2012 e-catalog - STIL

SELECTION
GUIDE
SENSORS 3D SYSTEMS
SPECTRO
COLORIMETERS
GONIO
PHOTOMETERS
Non-contact «point» sensors
Classical optical pens (OP Line)
OP Line
Model OP300VM OP6000 OP8000 OP10000 OP24000 OP42000
Measuring range (1) [µm] 300 6 000 8000 10 000 24 000 42 000
Working distance (2) [mm] 5 28.8 37.2 66.9 223 518
Max object slope (3) [deg] +/- 25° +/- 22° +/- 16° +/- 12° +/- 5° +/- 2.5°
Reference plate (4) - No No Yes Yes Yes No
Axial model (5)
Radial model (5) -
Standard
Optonal
Standard
No
Standard
No
Standard
Optonal
Standard
Optonal
Standard
No
LATERAL (XY) PROPERTIES
Spot size (diameter)
Lateral resoluton (6)
[µm]
[µm]
8
4
12.5
6.25
34
17
51
25.5
100
50
110
55
MECHANICAL INTERFACE
Length (8)
Diameter (8)
Weight
[mm]
[mm]
[g]
127
15
25
205.5
60
727
150
40
400
189
50
640
172.5
59
360
287.2
85
1700
Performances (9)
DISTANCE MEASUREMENT
Axial resoluton (10)
Accuracy (11)
[nm]
[nm]
10
90
250
600
400
800
450
900
1500
3000
4000
40000
Min. measurable thickness (15) [µm] 25 200 300 425 1570 2500
(1) The measuring range depends on the controller model. The numerical values in this table are nominal values for a CCS Prima controller.
(2) The working distance depends on the controller model. The numerical values given in this table are typical values for a CCS-Prima controller.
(3) The max measurable slope angle applies to specular (mirror-like) surfaces only. For scattering surfaces the maximal slope angle is higher (up to 87° for perfect diffusers); however
the intensity of the collected signal decreases with increasing slope angle. The values given in this table were measured on a mirror at a rate of 100 Hz, with no averaging.
(4) The reference plate is a glass window that can be either located inside the optcal pen, or fixed on the same surface.
(5) For “axial” optcal pens the measuring range is parallel to the mechanical axis of the pen.
For “radial” optcal pens the measuring range is normal to the mechanical axis, allowing to measure inside holes.
(6) The lateral resoluton is defined as half the spot diameter.
(7) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this table are
typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a model with low photometric efficiency in order to avoid
saturaton. For measuring diffusive or low-reflectng samples, select a model with high photometric efficiency in order to avoid a poor signal-to-noise rato.
(8) Length and weight excluding the fiber optcs cable. The values given here are for the “axial” model.
(9) The performances given in this table were measured for a CCS Prima controller.
(10) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the center of the measuring
range. Two values are given, with internal averaging set to 1 and to 10, respectvely. This parameter is measured immediately after distance calibraton and is specified on the
calibraton certficate which is delivered with each sensor.
(11) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a 1-nm
accurate encoder. This parameter is measured with the following settings: “Auto-adaptve LED” mode, optmal rate, slope angle=0°, internal averaging = measuring rate/10.
This parameter is measured immediately after distance calibraton and is specified on the calibraton certficate which is delivered with each sensor.
(12) R = Recommended for measuring rough metallic samples (these samples can be measured with full performances)
NR = Not recommended for measuring rough metallic samples (these samples may be measured, but with reduced performances)
(13) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical.
(14) Performances in thickness mode, and in partcular the accuracy of thickness measurement, depend on the characteristcs of the sample as well as on a procedure of “Thickness
calibraton” that should be performed by the user. For more informaton contact us.
(15) Typical values measured at the center of the measuring range at optmal rate, with no averaging.
These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be divided by 1.5)
N.B. : the values are subject to change without notce.
E1204
www.stlsa.com 19