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2012 e-catalog - STIL

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SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

Application type<br />

Application<br />

Products<br />

MEASURING THE SHAPE OR DISTANCE OF A SAMPLE<br />

General case<br />

• A point sensor controller (1)(2) with a CL-MG- series<br />

• MPLS 180 sensor<br />

Long working distance<br />

• CCS-Prima, <strong>STIL</strong>-Duo, CHR-150L controller (2) with a OP- series optcal pen<br />

Inside a cavity (diam. from 7 mm)<br />

• A point sensor controller (1)(2) with a miniature (Endo series) optcal pen<br />

Rough metallic samples<br />

• A point sensor controller (1)(2) with any optcal pen. Optmal performances are achieved with an optcal pen<br />

whose spot size is inferior to 7 µm<br />

• MPLS 180 sensor. Optcal performances are achieved with the Microview optcal head<br />

Mirror-like samples / Low-reflectivity samples<br />

• A point sensor controller (1)(2) with an optcal pen whose photometric efficiency is low / high respectvely<br />

• MPLS 180 sensor.<br />

Sub-Nanometrology applications<br />

(see «precision class»)<br />

• <strong>STIL</strong>-DUO controller (2) with an OPILB- series distance-mode optcal pen<br />

Special requirements (3)<br />

Contact us<br />

MEASURING ROUGHNESS<br />

Measurable Ra:<br />

from 12 nm (with CL1MG210 optcal pen)<br />

from 50 nm (with CL3MG140 optcal pen)<br />

• A point sensor controller (1)(2) with a CL-MG- series or OP- series optcal pen whose spot size is inferior to 7 µm<br />

Sub-nanometric applications<br />

Measurable Ra: from 0.75 nm<br />

• <strong>STIL</strong>-DUO controller (1)(2) with a OPILB- series distance-mode optcal pen<br />

MEASURING THICKNESS<br />

• Measurable Thickness limits:<br />

7.5 µm-175 µm (with CL1MG210 optcal pen)<br />

0.6 mm-34 mm (with CL6MG35 optcal pen)<br />

• A point sensor controller (1)(2) with a CLMG- series or an OP- series optcal pen<br />

• Resolution: 35 nm (with CL1MG210 optcal pen)<br />

Thin films / Very high precision<br />

Measurable Thickness limits: 0.4 µm-90 µm<br />

Resolution: from 0.3 nm<br />

• <strong>STIL</strong>-DUO controller (1)(2) with a OPILB- series thickness-mode optcal pen<br />

(1) Point sensor controller = CCS-Prima, <strong>STIL</strong>-Initial, <strong>STIL</strong>-Duo or CHR-150L controller.<br />

(2) Alone or mounted on a MICROMESURE 3Dmeasuring system.<br />

(3) Measuring through a window or through a coatng, Side-looking optcal pen, Vacuum chamber, Harsh environments, Highly diffusing samples...<br />

E1204<br />

www.stlsa.com 5

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