) comprises a second turret equipped with<br />

three different magnifiers, thus offering three different spot sizes for each of<br />

the three chromatc objectves. This corresponds to nine different Modular<br />

Optcal Pens in one single mechanical assembly.<br />

Light source and exchange bulbs<br />

Model<br />

XS300<br />

LED300<br />

LED100<br />

XE-300<br />

HL50W<br />

Description<br />

300 Watts Xenon Arc Generatori<br />

External light source for CCS and CHR controllers<br />

Multchannel illuminator: 18 LEDS (5W, white light) including a bundle of fibers, lightng area:<br />

11 mm x 0.2 mm. External light source for MPLS and vision system.<br />

Multuichannel illuminator: 9 LEDS (5W, white light) including a bundle of fibers, lightng area:<br />

4.8 mm x 0.2 mm. External light source for MPLS and vision system.<br />

300 W exchange Xenon Arc bulb<br />

Pack of 5 exchange Halogen lamps of 50 W (for CHR150 controllers)<br />

E1204<br />

www.stlsa.com 27


GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

XS300 Light source<br />

SENSORS<br />

3D SYSTEMS<br />

LED300 Light source<br />

SPECTRO<br />

COLORIMETERS<br />

Measurement standards<br />

Model<br />

Description<br />

GS10 10 µm depth groove (non calibrated, optonal DKD calibraton certficate)<br />

RS08 Roughness standard, Ra~0.8µm (optonal DKD calibraton certficate)<br />

FS140 140 mm diameter optical flat (ZERODUR uncoated)<br />

28<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

Softwares<br />

Model<br />

Description<br />

CCSMAN CCS Manager software<br />

CHRMON CHR Monitor software<br />

CHRSET CHR Setup Software<br />

<strong>STIL</strong>DLL <strong>STIL</strong>DLL (Dynamic Link Library) for CHR 150 and CCS controllers<br />

OPTMIMAX Min/Max software for CHR 150<br />

OPTLVDT LVDT-type output for CHR 150<br />

DLL for <strong>STIL</strong> point sensors:<br />

The “<strong>STIL</strong>DLL” provides a powerful high-level software development toolkit enabling an easy interfacing of <strong>STIL</strong>’s sensors to<br />

custom applicatons.<br />

It may be used with all <strong>STIL</strong> point sensors<br />

DLL Compatbility<br />

- ANSI-C programs<br />

- Microsoft Visual C++ Tm (versions 6, 2005, 2010)<br />

- .NET (framework 3.5) languages<br />

The main features of the DLL are:<br />

- Initalize and connect to the sensor through RS232, Ethernet or USB2;<br />

- Get/Set the sensor settings, e.g.:<br />

• Sampling rate,<br />

• Measuring mode (Distance/Thickness),<br />

• Optcal pen selecton,<br />

• Digital output settings (data selecton, ascii/binary mode, baud rate...)<br />

• Analog output settings (data selecton, scaling of the data on the 0-5V range),<br />

- Measure the sensor «Dark» signal,<br />

- Enable/disable hardware trigger mode,<br />

- Launch measurement with other processes,<br />

- Synchronize the measurement with other processes,<br />

- Get the sensor status and the «last error» parameter.<br />

The “<strong>STIL</strong>DLL” is delivered with a detailed User Manual and a large number of code samples.<br />

E1204<br />

www.stlsa.com 29


SPECTRO<br />

COLORIMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

CHR Setup Software<br />

CHR Setup is a useful software utlity to configure the CCS and the CHR sensors, to display and save the measured data.<br />

The CHR Setup Software offers a full palette of advanced features, including real<br />

tme visualizaton of the signals delivered by the sensor on-board spectrometer.<br />

The user-friendly interface enables the operator to view and to modify all the<br />

sensor’s settings:<br />

SENSORS<br />

- Acquisiton rate and temporal averaging,<br />

- Optcal pen selecton,<br />

- Measuring mode (distance or thickness measurement),<br />

- Digital output configuraton,<br />

- Analog output configuraton.<br />

These signals may be captured, saved and compared with reference signals.<br />

This feature is very useful for adjustng the positon of the optcal pen relatvely to the sample, or for analyzing the sensor<br />

performance in partcularly difficult measuring conditons ( very low signal to noise rato, sample located at the very end of the<br />

measuring range, measuring the thickness of thin layers,…).<br />

3D SYSTEMS<br />

This interface comprises a dedicated Command Terminal allowing to send ASCII commands to the sensor and to view its response.<br />

Example: by typing in “$TRG”, the operator may implement and test the triggered operaton mode.<br />

Thanks to this software, measurements may be easily configured (sensor rate, number of points to measure, trigger mode) and<br />

launched. The operator may select the data for display: Distance, Thickness, Intensity… This data is displayed in real tme in the<br />

graphic window. Moreover, it may be saved on the hard disk or sent to the printer.<br />

At the end of the measurement, statstcal informaton (minimum, maximum, average, standard deviaton) is automatcally<br />

displayed.<br />

This utlity facilitates maintenance tasks, by a single mouse click the operator may interrogate the sensor for its serial number<br />

or send a new firmware version.<br />

GONIO<br />

PHOTOMETERS<br />

Minimal computer configuraton<br />

Windows XP TM<br />

512 MB RAM, 1 GHz<br />

RS232, Ethernet or USB port (depending on the sensor type)<br />

30<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

CHR Monitor Software<br />

The CHR Monitor software allows to display, to print and to save the signal delivered by CHR sensors.<br />

A simple mouse click offers the possibility to:<br />

- Launch the Dark Signal acquisiton;<br />

- Select:<br />

• The optcal pen connected to the CHR sensor,<br />

• The parameters to be displayed (alttude, intensity…),<br />

• The Acquisiton and sampling rates,<br />

• The temporal averaging factor.<br />

Available operatng modes<br />

Contnuous visualizaton<br />

Acquisiton (N measurements) at a constant sampling rate<br />

Acquisiton in CMM mode (alttude statement)<br />

Licence<br />

The program requires a “dongle” (hardware) to be installed on the parallel port. A printer or any other parallel port device<br />

may stll be connected to the parallel port through the “dongle”.<br />

Minimal computer configuraton<br />

Windows 2000 / NT<br />

256 MB RAM, 1 GHz<br />

Serial port<br />

E1204<br />

www.stlsa.com 31


SPECTRO<br />

COLORIMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

CCS Manager Software<br />

The CCS Manager software is a powerful software which allows to start measuring with your new CCS-Prima sensor, <strong>STIL</strong>-Inital<br />

or <strong>STIL</strong>-Duo in minutes.<br />

Thanks to its very user-frendly interface, the CCS Manager software<br />

is the simplest way to get accurate measurements from the sensor<br />

and to have a full control over all the settings of your CCS sensor.<br />

Moreover, CCS Manager provides advanced maintenance functons :<br />

SENSORS<br />

- Update of the sensor’s firmware to take advantage of the latest<br />

enhancements and the new functons developped by <strong>STIL</strong>’s engineers.<br />

- In situ calibraton of your controller.<br />

- Download to the sensor’s memory of additonal calibraton tables<br />

allowing to use more optcal pens with your CCS controller.<br />

- Unique «Diagnostcs» functon, allowing to record the current status of the sensor into a file, which can be directly sent<br />

by email to <strong>STIL</strong>’s Applicaton and Support department. Thanks to these detailed informaton, our engineers are able to<br />

give help and advice in minutes, even if the product is used thousands of kilometers away from our premises.<br />

GONIO<br />

PHOTOMETERS<br />

3D SYSTEMS<br />

Minimal computer configuraton<br />

Window XP TM ,Windows 7 TM -32 bits, 7 TM -64 bits<br />

512 MB RAM, 1 GHz<br />

RS232 or USB port (depending on the sensor type)<br />

32<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

3D measurement examples: chromatic confocal technology<br />

Human Skin measurement<br />

Surface microtopography of a TF insert<br />

3D measurement examples: confocal spectral interferometry<br />

Commercial gratng<br />

Solar cells<br />

E1204<br />

www.stlsa.com 33


Non-contact «line» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

MPLS180 «line» sensors<br />

The MPLS180 is the first «line» chromatc confocal sensor in the world.<br />

It pushes one step forward the amazing non-contact sensing technology<br />

based on <strong>STIL</strong>’s patented confocal chromatc imaging.<br />

The MPLS180 offers an ultra-high measuring frequency of up to 1800<br />

lines per second (each line being made of 180 discrete points) providing<br />

up to 324 000 measured points per second.<br />

This outstanding performance is the result of a high level of technological<br />

integraton, made possible thanks to <strong>STIL</strong>’s know-how design and<br />

advanced manufacturing processes.<br />

The MPLS180 sensor has received the «Silver Photon» Innovaton Award<br />

at the Opto 2008 fair in Paris.<br />

3D SYSTEMS<br />

MPLS180 optical principle<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Each of the 180 white light source pinholes is imaged through a common<br />

chromatc objectve, into a contnuum of monochromatc images<br />

along the optcal axis, thus providing a series of «color coded»<br />

optcal axes.<br />

When an object is placed in these colored fields, a unique wavelength<br />

is perfectly focused at its surface for each point, and then<br />

efficiently reflected into the objectve. These monochromatc light<br />

beams go through a series of filtering pinholes into an array of spectrographs.<br />

The analysis of the wavelengths that have passed through the filtering<br />

pinholes allow for each point to accurately determine its positon<br />

in the measuring field.<br />

The MPLS180 sensor then provides instant profile measurements,<br />

each profile being made of 180 points simultaneously acquired.<br />

34<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «line» sensors<br />

Basic sensor constitution<br />

The MPLS180 Chromatic Confocal sensor comprises:<br />

- An Optoelectronic controller including the light source, the spectrographs arrays, the acquisiton and processing<br />

electronic unit,<br />

- An optical fiber bundle linking the controller with the optcal head,<br />

- A Chromatic Confocal Optical head generatng the Mult-Point Line.<br />

Optionally, it can be equipped with a scanning mirror to generate a full field measurement.<br />

MPLS 180 sensors with a scanning mirror opton.<br />

Optoelectronic controller : technical specifications<br />

Model<br />

MPLS180<br />

Number of measured points along the line 180<br />

Maximum measuring rate 1.800 lines per second x 180 points per line = 324.000 measured points per second<br />

Data transmission<br />

USB 2.0 link<br />

Software package<br />

Dedicated DLL for Windows XP SP2<br />

Measurement Synchronizaton<br />

Input and output TTL trigger signals<br />

Power supply<br />

Consumpton<br />

Optonal field scanning functon<br />

Field scan duraton<br />

Mechanical interface<br />

100 - 240 Vac<br />

100W with standard LED light source / 150W with optonal 12V/50W halogen bulbs<br />

180 x 230 points acquired per field<br />

0.13 second (at a line frequency of 1800 lines/sec)<br />

Table top controller<br />

Advantages<br />

- Ultra fast non-contact measurement<br />

- Confocal chromatc sensor<br />

- High accuracy measurements<br />

- Passive optcal head<br />

- Works on any kind of material<br />

- Insensitve to ambient lightng<br />

- Perfect for online inspecton<br />

- Scanning mirror (optonal) for direct 3D acquisitons<br />

- Easy interfacing thanks to the DLL toolkit<br />

E1204<br />

www.stlsa.com 35


Non-contact «line» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Optical heads<br />

Model Wavy Cobra DeepView Microview<br />

Line length (x axis) mm 44.75 14 4 1.8<br />

Number of points along the line - 180 180 180 180<br />

Spot size diameter (for each point) µm 41 38 15 4.8<br />

Pitch (distance between 2 points) µm 250 78 22 10<br />

Maximum slope angle deg 11 6.5 20 30<br />

Working distance mm 40 1 46 10<br />

Measuring range mm 1.6 15 5 0.5<br />

Axial resolution µm 0.5 2.5 1.5 0.125<br />

Accuracy µm 2.5 8 5 0.5<br />

Field scanning (x,y)<br />

mm<br />

44.75 x 45.8<br />

(optonal)<br />

14 x 17<br />

(standard)<br />

-<br />

1.8 x 1.8<br />

(optonal)<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

MICROVIEW<br />

(x,z) = 1.8x0.5 mm 2<br />

DEEPVIEW<br />

(x,z) = 4x5 mm 2<br />

GONIO<br />

PHOTOMETERS<br />

COBRA<br />

(x,y,z) = 14x17x15 mm 3<br />

WAVY<br />

(x,z) = 44.75x1.6 mm 2<br />

36<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «line» sensors<br />

Measurement examples<br />

Warpage measurement of Printed Circuit Board (measured with WAVY optcal head)<br />

3D view<br />

Alttude measurement<br />

Dental measurements (measured with COBRA optcal head)<br />

3D views<br />

Mechanical measurements (measured with MICROVIEW optcal head)<br />

Alttude measurement<br />

3D view<br />

E1204<br />

www.stlsa.com 37


Non-contact 3D Measurement Systems<br />

SELECTION<br />

SENSORS<br />

GUIDE<br />

3D SENSORS SYSTEMS<br />

MICROMESURE 2 Systems<br />

The MICROMESURE 2 system, equipped with CCS-Prima, CHR or <strong>STIL</strong>-DUO Confocal<br />

or Chromatc CHR150 Sensors sensors is the ideal tool for non contact surface measurement,<br />

including 3D roughness, shape metrology and 3D microtopography.<br />

Designed BY the Confocal Chromatc Sensor creators, FOR the Confocal<br />

Chromatc Sensor use, the MICROMESURE 2 system fully exploits<br />

The MICROMESURE 2 system fully exploits the extraordinary performances<br />

of <strong>STIL</strong>’s non contact sensors in various applicatons and<br />

the extraordinary performances of <strong>STIL</strong>’s non contact sensors in various<br />

applicatons and fields.<br />

fields.<br />

Delivered with all the necessary control & acquisiton hardware and<br />

software, the MICROMESURE 2 system is a «turn key» device that is<br />

immediately operatonal after its installaton.<br />

Advantages<br />

SPECTRO<br />

3D SYSTEMS<br />

COLORIMETERS<br />

Due to Confocal Chromatic sensors<br />

- Non contact dimensional measurement<br />

- Nanometric and Micrometric resolutons<br />

- White light sensor (no speckle, wide measuring range)<br />

- Coaxial measurement (no shadowing)<br />

- High local slopes on specular (reflectve) surfaces<br />

- Insensitve to ambient light<br />

- Insensitve to object’s reflectvity: allows working on any<br />

type of surface<br />

- Thickness & Form Measurement of transparent objects<br />

- Wide measuring ranges capabilites (from 20 µm to 24 mm)<br />

Due to high quality scanning system<br />

- Point scanning system allows to define scans dimensions and<br />

resoluton without hardware constraints<br />

- Real metrology on each measured points thanks to linear<br />

encoders<br />

- Flatness and orthogonality correctons<br />

- Equipped with double turret<br />

- User friendly Software<br />

- Modular design (1, 2 or 3 axes) to adapt the configuraton to<br />

the exact needs of the user<br />

OPTICAL GONIO<br />

PHOTOMETERS<br />

COMPONENTS<br />

SPECTRO GONIO<br />

COLORIMETERS<br />

PHOTOMETERS<br />

38 44<br />

www.stlsa.com<br />

E1204 E1104


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact 3D Measurement Systems<br />

Applications<br />

- Shape and texture analysis<br />

- Fine mechanics inspecton<br />

- Surface characterizaton<br />

- 3D alttude and thickness topography / profilometry<br />

- Roughness measurement<br />

- Dimensional metrology<br />

Industrial and Research Laboratories Fields<br />

- Mechanics (roughness, tribology, 3D metrology, corrosion analysis …)<br />

- Glass industry (float glass on line thickness control, 3D metrology …)<br />

- Microelectronics (roughness, 3D metrology, defects analysis …)<br />

- Optcs (roughness, 3D metrology...)<br />

- Cosmetcs (tribology, 3D metrology …)<br />

- Road & tres (tribology, 3D metrology …)<br />

- Nuclear fuel industry (roughness, tribology, 3D metrology, corrosion analysis …)<br />

- Textle (3D metrology, thickness topography …)<br />

Options & Accessories<br />

- Linear encoders on X & Y axes<br />

- Video Camera<br />

- Double turret<br />

- Vibraton damping stand<br />

- Metrology artfacts:<br />

• Calibrated groove (depth 10 µm)<br />

• Roughness standard (Ra=0.8µm)<br />

• Optcal flat (140 mm diameter)<br />

• Offset setting retcle<br />

- Post processing software: SPIP from Image Metrology<br />

Technical specifications<br />

Scanning system Specifications<br />

Translations Units X Axis Y Axis Z Axis Remarks<br />

Travel mm 100 100 50 Up to 300mm on request<br />

Positioning accuracy (max) µm/100mm 10 10 - without encoder<br />

Positioning accuracy (max) µm/100mm 1 1 1 with encoder<br />

Positioning resolution µm 0.1 0.1 0.1<br />

Flatness (with correction) µm/100mm 1 1 -<br />

Maximum speed mm/s 20 20 5<br />

E1204<br />

www.stlsa.com 39


Non-contact 3D Measurement Systems<br />

SELECTION<br />

GUIDE<br />

Optoelectronic Controllers Specifications<br />

The MICROMESURE2 system can be used with almost any of the <strong>STIL</strong> point sensors<br />

controllers:<br />

For detailed specificatons about controllers, refer to the following pages:<br />

SENSORS<br />

- CCS-PRIMA........Page 16<br />

- CHR150..............Page 16<br />

- <strong>STIL</strong>-DUO...........Page 24<br />

Optical Pens Specifications<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

The MICROMESURE2 system can accept all the range of <strong>STIL</strong>’s confocal<br />

chromatc and white light interferometry optcal pens :<br />

For detailed specificatons about single point optcal pens, refer to the<br />

following pages:<br />

- CL-MG series....... Page 18<br />

- OP series............. Page 19<br />

- ENDO series.........Page 21<br />

- OPILB series.........Page 25<br />

GONIO<br />

PHOTOMETERS<br />

Video Camera Specifications<br />

Video Camera (Optional) Units VCX50 VCX250<br />

Type - Color CCD<br />

Resolution [pixels] - 752 x 582<br />

Gain - Automatc<br />

Field of view mm² 5.2 x 4.1 1 x 0.8<br />

Pixel size on object µm² 7 x 7 1.4 x 1.4<br />

Lighting - 4 quadrants LED<br />

40<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact 3D Measurement Systems<br />

Control and Acquisition Software Functions<br />

SurfaceMap Control & Acquisition Software<br />

Main Functions<br />

Profile Scanning (X, Y, Oblique)<br />

Surface Scanning<br />

Points series acquisiton<br />

Type of acquisition<br />

Repettve Measurements<br />

Mult acquisiton sequence<br />

Video image (if camera opton)<br />

Dimensions<br />

Scanning parameters setting<br />

Step along each axis<br />

Alttude Mode<br />

Thickness Mode<br />

Sensor parameters setting<br />

Optcal pen choice<br />

Averaging<br />

Double frequency (if available)<br />

Constant speed (with backlash compensaton)<br />

Constant speed (back & forth)<br />

Scanning type<br />

Step by step<br />

Z following<br />

Folder selecton<br />

Data saving<br />

Format selecton (binary, csv)<br />

Measurement Progress<br />

User’s Supervision<br />

X, Y & Z Coordinates<br />

Sensor Status<br />

Hardware homing<br />

Leveling<br />

Automatic Procedures<br />

Autofocus<br />

Recentering<br />

Preview<br />

E1204<br />

www.stlsa.com 41


Non-contact 3D Measurement Systems<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Post Processing Software Functions<br />

Basic Module<br />

SPIP Post processing<br />

Main Functons<br />

4 modules<br />

Version<br />

8 modules<br />

Version<br />

Plane correcton / Flattening yes yes<br />

Cross secton & Profiling yes yes<br />

Alttude Histogram yes yes<br />

Fourier Transform yes yes<br />

Correlaton functons yes yes<br />

Image Substracton & Additon yes yes<br />

Color coding yes yes<br />

Zoom yes yes<br />

Transformaton : Mirrors, rotatons yes yes<br />

Plug-in interface yes yes<br />

Copy, print & save functons yes yes<br />

Roughness Analysis (ISO 25178 + ANSI B46.1) yes yes<br />

3D Visualization Studio yes yes<br />

Filter Module yes yes<br />

Extended Fourier Analysis<br />

Grain Analysis<br />

Batch processing<br />

ImageMet Explorer<br />

Scanning Probe Image Processor SPIP<br />

Image Metrology was founded as a world-wide leading supplier of software for nano and microscale image processing.<br />

Over the years, the Scanning Probe Image Processor, SPIP, has become the de-facto standard for image processing at<br />

nanoscale.<br />

SPIP provides customers with state-ofthe-art<br />

image processing software for<br />

microscopy, including:<br />

• Correcton tools for creatng the most<br />

accurate presentaton of the “true” surface,<br />

• Automated analysis techniques ensuring<br />

high accuracy, quality and cost efficiency,<br />

• Visualizaton and reportng tools enabling<br />

convincing and impressive communicaton<br />

of results.<br />

yes<br />

yes<br />

yes<br />

yes<br />

42<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact 3D Measurement Systems<br />

Measurement examples<br />

Porosity in brake lining material<br />

3D view<br />

Color filters for LCD display panels<br />

3D view<br />

Tribology – metallic part wearing test<br />

3D view<br />

Laser impacts on a metal plate<br />

Height measurement<br />

E1204<br />

www.stlsa.com 43


Non-contact Spectrocolorimeter<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Introducing Colorimetry<br />

Color only exists through the combinaton of three elements: a light source, an object and an observer. Color becomes a subjectve<br />

sensaton, which can be described with a color name. The Internatonal Commission on Illuminaton defined some standards<br />

allowing us to quantfy colors. In consequence, colorimetric spaces are defined for different pairs of illuminant/observer and the<br />

color is identfied by three coordinates, for example CIELAB, CIELUV…<br />

Two categories of instrument are used for characterizing the color of an object: the colorimeters and the spectrocolorimeters. A<br />

colorimeter is a very simple system proposing a series of colored filters in order to simulate the normalized curves of a standard<br />

observer. The measurement is not very accurate and it does not allow users to detect differences that are invisible for some illuminants<br />

and visible for others (metameric colors). In contrast, a spectrocolorimeter includes a dispersive component (gratng,<br />

prism) allowing the measurement of the light reflected by the object in a much more precise manner, for the whole range of visible<br />

wavelengths.<br />

RUBY spectrocolorimeter<br />

RUBY is a perfect soluton for real tme measurement of color. The fast detecton of color<br />

drifts and servo-controlling producton tools possibilites allow a cost reducton for a low<br />

level of investment.<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

• High acquisiton speed,<br />

• Non contact measurement,<br />

• Synchronizaton with custom machines,<br />

• Stand-alone use.<br />

In additon to color monitoring, different kinds of applicaton are available:<br />

Whiteness measurement, formulaton, counter-typing, characterizaton<br />

of the effects of materials and light stability measurement (artficial<br />

or natural ageing).<br />

Applications<br />

Spectroscopic and colorimetric measurements are used for analyzing: Reflectance of diffusing materials and samples, Intensity<br />

and color of light sources and displays, transmittance of filters and liquids.<br />

Plastc Paper Cosmetcs Paints Inks<br />

GONIO<br />

PHOTOMETERS<br />

Food Drugs Fabrics Wood Ceramics<br />

44<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact Spectrocolorimeter<br />

Advantages<br />

- Real tme measurements for spectroscopy,<br />

- Internal light source,<br />

- Selectable spot size on the sample,<br />

- Long working distance,<br />

- Ergonomic and removable grip,<br />

- Color and irradiance measurements,<br />

- Metameric sample detecton,<br />

- Automatc color sortng,<br />

- Integrated software soluton<br />

- Portable system allowing in situ measurements.<br />

Technical specifications<br />

Power Supply<br />

Consumption<br />

Light Source<br />

RUBY CONTROLLER<br />

85 to 240 V (50 / 60 Hz)<br />

200 Watts<br />

Tungsten halogen lamp<br />

Measuring frequency<br />

Data processing<br />

Analog outputs<br />

Digital outputs<br />

Synchronization I/O<br />

Optical fiber connectors<br />

Wavelength range<br />

Spectral resolution<br />

Humidity limits<br />

Temperature in use<br />

Dimensions<br />

Weight<br />

up to 2000 Hz<br />

Embedded FPGA board<br />

2 outputs 0 - 10V<br />

Ethernet / RS232<br />

1 input (TTL) / 1 output (TTL)<br />

SMA905 and FC/PC<br />

400-800 nm<br />

(other ranges on request)<br />

0.6 nm / pixel<br />

5%-80% HR without condensation<br />

5 - 50° C<br />

376mm x 363mm x 114mm<br />

6 Kg<br />

Optical head<br />

Spot size<br />

RUBY OPTICAL HEAD<br />

1 / 2 / 4 / 7 mm<br />

Working distance<br />

Depth of field<br />

80 mm<br />

10 mm<br />

Fastening thread 1/4’’<br />

Accessories thread<br />

30.5 mm<br />

Accessories<br />

Contact tip, pods<br />

Dimensions 60 mm diam. / 178 mm length<br />

Weight<br />

0.5 Kg<br />

E1204<br />

www.stlsa.com 45


Non-contact Spectrocolorimeter<br />

SELECTION<br />

SENSORS<br />

GUIDE<br />

Software<br />

Model<br />

LRM<br />

Descripton<br />

RUBY Manager software<br />

RUBYDLL<br />

DLL (Dynamic Link Library) for RUBY controller<br />

3D SENSORS SYSTEMS<br />

SPECTRO<br />

3D SYSTEMS<br />

COLORIMETERS<br />

SPECTRO GONIO<br />

COLORIMETERS<br />

PHOTOMETERS<br />

DLL for RUBY controllers<br />

The “RUBYDLL” provides a powerful high-level interface enabling user’s-programs written in C/C++ language to communicate<br />

with RUBY controllers.<br />

DLL compatbility<br />

ANSI-C programs<br />

Microsoft Visual C++ TM compilers (6, 7, 8 and .net versions)<br />

Microsoft Visual C++ TM MFC<br />

The main features of the DLL are:<br />

- Initalize and connect to the controller through RS232 or Ethernet;<br />

- Get/Set the sensor settings, e.g:<br />

• Color coordinates,<br />

• Color difference,<br />

• Spectral difference,<br />

• Colorimetry settings (observers, illuminants),<br />

• Spectral sampling,<br />

• Analog output settings,<br />

• Digital output settings,<br />

- Calibrate Black,<br />

- Calibrate White,<br />

- Acquire a target to compare with the current measurement,<br />

- Enable / Disable hardware trigger mode,<br />

- Launch the measurement with other processes,<br />

- Synchronize the measurement,<br />

with other processes,<br />

- Get the controller status and the “last error” parameter,<br />

OPTICAL GONIO<br />

PHOTOMETERS<br />

COMPONENTS<br />

The “RUBYDLL” is delivered with a detailed User Manual and a large number of samples.<br />

46 52<br />

www.stlsa.com<br />

E1204 E1104


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact Spectrocolorimeter<br />

RUBY MANAGER Software<br />

Data processing is performed inside the RUBY controller.<br />

A desktop or notebook PC and the RUBY Manager software could complete<br />

the system in order to perform sophistcated measurements and analysis.<br />

RUBY Manager is a powerful sofware which allows you to start measuring<br />

color with your new RUBY controller in minutes.<br />

Thanks to its user-friendly interface, RUBY Manager software is the simplest<br />

way to gain complete control over all the settings of your RUBY controller.<br />

The interface offers two different display modes:<br />

The measurement mode dedicated to color conformity control, and the spectrum mode, dedicated to curve display<br />

and comparison.<br />

All the data is displayed in real tme and allows the visualizaton of the historic of producton process or chemical kinetc<br />

experiment monitoring.<br />

Morever, RUBY manager provides advanced maintenance functons:<br />

- Update of the controller’s firmware to take advantage of the latest enhancements and the new<br />

functon developed by <strong>STIL</strong>’s engineers.<br />

- Unique “Diagnostcs” functon, allowing to record the current status of the controller into a file,<br />

wich can be directly sent by email to <strong>STIL</strong>’s applicaton and support department.<br />

The last version of RUBY Manager includes two new functons:<br />

- Management of a database of reference colors, - Monitoring of the quality of a producton.<br />

The first functon allows the user to create a reference colors library that can be used for the online control of a varied<br />

producton. In spectroscopy applicatons, the comparison with reference spectra enables the possible recogniton of characteristc<br />

signatures.<br />

The second functon (Save in Regular Intervals) allows the user to save these data at a determined interval. This functon<br />

is important for controling the quality of a producton over a long period.<br />

Minimal computer configuraton<br />

Windows XP<br />

512 MB RAM, 1 GHz<br />

RS232 (exported data: color coordinantes) or Ethernet (exported data: all)<br />

E1204<br />

www.stlsa.com 47


GONIO<br />

PHOTOMETERS<br />

Goniophotometers<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

REFLET goniophotometer<br />

“REFLET” is a general purpose goniospectrophotometer for measuring back-scattering and forward scattering from diffusing<br />

samples or specular surfaces.<br />

A goniophotometer is an instrument for measuring light scattering in the visible spectral band, through a photopic filter V(λ)<br />

or in the near infrared range.<br />

Characterizaton of backscattering lobes (angular reflectance) and forward scattering<br />

lobes (angular transmittance) of samples reveals the optcal propertes of materials<br />

and serves as a useful tool in industrial and scientfic research of light scattering<br />

and light emission mechanisms and of surface propertes (texture, roughness, polish<br />

quality…).<br />

Goniophotometry is fundamental to the understanding of visual percepton of objects:<br />

in our daily experience the observer, the objects and the natural lightng (sun)<br />

are always in moton, so that illuminaton and observaton angles are constantly varying.<br />

CAD/CAM Software uses data based on goniophotometric measurements for<br />

providing a realistc representaton of complex scenes.<br />

The spectrograph opton allows analysis of the scattered light; at each angular configuraton<br />

they provide an entre spectrum, so that the reflectance (or transmittance)<br />

of the sample can be measured independently at each individual wavelength. Goniocolorimetry<br />

is fundamental to study effect materials (automotve paintng, fabrics).<br />

Features<br />

- Real BRDF / BTDF measurement<br />

- Full hemisphere (2π sr)<br />

- Visible or near infrared range,<br />

- Selectable spot size<br />

- Very high dynamic range (1:10 9 )<br />

- High angular resoluton (0.1°)<br />

- Operates in ambient light conditons<br />

- Compact, portable system<br />

48<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Goniophotometers<br />

REFLET technical specifications<br />

Model REFLET-90 REFLET-180<br />

Light Box<br />

Spot size on the sample surface<br />

Illuminance on the sample<br />

Goniometer<br />

ILLUMINATION<br />

Halogen 100W bulb<br />

Option: 6-positions filter wheel (color & ND filters)<br />

Manually adjustable from Ø1 mm to Ø13 mm<br />

Manually selectable from 100 lux to 25000 lux<br />

REFLECTION MODE<br />

- 0°-90° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.5°<br />

TRANSMISSION MODE<br />

- Fixed, θ = 180°<br />

DETECTION<br />

Integrated-flux Detector Very High Dynamic range (10 9 )<br />

REFLECTION MODE<br />

- 0°-180° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.3°<br />

TRANSMISSION MODE<br />

- 0°-180° motorized<br />

Spectrometer<br />

Optical system<br />

Goniometer<br />

Polarizer/Analyzer set (option)<br />

Useful range: 400-900 nm<br />

Spectral resolution : selectable (0.6, 1, 5 or 10 nm)<br />

3 manually interchangeable optical blocs:<br />

Optical bloc 1 2 3<br />

Angular acceptance ± 2° ± 1.1° ± 0.04°<br />

Observed area size Ø14mm Ø8mm Ø6mm<br />

θ: -90° to 90° motorized<br />

φ: -90° to 90° motorized<br />

Angular resolution: selectable ( 0.1° 1° )<br />

Positioning precision: 0.5°<br />

MEASURING TIME<br />

Rapid insertion<br />

0°-90° manual rotation<br />

180° θ-profile “Integrated flux” mode: 30 s<br />

“Spectrometer” mode: 10 s<br />

REFLET optical head<br />

Applications<br />

- Optcal surface characterizaton:<br />

• Reflectors for luminaries<br />

• Automotve headlights reflectors<br />

• Scattering losses of lenses<br />

- Light source characterizaton:<br />

• LCD backlightng<br />

- Visual appearence:<br />

• Database for realistc rendering software<br />

- Paints and inks:<br />

• automotve metal paints<br />

• angular-effect colored inks<br />

• Countertyping<br />

- Security:<br />

• Watermarking<br />

- Surface characterizaton of:<br />

• metals, powders, paper, ceramics, plastc automotve<br />

angular-effect colored inks<br />

E1204<br />

www.stlsa.com 49


GONIO<br />

PHOTOMETERS<br />

Goniophotometers<br />

SELECTION<br />

GUIDE<br />

DIAMOND goniophotometer<br />

DIAMOND is a goniophotometer whose optcal system is specially designed for measuring light scattering from specular surfaces.<br />

SENSORS<br />

Model DIAMOND-90 DIAMOND-180<br />

Light Box<br />

Spot size on the sample surface<br />

ILLUMINATION<br />

Halogen 100W bulb<br />

Option: 6-positions filter wheel (color & ND filters)<br />

Manually selectable Ø0.5 mm, Ø1 mm or Ø1.9 mm<br />

Beam angle Manually selectable ±0.09°, ±0.18°, ±0.35° or ±0.5°<br />

Goniometer<br />

REFLECTION MODE<br />

- 0°-90° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.5°<br />

TRANSMISSION MODE<br />

- Fixed, θ = 180°<br />

DETECTION<br />

Integrated-flux Detector Very High Dynamic range (10 9 )<br />

REFLECTION MODE<br />

- 0°-180° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.3°<br />

TRANSMISSION MODE<br />

- 0°-180° motorized<br />

3D SYSTEMS<br />

Observed area size on the sample<br />

Manually selectable Ø0.5 mm, Ø1 mm or Ø1.9 mm<br />

Beam angle Manually selectable ±0.09°, ±0.18°, ±0.35° or ±0.5°<br />

Goniometer<br />

Polarizer/Analyzer set (option)<br />

θ: -90° to 90° motorized<br />

φ: -90° to 90° motorized<br />

Angular resolution: selectable ( 0.1° 1° )<br />

Positioning precision: 0.5°<br />

MEASURING TIME<br />

Rapid insertion<br />

0°-90° manual rotation<br />

Measuring time of one meridian 30s (one 180° full-precision θ-profile)<br />

DIAMOND optical head<br />

SPECTRO<br />

COLORIMETERS<br />

Applications<br />

Applicaton domains of residual scattering measurement are quite diversified and include ophtalmic optcs, semiconductor,<br />

space industries :<br />

- Control of polish / superpolish quality of mirrors and lenses<br />

- Control of optcal glass quality<br />

- Control of polished semiconductor surfaces (bare wafers, masks):<br />

• surface quality<br />

• presence of dust grains<br />

- Measurement of scattering losses<br />

50<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

REFLET & DIAMOND Goniophotometers<br />

Goniophotometer - 180<br />

Goniophotometer - 90<br />

Options<br />

- Detecton in the near infrared range, intensity mode (0.9 - 1.7 µm)<br />

- Detecton in the near infrared range, spectral mode (1 - 1.7 µm)<br />

- Filter wheel (color and ND filters)<br />

- Sample holder with adjustable tlt plate<br />

- Polarizer/analyser set (easy mountng)<br />

E1204<br />

www.stlsa.com 51


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

3D SYSTEMS<br />

SENSORS<br />

52<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

Optoelectronic controllers: outline dimensions<br />

<strong>STIL</strong> Inital controllers<br />

- <strong>STIL</strong> Duo<br />

E1204<br />

www.stlsa.com 53


SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CHR controllers<br />

3D SYSTEMS<br />

SENSORS<br />

CHR-4 controllers<br />

54<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

- CCS PRIMA & PRIMA2 controllers<br />

CCS PRIMA4 controllers<br />

E1204<br />

www.stlsa.com 55


Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CL1 MG210<br />

CL1 MG140<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

CL2 MG210<br />

GONIO<br />

PHOTOMETERS<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

56<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

CL2 MG140<br />

CL2 MG70<br />

CL3 MG140<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

E1204<br />

www.stlsa.com 57


Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CL3 MG70<br />

CL4 MG35<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

CL4 MG20<br />

GONIO<br />

PHOTOMETERS<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

58<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

CL5 MG35<br />

CL5 MG20<br />

CL6 MG35<br />

CL6 MG20<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

E1204<br />

www.stlsa.com 59


GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CL6 MG20<br />

OP300VM<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

OP300VM 90°<br />

60<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

OP3000N<br />

OP6000<br />

OP10000<br />

E1204<br />

www.stlsa.com 61


SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

OP10000 90°<br />

3D SYSTEMS<br />

SENSORS<br />

OP24000<br />

62<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

OP42000<br />

OPILB LWD-T MG 70<br />

OPILB LWD-T MG 35<br />

E1204<br />

www.stlsa.com 63


GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

OPILB LWD-T MG 20<br />

OPILB LWD-D MG140<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

OPILB RP MG140<br />

64<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

OPILB RP MG140<br />

OPILB RP MG70<br />

OPILB RP MG35<br />

E1204<br />

www.stlsa.com 65


GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

OPILB<br />

ENDO0.1<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

ENDO0.3 90°<br />

66<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

ENDO1.2<br />

ENDO1.2 90°<br />

ENDO1.5<br />

E1204<br />

www.stlsa.com 67


SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

MPLS 180 controllers<br />

3D SYSTEMS<br />

SENSORS<br />

Microview<br />

68<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

DeepView<br />

Wavy<br />

E1204<br />

www.stlsa.com 69


SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

Microview-F<br />

3D SYSTEMS<br />

SENSORS<br />

Wavy-F<br />

70<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

REFLET-90 / DIAMOND-90<br />

REFLET-180 / DIAMOND-180<br />

E1204<br />

www.stlsa.com 71


<strong>STIL</strong> SA - 595, rue Pierre Berthier<br />

Domaine de Saint Hilaire<br />

13855 Aix en Provence Cedex 3 - FRANCE<br />

Tel: +33.(0)4.42.39.66.51<br />

Fax: +33.(0)4.42.24.38.05<br />

email : contact@stlsa.com<br />

Countries with a local distributor:<br />

i i i i i i America<br />

USA<br />

i i i i i i i Canada<br />

Asia / Pacific<br />

i i i i i i i Japan<br />

Malaysia<br />

i i i i i i i South Korea<br />

i i i i i i i Singapore<br />

i i i i i i i Taiwan<br />

i i i i i i i China<br />

Europe / Middle East<br />

i i i i i i i France<br />

Germany<br />

United Kingdom<br />

i i i i i i i Benelux<br />

i i i i i i i Spain<br />

i i i i i i i Switzerland<br />

i i i i i i i Israel<br />

i i i i i i i<br />

Find our local distributor on our website:<br />

NON CONTACT MEASUREMENT SOLUTIONS<br />

E1204<br />

www.stlsa.com

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!