2012 e-catalog - STIL

More documents

Recommendations

Info

GONIO PHOTOMETERS Non-contact «point» sensors SELECTION GUIDE SENSORS Advantages - Vibraton insensitve (OPILB-RP optcal pen), - High signal to noise rato (OPILB-RP optcal pen), - No vertcal scanning required, - Minimum measurable thickness 0.4 µm, - Subnanometric resoluton inherent to the optcal principle, - No cross talk between neighbouring points, thanks to confocality, - Exceptonnal performances in thickness measurement (0.3 nm resoluton, 10 nm accuracy) Configurations The sensor consists of: - A <strong>STIL</strong> DUO controller, - One or more interference optcal pen(s), - One or more chromatc confocal optcal pen(s) (optonal), - a fiber optc cable for each optcal pen. 3D SYSTEMS <strong>STIL</strong>-DUO controller: technical specifications DUO Measuring frequency up to 2000 Hz Wavelength range 400-900 nm Spectral resoluton 0.6 nm / pixel SPECTRO COLORIMETERS Light Source Digital outputs Synchronizaton I/O Optcal fiber connectors Humidity limits Temperature in use Dimensions Weigth Measuring mode: Distance/Thickness Tungsten halogen lamp and White LED Ethernet / RS232 1 input (TTL) / 1 output (TTL) E2000 5%-80% HR without condensaton 5 - 50° C 376mm x 363mm x 114mm 6 Kg 1- Confocal Chromatc 2- Confocal spectral Interferometry 24 www.stlsa.com E1204
SELECTION GUIDE SENSORS 3D SYSTEMS SPECTRO COLORIMETERS GONIO PHOTOMETERS Non-contact «point» sensors Interferometric optical pens (OPILB line) OPILB Line Model OPILB-RP OPILB-LWD-D OPILB-LWD-T OPILB Measuring mode - Distance Distance Thickness Thickness Measuring range [µm] 135 135 - - Working distance [mm] 5.3 5.3 5.3 42 Max. object slope [deg] +/- 7° +/- 7° +/- 7° +/- 7° Reference plate (1) - Yes No No No Magnifier model MG210 MG140 MG210 MG140 MG70 MG35 MG20 - LATERAL (XY) PROPERTIES Spot size (diameter) Lateral resoluton (2) [µm] [µm] 3.8 1.9 5.6 2.8 3.8 1.9 5.6 2.8 11.4 5.7 22.8 11.4 40 20 40 20 MECHANICAL INTERFACE Length (4) Diameter (4) Weight [mm] [mm] [g] 200 27 200 164 27 127 200 27 200 164 27 127 131 27 126 100 27 67 84 27 52 145.5 27 155 Performances DISTANCE MEASUREMENT Axial resoluton (5) Accuracy (6) Measuring rough metal surface (7) [nm] [nm] - 0.5 10 NR 2 10 NR - - ROUGHNESS MEASUREMENT Min. measurable Ra (8) [nm] 0.5 3 - - THICKNESS MEASUREMENT Min. measurable thickness (9) Max. measurable thickness (9) Axial resoluton (5) Accuracy (6) [µm] [µm] [nm] [nm] - - - - - - - - - - - - - - - - 0.4 90 0.3 10 0.4 90 0.3 10 0.4 90 0.3 10 0.4 90 0.3 10 (1) The reference plate is placed directly on the sample. The reference plate of the OPILB-RP acts as an absolute reference. It compensates for the mechanical imperfectons of the scanning system. (2) The lateral resoluton is defined as half the spot diameter. (3) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this table are typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a magnifier model with low photometric efficiency in order to avoid saturaton. For measuring diffusive or low-reflectng samples, select a magnifier with high photometric efficiency in order to avoid a poor signal-to-noise rato. (4) Length and weight excluding the fiber optcs cable. (5) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the optmal poston. (6) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a 1-nm accurate encoder. (7) R = Recommended for measuring metallic samples (these samples can be measured with full performances) NR = Not recommended for measuring metallic samples (these samples may be measured, but with reduced performances) (8) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical. (9) These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be multplied by 1.5) E1204 www.stlsa.com 25
Page 1 and 2: NON CONTACT MEASUREMENT SOLUTIONS S
Page 3 and 4: SELECTION GUIDE SENSORS 3D SYSTEMS
Page 9 and 10: SELECTION GUIDE SPECTRO COLORIMETER
Page 23: SELECTION GUIDE SPECTRO COLORIMETER

2012 e-catalog - STIL

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?