2012 e-catalog - STIL

SELECTION
GUIDE
SENSORS 3D SYSTEMS
SPECTRO
COLORIMETERS
GONIO
PHOTOMETERS
Non-contact «point» sensors
Interferometric optical pens (OPILB line)
OPILB Line
Model OPILB-RP OPILB-LWD-D OPILB-LWD-T OPILB
Measuring mode - Distance Distance Thickness Thickness
Measuring range [µm] 135 135 - -
Working distance [mm] 5.3 5.3 5.3 42
Max. object slope [deg] +/- 7° +/- 7° +/- 7° +/- 7°
Reference plate (1) - Yes No No No
Magnifier model MG210 MG140 MG210 MG140 MG70 MG35 MG20 -
LATERAL (XY) PROPERTIES
Spot size (diameter)
Lateral resoluton (2)
[µm]
[µm]
3.8
1.9
5.6
2.8
3.8
1.9
5.6
2.8
11.4
5.7
22.8
11.4
40
20
40
20
MECHANICAL INTERFACE
Length (4)
Diameter (4)
Weight
[mm]
[mm]
[g]
200
27
200
164
27
127
200
27
200
164
27
127
131
27
126
100
27
67
84
27
52
145.5
27
155
Performances
DISTANCE MEASUREMENT
Axial resoluton (5)
Accuracy (6)
Measuring rough metal surface (7)
[nm]
[nm]
-
0.5
10
NR
2
10
NR
- -
ROUGHNESS MEASUREMENT
Min. measurable Ra (8) [nm] 0.5 3 - -
THICKNESS MEASUREMENT
Min. measurable thickness (9)
Max. measurable thickness (9)
Axial resoluton (5)
Accuracy (6)
[µm]
[µm]
[nm]
[nm]
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
0.4
90
0.3
10
0.4
90
0.3
10
0.4
90
0.3
10
0.4
90
0.3
10
(1) The reference plate is placed directly on the sample. The reference plate of the OPILB-RP acts as an absolute reference. It compensates for the mechanical imperfectons
of the scanning system.
(2) The lateral resoluton is defined as half the spot diameter.
(3) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this
table are typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a magnifier model with low photometric
efficiency in order to avoid saturaton. For measuring diffusive or low-reflectng samples, select a magnifier with high photometric efficiency in order to avoid a poor
signal-to-noise rato.
(4) Length and weight excluding the fiber optcs cable.
(5) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the optmal poston.
(6) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a
1-nm accurate encoder.
(7) R = Recommended for measuring metallic samples (these samples can be measured with full performances)
NR = Not recommended for measuring metallic samples (these samples may be measured, but with reduced performances)
(8) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical.
(9) These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be multplied by 1.5)
E1204
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