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2012 e-catalog - STIL

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NON CONTACT MEASUREMENT SOLUTIONS<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTROCOLORIMETERS<br />

GONIOPHOTOMETERS<br />

www.stilsa.com<br />

<strong>2012</strong> e-<strong>catalog</strong><br />

WORLD LEADER IN CONFOCAL CHROMATIC DISTANCE SENSORS<br />

E1204


Coming soon<br />

SELECTION<br />

GUIDE<br />

<strong>2012</strong>, A SIGNIFICANT BREAKTROUGH FOR VISION SYSTEM<br />

• CONFOCAL CHROMATIC VISION FOR Automatc Optcal Inspecton: 3D VISION (*)<br />

(*) 3D VISION system combines a real 3D measurement and microscopy image:<br />

- Confocal chromatc measurement in TTL (through the lens),<br />

- High contrast,<br />

- High lateral resoluton,<br />

- Perfect focus in the extended measuring range.<br />

Table of contents<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

• Selecton guide.................................................................................4<br />

• 3D Metrology products.......................................................................4<br />

Precision class.....................................................................................4<br />

Applicaton type..................................................................................5<br />

Measuring rate.................................................................................6<br />

Scanning mode.................................................................................6<br />

Multi-channel operation......................................................................6<br />

Optical specifications.........................................................................6<br />

Electronic / Software specificatons...............................................................7<br />

Mechanical specificatons.........................................................................7<br />

Value-for-Cost..................................................................................7<br />

Non-contact «point» sensors<br />

• Introducing Chromatc Confocal technology..............................................8<br />

Optcal principle...................................................................................8<br />

Applicatons.......................................................................................9<br />

Product Lines..................................................................................10<br />

• «Bundle» Chromatc Confocal sensors......................................................11<br />

<strong>STIL</strong> Inital sensor line........................................................................11<br />

• Configurable Chromatc Confocal sensors............................................13<br />

The CCS Controller line........................................... .........................13<br />

The CHR Controller line..........................................................................15<br />

Modular optcal pens (CL-MG line)..............................................................18<br />

Classical optcal pens (OP line)...................................................................19<br />

Miniature optcal pens (ENDO line)..............................................................20<br />

• Introducing Spectral Confocal Interferometry technology............................22<br />

Optcal principle...................................................................................22<br />

The DUO controller line..........................................................................23<br />

Interferometric optcal pens (OPILB line)........................................................25<br />

• Fiber optc cables................................................................................26<br />

• Accessories......................................................................................27<br />

• Software...........................................................................................29<br />

4<br />

8<br />

2<br />

www.stlsa.com


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Table of contents<br />

Non-contact «line» sensors<br />

34<br />

• MPLS180 «line» sensors.........................................................................34<br />

MPLS180 optcal principle.........................................................................34<br />

Basic sensor consttuton..........................................................................35<br />

Optoelectronic controllers: technical specificatons..............................................35<br />

• Optcal heads.....................................................................................36<br />

Non-contact 3D Measurement Systems<br />

• MICROMESURE 2 Systems...................................................................38<br />

Applicatons......................................................................................39<br />

Industrial and Research Laboratories Fields....................................................39<br />

Optons & Accessories...........................................................................39<br />

• Technical specificatons......................................................................39<br />

Scanning system Specificatons.................................................................39<br />

Optoelectronic Controllers Specificatons .....................................................40<br />

Optcal Pens and video camera Specificatons.................................................40<br />

• Software.........................................................................................41<br />

Control and Acquisiton Software Functons....................................................41<br />

Post Processing Software Functons............................................................. 42<br />

38<br />

Non-contact Spectrocolorimeter<br />

• Introducing Colorimetry.........................................................................44<br />

Applicatons..................................................................................... 44<br />

• RUBY Spectrocolorimeter...................................................................44<br />

• Technical specificatons............ ................................................... 45<br />

• Software.......................................................................................46<br />

DLL for RUBY controllers.......................................................................46<br />

RUBY MANAGER software......................................................................47<br />

Goniophotometers<br />

• REFLET introducton and features ....................................... ............. 48<br />

REFLET technical specificatons and applications.......................................... 49<br />

• DIAMOND introducton and applications........................................... 50<br />

• Optons......................................................................................... 51<br />

44<br />

48<br />

Outline dimensions<br />

• Point sensors.................................................................................. 53<br />

• Line sensors...................................................................................68<br />

• Goniophotometers..........................................................................71<br />

52<br />

www.stlsa.com 3


Selecton guide<br />

SELECTION<br />

GUIDE<br />

General selection guide<br />

Application<br />

See<br />

• Measure the Shape of a sample<br />

• Measure the Distance of a sample (auto-focusing)<br />

• Measure the Thickness of a sample or a coating<br />

• Measure the Roughness of a surface<br />

3D Metrology Products<br />

Selecton Guide<br />

(on this page)<br />

SENSORS<br />

• Measure or compare the Color of a sample<br />

• Measure the Spectrum reflected,<br />

transmitted or emitted from a sample or a light source<br />

• Measure the Angular distribution of light beam reflected, transmitted or emitted<br />

from a sample (BRDF/BTDF)<br />

Non Contact spectrocolorimeter<br />

(page 44)<br />

Goniophotometers<br />

(page 48)<br />

3D SYSTEMS<br />

3D Metrology products selection guide<br />

<strong>STIL</strong> SA proposes a large number of products for high quality 3D metrology.<br />

For selectng the right product one should consider several criteria:<br />

• Precision class,<br />

• Applicaton type,<br />

• Measuring rate,<br />

• Scanning mode,<br />

• Mult-channel operaton,<br />

• technical specificatons,<br />

• Value-for-Cost.<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Precision class<br />

Class Axial Resolution (1) Measuring Range Technology Products<br />

Sub-nano-Metrology from 0.3 nm up to 135 µm<br />

Nano-Metrology<br />

from 8.0 nm<br />

(1) Smallest measurable step.<br />

(2) Alone or mounted on a MICROMESURE 3D measuring system.<br />

Several measuring<br />

ranges available:<br />

from 130 µm to<br />

42 mm<br />

CONFOCAL<br />

SPECTRAL<br />

INTERFEROMETRY<br />

(page 22)<br />

CHROMATIC<br />

CONFOCAL<br />

IMAGING<br />

(page 8)<br />

<strong>STIL</strong>-DUO controller (2) with OPILB optcal pen<br />

CCS-PRIMA, <strong>STIL</strong>-INITIAL, <strong>STIL</strong>-DUO or CHR-<br />

150L controller (2) with a CL-MG, OP or Endo<br />

series optcal pen<br />

MPLS 180 sensor<br />

4<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

Application type<br />

Application<br />

Products<br />

MEASURING THE SHAPE OR DISTANCE OF A SAMPLE<br />

General case<br />

• A point sensor controller (1)(2) with a CL-MG- series<br />

• MPLS 180 sensor<br />

Long working distance<br />

• CCS-Prima, <strong>STIL</strong>-Duo, CHR-150L controller (2) with a OP- series optcal pen<br />

Inside a cavity (diam. from 7 mm)<br />

• A point sensor controller (1)(2) with a miniature (Endo series) optcal pen<br />

Rough metallic samples<br />

• A point sensor controller (1)(2) with any optcal pen. Optmal performances are achieved with an optcal pen<br />

whose spot size is inferior to 7 µm<br />

• MPLS 180 sensor. Optcal performances are achieved with the Microview optcal head<br />

Mirror-like samples / Low-reflectivity samples<br />

• A point sensor controller (1)(2) with an optcal pen whose photometric efficiency is low / high respectvely<br />

• MPLS 180 sensor.<br />

Sub-Nanometrology applications<br />

(see «precision class»)<br />

• <strong>STIL</strong>-DUO controller (2) with an OPILB- series distance-mode optcal pen<br />

Special requirements (3)<br />

Contact us<br />

MEASURING ROUGHNESS<br />

Measurable Ra:<br />

from 12 nm (with CL1MG210 optcal pen)<br />

from 50 nm (with CL3MG140 optcal pen)<br />

• A point sensor controller (1)(2) with a CL-MG- series or OP- series optcal pen whose spot size is inferior to 7 µm<br />

Sub-nanometric applications<br />

Measurable Ra: from 0.75 nm<br />

• <strong>STIL</strong>-DUO controller (1)(2) with a OPILB- series distance-mode optcal pen<br />

MEASURING THICKNESS<br />

• Measurable Thickness limits:<br />

7.5 µm-175 µm (with CL1MG210 optcal pen)<br />

0.6 mm-34 mm (with CL6MG35 optcal pen)<br />

• A point sensor controller (1)(2) with a CLMG- series or an OP- series optcal pen<br />

• Resolution: 35 nm (with CL1MG210 optcal pen)<br />

Thin films / Very high precision<br />

Measurable Thickness limits: 0.4 µm-90 µm<br />

Resolution: from 0.3 nm<br />

• <strong>STIL</strong>-DUO controller (1)(2) with a OPILB- series thickness-mode optcal pen<br />

(1) Point sensor controller = CCS-Prima, <strong>STIL</strong>-Initial, <strong>STIL</strong>-Duo or CHR-150L controller.<br />

(2) Alone or mounted on a MICROMESURE 3Dmeasuring system.<br />

(3) Measuring through a window or through a coatng, Side-looking optcal pen, Vacuum chamber, Harsh environments, Highly diffusing samples...<br />

E1204<br />

www.stlsa.com 5


Selecton guide<br />

SELECTION<br />

GUIDE<br />

Measuring rate<br />

Ultra-high rate<br />

Requirement Measuring rate Products<br />

Up to 324,000 points/s<br />

(1800 lines/s)<br />

• MPLS 180 sensor<br />

Standard rate<br />

Up to 2,000 points/s<br />

Up to 1,000 points/s<br />

• CCS-Prima, <strong>STIL</strong>-Initial, <strong>STIL</strong>-Duo controllers (*)<br />

• CHR-150L controller (*)<br />

(*) With a suitable optcal pen, alone or mounted on a MICROMESURE 3D measuring system<br />

SENSORS<br />

3D SYSTEMS<br />

Scanning mode<br />

Measuring an area<br />

Requirement Type Products<br />

Measuring a linear or circular profile<br />

Measuring a single point over time<br />

3D<br />

(X,Y,Z)<br />

2D<br />

(X,Z)<br />

1D<br />

(Z)<br />

Multi-channel operation<br />

• MICROMESURE system with any point sensor (*)<br />

• Scanning (3D) MPLS180 sensor<br />

• Static(2D) MPLS180 sensor with the sample on a conveyor belt<br />

• Any point sensor (*) mounted on a user-machine which has at least 2 moton axes<br />

• MICROMESURE system with any point sensor (*)<br />

• Static (2D) MPLS180 sensor<br />

• Any point sensor (*) with the sample on a conveyor belt<br />

• Any point sensor (*) mounted on a user-machine which has at least 1 moton axis<br />

• Any point sensor (*)<br />

(*) Point sensors: CCS-Prima, <strong>STIL</strong>-Duo, <strong>STIL</strong>-Initial or CHR150-L controller with a suitable optcal pen.<br />

Sensor<br />

Multi-channel operation<br />

CHR-150L controller 1,2 or 4 simultaneous channels (1)(2)<br />

SPECTRO<br />

COLORIMETERS<br />

CSS-Prima controller 1,2 or 4 multiplexed channels (1)(3)<br />

<strong>STIL</strong>-Duo controller<br />

<strong>STIL</strong>-Initial controller<br />

MPLS180 sensor<br />

Optical specifications<br />

1 channel for a chromatic confocal optical pen and<br />

1 channel for a interferometric optical pen<br />

The two channels are multiplexed (3)<br />

Single-channel operation only<br />

(1) The number of channels should be specified while ordering, no upgrade is possible later.<br />

(2) Simultaneous channels: all the channels measure at the same tme.<br />

(3) Multplexed channels: all optcal pens may be connected to the controller at the same tme, but only one of them measures.<br />

GONIO<br />

PHOTOMETERS<br />

Optical specifications<br />

• Measuring range<br />

• Axial resolution and accuracy<br />

• Lateral resolution (spot size)<br />

• Working distance<br />

• Maximal measurable slope (°) on specular samples<br />

• Photometric efficiency<br />

• Min/Max measurable thickness<br />

• Min. measurable roughness<br />

See:<br />

• For CCS-Prima, <strong>STIL</strong>-DUO, <strong>STIL</strong>-Initial sensors: See Chromatc Confocal<br />

optcal pen specificatons (Pages 18, 19, 21)<br />

• For <strong>STIL</strong>-Duo sensor: See Interferometric optcal pen specificatons (Pages 26)<br />

• For MPLS180 sensor: See optcal head specificatons (Page 36)<br />

6<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Selecton guide<br />

Electronic/Software specifications<br />

Electronic/Software specifications<br />

• Measuring rate<br />

• Digital output type<br />

• Analog outputs<br />

• Trigger options<br />

• Available software<br />

See:<br />

• For Point sensors:<br />

See controller specificatons (Pages 12, 16, 24)<br />

• For MPLS180 sensor:<br />

See controller specificatons (Pages 35)<br />

Mechanical specifications<br />

For Outline dimensions of all products, see pages (53-70).<br />

Value-for-Cost<br />

• The mult-channel point sensors (multplexed CCS-Prima and simultaneous-channel CHR-150L) allow significant saving<br />

compared to 2 or 4 independent sensors.<br />

• The <strong>STIL</strong>-Duo controller combines 2 complementary technologies (Confocal Spectral Interferometry and Chromatic<br />

Confocal Imaging) in the same controller.<br />

• The <strong>STIL</strong>-Initial sensor («bundle» product suitable for first-tme users and for lab applicatons) is proposed at a very attractve<br />

price. This sensor has some limitatons when compared to the other chromatc confocal point sensors as shown<br />

in the table below.<br />

<strong>STIL</strong>-Initial CCS-Prima CHR-150L<br />

Number of optical pens that are interchangeable on<br />

the same controller<br />

1 (1) up to 20 (2) Up to 6 (2)<br />

Available chromatic confocal optical pen models Some models (3) All models All models<br />

Multi-channel operation No Opton (4) Opton (4)<br />

Output type Digital Digital & Analog Digital & Analog<br />

External Encoder reading capability No Yes No<br />

Controller box type Desktop Industrial Desktop<br />

(1) The optcal pen of the <strong>STIL</strong>-Inital is selected when ordering, no replacement is possible later.<br />

(2) Optcal pens may be connected and disconnected from the controller easily. New optcal pens may be added later to the CCS-Prima and the CHR-150L controllers,<br />

but they should be calibrated at factory on the customer’s controller.<br />

(3) See page (11).<br />

(4) See «Mult-channel operaton» on this selecton guide.<br />

E1204<br />

www.stlsa.com 7


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Introducing Confocal Chromatic technology<br />

The fruits of more than fifteen years of research and development by<br />

our engineers, <strong>STIL</strong>’s optcal sensors offer the best of technology in<br />

response to the most demanding needs in terms of non contact dimensional<br />

measurements.<br />

Based on an innovatve optcal principle which uses the chromatc coding<br />

of space (invented and patented by <strong>STIL</strong>), our sensors allow users<br />

to make measurements on nearly any kind of materials, with an exceptonal<br />

accuracy.<br />

<strong>STIL</strong>’s sensors find applicatons in almost all sectors of industry, be it as<br />

high precision instruments in metrology or research laboratories, or as<br />

quality control tools on producton lines.<br />

Designed for use in industrial environments, the different ranges of<br />

<strong>STIL</strong>’s sensors will appeal to integrators thanks to their easy interfacing<br />

on measurement and inspecton machines, made possible thanks to<br />

the DLL/ dynamic link libraries provided with each instrument.<br />

3D SYSTEMS<br />

Optical principle<br />

Our optcal sensors are based on the highly innovatve Confocal Chromatc Imaging principle (<strong>STIL</strong> SA’s patent).<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

An incident white light pinhole is imaged through a<br />

chromatc objectve into a contnuum of monochromatc<br />

images along the Z-Axis, thus providing a «color coding»<br />

along the optcal axis.<br />

When an object is present in this «colored» field, a<br />

unique wavelength is perfectly focused at its surface<br />

and then reflected into the optcal system.<br />

This backscattered beam passes through a filtering<br />

pinhole into a spectrograph, which determines the<br />

wavelength has been perfectly focused on the object,<br />

and then accurately determine its positon in the<br />

measuring field.<br />

The Confocal Chromatc Imaging gives access to reliable,<br />

accurate and reproducible dimensional measurements<br />

with extremely high resoluton.<br />

8<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

A wide range of applications<br />

Roughness measurement<br />

Our sensors are fully compliant with<br />

the new ISO25178 regulaton and are<br />

able to measure roughness values<br />

down to a few nanometers.<br />

They allow to acquire roughness profiles<br />

much faster than a classical tactle<br />

probe, and without any risk of marking<br />

the surface.<br />

Profilometry & Microtopography<br />

Interfaced with 3D scanning devices, <strong>STIL</strong>’s sensors<br />

give acess to full 2D and 3D measurements of complex<br />

objects or assemblies with submicronic accuracy.<br />

Thickness measurement<br />

The very innovatve Confocal Chromatc<br />

Imaging principle allows measurement<br />

of the thickness of transparent materials,<br />

with extremely high accuracy,<br />

using one single sensor. The thickness<br />

is directly measured from one<br />

side of the<br />

sample.<br />

Autofocus<br />

Thanks to their extended measuring range, <strong>STIL</strong>’s<br />

sensors are the perfect soluton for an accurate<br />

autofocus in vision systems.<br />

Level control<br />

Thanks to their non-contact technology,<br />

our sensors allow detecton and measurement<br />

of fluids’ level.<br />

Online inspection<br />

<strong>STIL</strong> SA’s optcal sensors allow systematc control<br />

on producton lines thanks to their very high<br />

measuring rates and advanced interfacing<br />

capabilites with the manufacturing<br />

chain or the custom inspecton machine.<br />

Vibrometry<br />

Thanks to very high measuring frequencies and nanometric<br />

resoluton, our sensors allow the measurement<br />

of vibratons in objects under test. Their<br />

non-contact design avoids disturbance of the system<br />

under test, and allows analysis and measurement of<br />

difficult to access areas.<br />

E1204<br />

www.stlsa.com 9


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

3D SYSTEMS<br />

Characteristics<br />

High resoluton non contact optcal sensors for 3D measurement with a wide range of applicatons.<br />

Advantages<br />

Characteristics<br />

Confocal setup<br />

Coaxial setup<br />

Chromatic coding/decoding<br />

Optical fiber system<br />

Measuring modes<br />

Benefits<br />

- Exceptonal signal-to-noise rato (SNR)<br />

- High resoluton<br />

- No shadowing effects<br />

- Capability of measuring highly polished surfaces<br />

- No Z scanning required<br />

- High precision<br />

- Small, light weight, passive optcal probe («optcal pen»)<br />

connected to the controller by a fiber optcs cable<br />

- «Distance» (Z-coordinate)<br />

- «Thickness» measurement of transparent materials<br />

- Measure on any type of material (metal, glass, ceramics, semiconductors, paper),<br />

- Measure on polished surfaces (mirrors, wafers) and on rough ones,<br />

- Insensitve to ambient lightng,<br />

- Compatble with harsh environments (high temperature / high pressure / irradiaton),<br />

- ISO 25178 standard compliant,<br />

- Large choice of measuring ranges (100 µm to 42 mm ranges),<br />

- Large choice of optcal pens for specific requirements («endoscopic» pens / radial pens / large working distance /<br />

steep slope / small spot size / through-window measurement...),<br />

- Free software toolkit for an easy interfacing («CCS Manager» utlity, c++ and .net DLL SDK).<br />

Product lines<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Product lines<br />

<strong>STIL</strong> Initial<br />

CCS controller<br />

+ Optical pen(s)<br />

+ Fiber optics cable(s)<br />

CHR controller<br />

+ Optical pen(s)<br />

+ Fiber optics cables(s)<br />

Features<br />

- «Bundle» products including everything you need<br />

- Recent design, many advandced features<br />

- Ideal for first-tme users and research laboratories<br />

- Exceptonal Value-for-Price<br />

- Configurable sensors<br />

- Large choice of interchangeable optcal pens<br />

- Recent design, many advandced features<br />

- Ideal for OEM users and Industrial applicatons<br />

- Very wide range of applicatons<br />

- 2 & 4 selectable-channels models available<br />

- Configurable sensors<br />

- Large choice of interchangeable optcal pens<br />

- 2 & 4 simultaneous-channels models available<br />

10<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

«Bundle» Chromatic Confocal sensors<br />

These sensors measure the alttude (z coordinate) of the sample point located on their optcal axis and the thickness of<br />

transparent samples.<br />

Advantages<br />

- «Bundle» products including everything required for launching a measurement immediately: a controller, an optcal pen<br />

(probe), a fiber optc cable, electrical cables, software tools and a comprehensive user manual,<br />

- Best choice for first-tme users and for research lab applicatons,<br />

- High precision, high resoluton,<br />

- Exceptonal value for price.<br />

<strong>STIL</strong> Initial Sensor Line<br />

<strong>STIL</strong> Inital is a new line of high-resoluton chromatc confocal sensors. 5 models are available, each with a different optcal<br />

pen. Contact us for advice on the best model for your applicaton.<br />

Specifications (*) <strong>STIL</strong> Initial 0.4 <strong>STIL</strong> Initial E1.2 <strong>STIL</strong> Initial E1.2/90 <strong>STIL</strong> Initial 4.0 <strong>STIL</strong> Initial 12<br />

Optical Pen Model CL2-MG140 ENDO 1.2 ENDO 1.2/90° CL4-MG35 CL5-MG35<br />

Measuring Range 0.4 mm 1.2 mm 1.2 mm 4.0 mm 12.0 mm<br />

Working Distance 11.0 mm 2.4 mm 0.4 mm 16.4 mm 29 mm<br />

Axial Resolution 22 nm 100 nm 160 nm 130 nm 400 nm<br />

Accuracy 80 nm 300 nm 800 nm 300 nm 900 nm<br />

(*) See detailed specificatons next page<br />

The <strong>STIL</strong> Inital controller is highly sophistcated, it features extensive synchronizaton opton and advanced measuring modes.<br />

Here are a few examples.<br />

Functions<br />

Application<br />

«Auto-LED» : The LED brightness<br />

adapts itself automatcally<br />

Samples with variable slope e.g lenses<br />

«First peak» : The sensor locks on<br />

the first surface<br />

Topography on transparent objects or<br />

coated samples<br />

«Double Frenquency» : The sensor<br />

selects the optmal measuring rate<br />

automatcally<br />

Samples with high sharp reflectvity variatons,<br />

e.g. mask for microelectronics<br />

«Hold Last Value» : Output data<br />

smoothing<br />

Very difficult samples with many non<br />

measurable points<br />

E1204<br />

www.stlsa.com 11


Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

<strong>STIL</strong> Initial: Technical specifications<br />

Controllers<br />

<strong>STIL</strong> initial Series<br />

Model <strong>STIL</strong> Initial 0.4 <strong>STIL</strong> Initial E1.2 <strong>STIL</strong> Initial E1.2 /90 (1) <strong>STIL</strong> Initial 4.0 <strong>STIL</strong> Initial 12<br />

OPTICAL PEN (PROBE)<br />

Model CL2-MG140 ENDO 1.2 ENDO 1.2/90 (1) CL4-MG35 CL5-MG35<br />

Measuring Range 0.4 mm 1.2 mm 1.2 mm 4.0 mm 12.0 mm<br />

Working Distance 11.0 mm 2.4 mm 0.4 mm 16.4 mm 29 mm<br />

Spot Diameter 3.4 µm 15 µm 13 µm 7.2 µm 16.5 µm<br />

Max. Slope Angle (2) (3) +/- 28° +/- 14° +/- 9° +/- 21° +/- 14°<br />

Weight 190 g 10 g 10g 155 g 175 g<br />

Dimensions x L 27mm x 208.9mm 6 mm x 75.2 mm 6 mm x 82 mm 27 mm x 145.5 mm 27 mm x 145.5 mm<br />

Distance Measurement<br />

Axial Resoluton (4)<br />

- With no averaging<br />

- With Averaging 10<br />

22 nm<br />

8 nm<br />

100 nm<br />

35 nm<br />

160 nm<br />

60 nm<br />

130 nm<br />

50 nm<br />

400 nm<br />

180 nm<br />

Accuracy (5) 80 nm 300 nm 800 nm 300 nm 900 nm<br />

Measuring rough metalic samples (9) R NR NR NR NR<br />

Roughness measurement (10)<br />

Min. measurable Ra<br />

30nm NR NR NR NR<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Thickness Measurement (6)<br />

Min. Measurable Thickness (7)(8) 16 µm 75 µm NA 110 µm 450 µm<br />

Max. Measurable Thickness (7)(8) 510 µm 1600 µm NA 5700 µm 16500 µm<br />

CONTROLLER BOX<br />

Measuring Modes<br />

Measuring Rate<br />

Digital Outputs<br />

Digital Resoluton<br />

Synchronizaton<br />

Advandced Features<br />

Power supply / Consumpton<br />

Weight<br />

Dimensions W x H x D<br />

FIBER OPTICS CABLE<br />

«Distance» and «Thickness»<br />

100 Hz to 2000Hz<br />

USB 2.0 and RS232 (up to 460800 baud)<br />

In «Distance» mode: 30 bits<br />

In «Thickness» mode: 15 bits<br />

Input and Output 0V - 5V TTL synchronizaton signals<br />

Extensive trigger capacites<br />

«Double frequency» mode<br />

«Auto LED» mode<br />

«First peak» mode<br />

«Hold last value» mode<br />

«Thickness calibraton»<br />

100V to 240 V AC 50-60 Hz / 25W<br />

1920 g<br />

199 mm x 123.5 mm x 277 mm<br />

(1) Radial (90°) measuring optcal pen.<br />

(2) The maximal angular slope applies to specular (mirror-like) surfaces only. For Diffusing surfaces the maximal slope angle is higher (up to 87° for perfect diffusers).<br />

(3) Measured on a mirror at 100 Hz, with no averaging.<br />

(4) Axial resoluton is defined as the RMS Noise level measured at optmal rate on a statc sample located at the center of the measuring, with no averaging.<br />

(5) Accuracy is defined as the max. error over the entre measuring range, measured immediately after distance calibraton at the following conditons: “Auto-adaptve LED”<br />

mode, optmal rate, slope angle=0°, averaging factor= measuring rate/10.<br />

(6) For obtaining metrological performances in this mode it is recommended to carry out a calibraton on a thickness standard.<br />

(7) These values are for a refractve index of 1.5 (for measuring air gap thickness divide by 1.5).<br />

(8) Typical values, measured at the center of the measuring range at optmal rate, with no averaging.<br />

(9) R = Recommended for measuring rough metallic samples (these samples can be measured with full performances)<br />

NR = Not recommended for measuring rough metallic samples (these samples may be measured, but with reduced performances)<br />

(10) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical..<br />

N.B. : the values are subject to change without notce.<br />

12<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

Configurable Chromatic Confocal «point» sensors<br />

These sensors measure the alttude (z coordinate) of the sample point located on their optcal axis.<br />

They can also measure the thickness of transparent samples.<br />

They consist of a controller (1), an «optcal pen» (optcal probe) (2) and a fiber optc cable (3).<br />

2 controller lines (CCS & CHR), 3 optcal pen lines (CL-MG, OP & ENDO) and different fiber optc cable models are available.<br />

A single controller may be ordered with several interchangeable optcal pens.<br />

(1)<br />

(3)<br />

(2)<br />

Advantages<br />

- Select the CCS or CHR controller, as well as the optcal pen and the fiber optcs cable best suited for your applicaton.<br />

- Large choice of measuring ranges (110 µm - 20 mm),<br />

- Large choice of optcal pens satsfying specific requirements («endoscopic» / radial pens / large working distance / steep<br />

slope / small spot size / through-window measurement..)<br />

The CCS controller line<br />

3 controllers for configurable chromatc confocal sensors featuring different number of channels are available:<br />

- the CCS PRIMA (1 channel), CCS PRIMA 2 (2 channels) and CCS PRIMA 4 (4 channels).<br />

Advantages<br />

- High precision, high resoluton,<br />

- Compatble with all chromatc confocal optcal pens,<br />

- Up to 20 different optcal pens interchangeable on the same controller,<br />

- Digital and analog outputs,<br />

- Synchronized reading of external digital encoders.<br />

CCS PRIMA controllers<br />

- The leading chromatic confocal sensor worldwide,<br />

- The most sophisticated chromatic confocal sensor on the market,<br />

- Recommended for OEM User and Industrial applicatons,<br />

- Improved performances in thickness mode thanks to a specific Thickness calibraton,<br />

- Long lifetme light source,<br />

- Measuring rates: 100 Hz to 2000 Hz.<br />

E1204<br />

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SPECTRO<br />

COLORIMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

The CCS PRIMA controller is higly sophistcated, it offers extensive synchronizaton optons and advanced measuring modes.<br />

SENSORS<br />

Functions<br />

«Auto-LED» : The LED brightness<br />

adapts itself automatcally<br />

«First peak» : The sensor locks on<br />

the first surface<br />

«Double Frenquency» : The sensor<br />

selects the optmal measuring rate<br />

automatcally<br />

«Hold Last Value» : Output data<br />

smoothing<br />

Application<br />

Samples with variable slope e.g lenses<br />

Topography on transparent objets<br />

Samples with high sharp reflectvity<br />

variatons, e.g. mask for microelectronics<br />

Very difficult samples with many non<br />

measurable points<br />

3D SYSTEMS<br />

2 and 4 CCS Prima Multiplexed Channel Models<br />

- Up to 4 optcal pens connected to a single CCS PRIMA controller<br />

- Multplexed channels, Commutaton tme < 400ms,<br />

- Ideal for automatc inspecton applicatons,<br />

- Save up to 62 % compared to 4 independent controllers.<br />

GONIO<br />

PHOTOMETERS<br />

4 multplexed channels<br />

CCS PRIMA4 Controller<br />

2 multplexed channels<br />

CCS PRIMA2 Controller<br />

14<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

The CHR Controller Line<br />

CHR150-L controllers<br />

- High precision, high resoluton,<br />

- Measuring rate up to 1 KHz,<br />

- Compatble with all optcal pens,<br />

- Long lifetme light source,<br />

- Intergrated control panel.<br />

CHR150 controllers<br />

- Tungsten Halogen light source<br />

2 and 4 CHR150 or CHR150-L simultaneous channel models<br />

- Up to 4 optcal pens connected to a single CHR150-L controller<br />

- All channels measure simultaneously,<br />

- Each channel may be configured independently,<br />

- Save up to 44% compared to 4 independent controllers.<br />

2 Channels CHR150 Controller<br />

E1204<br />

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Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

Controllers for configurable chromatic confocal point sensors:<br />

Technical specifications<br />

Controllers CHR Series CCS Series<br />

Model CHR150 CHR150-L CCS-PRIMA<br />

Measuring frequency<br />

From 30 to 1000 points/sec<br />

User defined<br />

From 30 to 1000 points/sec<br />

User defined<br />

From 100 to 2000 points/sec<br />

User defined<br />

Multchannel version (1) Available (2 & 4 channels) Available (2 & 4 channels) Available (2 &4 channels)<br />

SENSORS<br />

Light source Halogen White LED White LED<br />

Light source brightness setting None Manual Programmable<br />

Advandced Features:<br />

«Lock on first surface»<br />

«Hold Last Value»<br />

«Thickness calibraton»<br />

«Auto LED» (2)<br />

«Autodark» functon (3)<br />

«Double frequency»<br />

No<br />

No<br />

No<br />

No<br />

No<br />

Up to 489 Hz<br />

No<br />

No<br />

No<br />

No<br />

No<br />

Up to 489 Hz<br />

Yes<br />

Yes<br />

Yes<br />

Yes<br />

Yes<br />

Up to 1850 Hz<br />

Measuring modes<br />

Distance<br />

Thickness<br />

Distance<br />

Thickness<br />

Distance<br />

Thickness<br />

Calibraton tables (max) 6 20<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Encoders input (4) No No Yes (up to 3 axes) - TTL signals input - 30 bits counters (> 1 billion steps count)<br />

Digital outputs 15 bits resoluton 30 bits resoluton<br />

Analog outputs 2 configurable outputs [0 – 10 V] - 12 bits resoluton 2 configurable outputs [0 - 10V] - 16 bits resoluton<br />

Digital I/O RS232 (up to 115200 baud») serial link USB2 and RS232/RS422 (up to 46800 baud)<br />

Synchronizaton I/O 1 Synchro input (TTL) / 1 Synchro output (TTL) 1 Synchro input (TTL) / 1 Synchro output (TTL)<br />

Optcal fiber connector<br />

Compatble Optcal pens<br />

E2000 type («push-pull») with «Autoprotect» system<br />

All chromatc confocal pen types<br />

Power supply / consumpton From 85 to 240 V AC / 100 W From 85 to 240 V AC / 25 W 24 V DC / 20 W<br />

Temperature in use 5°C - 40°C<br />

Storage temperature -30°C – 70°C<br />

Relatve humidity in use<br />

5%-80% HR without condensaton<br />

Protecton type IP 40<br />

EMC<br />

EN 61000-6-3 and EN 61000-6-2 compliant<br />

Weight (5) 3.4 kg 1.4 Kg<br />

Dimensions (w x h x d) 316mm x 96mm x 235mm 168mm x 138mm x 120mm<br />

Mechanical interface Table top controller Integrated DIN rail mountng interface<br />

(1) Multplexed channels (CCS) Vs simultaneous multple channels (CHR):<br />

- CCS PRIMA4 multplexed sensor: 1 (out of 4) optcal pen can measure at a tme, the sensor can switch to another optcal<br />

pen in about 400 ms.<br />

- CHR150-2 and CHR150-4 Multple channels: All the optca l pens (2 or 4) can measure simultaneously.<br />

(2) The «Auto Led» functon allows the CCS Prima controller to dynamically adjust the LED light power in order to permanently adapt<br />

it according to the reflectvity of the measured object.<br />

(3) The «Autodark» functon allows a constant and automatc regulaton of the Dark signal level of the CCS controller.<br />

(4) The incremental encoders input port allows the acquisiton of the instant positon of the measuring system moton axes (3 axes<br />

maximum). These measurements are synchronized with the measuring frequency of the sensor.<br />

(5) The specified weight does not include the external light source for the CCS Ultma model.<br />

N.B. : the values are subject to change without notce.<br />

16<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

3D measurement examples: chromatic confocal technology<br />

Intra occular lens (IOL) - Z range: 750µm<br />

3D measurement examples: confocal spectral interferometry<br />

Through Silicon Vias (TSV) array - Via diameters: 5µm to 20µm - Z range 100µm<br />

E1204<br />

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Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

Modular optical pens (CL-MG Line)<br />

CL-MG Line *<br />

Model CL1 CL2 CL3 CL4 CL5 CL6<br />

Measuring range (1) [µm] 130 400 1400 4000 12000 24000<br />

Working distance (2) [mm] 3.3 11 12.7 16.4 29 22<br />

Max. object slope (3) [deg] +/- 42.5° +/- 28° +/- 25° +/- 21° +/- 14° +/- 8.5°<br />

Reference plate (4) - No Yes Yes Yes Yes No<br />

SENSORS<br />

Axial model (5)<br />

-<br />

Radial model (5) -<br />

Standard<br />

Optonal<br />

Magnifier model MG210 MG140 MG210 MG140 MG70 MG140 MG70 MG35 MG20 MG35 MG20 MG35 MG20<br />

LATERAL (XY) PROPERTIES<br />

Spot size (diameter)<br />

Lateral resoluton (6)<br />

[µm]<br />

[µm]<br />

1.9<br />

0.9<br />

2.8<br />

1.4<br />

2.3<br />

1.2<br />

3.4<br />

1.7<br />

6.9<br />

3.5<br />

4<br />

2<br />

8<br />

4<br />

8<br />

4<br />

14<br />

7<br />

14<br />

7<br />

24.5<br />

12.3<br />

16<br />

8<br />

28<br />

14<br />

PHOTOMETRIC EFFICIENCY (7)<br />

Collected energy (relatve) - 5.8 13 5.5 11.5 46 14 56 30 76 40 100 19.2 48<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

MECHANICAL INTERFACE<br />

Length (8)<br />

Diameter (8)<br />

Weight<br />

Performances (9)<br />

DISTANCE MEASUREMENT<br />

Axial resoluton (10)<br />

With no averaging<br />

With averaging 10<br />

Accuracy (11)<br />

Measuring rough metal surface (12)<br />

[mm]<br />

[mm]<br />

[g]<br />

[nm]<br />

[nm]<br />

[nm]<br />

-<br />

253.1<br />

27<br />

268<br />

8<br />

2.7<br />

35<br />

R<br />

217.1<br />

27<br />

195<br />

243.3<br />

27<br />

248<br />

208.9<br />

27<br />

190<br />

22<br />

8<br />

80<br />

R<br />

ROUGHNESS MEASUREMENT<br />

Min. measurable Ra (13) [nm] 12 30 90 170 600 1100<br />

THICKNESS MEASUREMENT (14)<br />

Min. measurable thickness (15)<br />

Max. measurable thickness (15)<br />

[µm]<br />

[µm]<br />

7.5<br />

175<br />

9<br />

175<br />

14<br />

510<br />

14<br />

510<br />

176.1<br />

27<br />

189<br />

22<br />

510<br />

205.9<br />

27<br />

215<br />

R<br />

38<br />

2000<br />

60<br />

20<br />

200<br />

176.1<br />

27<br />

214<br />

NR<br />

40<br />

2000<br />

145.5<br />

27<br />

155<br />

110<br />

5700<br />

130<br />

50<br />

300<br />

NR<br />

131.7<br />

27<br />

140<br />

120<br />

5700<br />

145.5<br />

27<br />

175<br />

350<br />

16500<br />

400<br />

180<br />

800<br />

NR<br />

131.7<br />

27<br />

160<br />

550<br />

16500<br />

167.6<br />

27<br />

195<br />

590<br />

34000<br />

780<br />

300<br />

1500<br />

NR<br />

151.8<br />

27<br />

180<br />

725<br />

34000<br />

GONIO<br />

PHOTOMETERS<br />

N.B. : the values are subject to change without notce.<br />

18<br />

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E1204


SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

Classical optical pens (OP Line)<br />

OP Line<br />

Model OP300VM OP6000 OP8000 OP10000 OP24000 OP42000<br />

Measuring range (1) [µm] 300 6 000 8000 10 000 24 000 42 000<br />

Working distance (2) [mm] 5 28.8 37.2 66.9 223 518<br />

Max object slope (3) [deg] +/- 25° +/- 22° +/- 16° +/- 12° +/- 5° +/- 2.5°<br />

Reference plate (4) - No No Yes Yes Yes No<br />

Axial model (5)<br />

Radial model (5) -<br />

Standard<br />

Optonal<br />

Standard<br />

No<br />

Standard<br />

No<br />

Standard<br />

Optonal<br />

Standard<br />

Optonal<br />

Standard<br />

No<br />

LATERAL (XY) PROPERTIES<br />

Spot size (diameter)<br />

Lateral resoluton (6)<br />

[µm]<br />

[µm]<br />

8<br />

4<br />

12.5<br />

6.25<br />

34<br />

17<br />

51<br />

25.5<br />

100<br />

50<br />

110<br />

55<br />

MECHANICAL INTERFACE<br />

Length (8)<br />

Diameter (8)<br />

Weight<br />

[mm]<br />

[mm]<br />

[g]<br />

127<br />

15<br />

25<br />

205.5<br />

60<br />

727<br />

150<br />

40<br />

400<br />

189<br />

50<br />

640<br />

172.5<br />

59<br />

360<br />

287.2<br />

85<br />

1700<br />

Performances (9)<br />

DISTANCE MEASUREMENT<br />

Axial resoluton (10)<br />

Accuracy (11)<br />

[nm]<br />

[nm]<br />

10<br />

90<br />

250<br />

600<br />

400<br />

800<br />

450<br />

900<br />

1500<br />

3000<br />

4000<br />

40000<br />

Min. measurable thickness (15) [µm] 25 200 300 425 1570 2500<br />

(1) The measuring range depends on the controller model. The numerical values in this table are nominal values for a CCS Prima controller.<br />

(2) The working distance depends on the controller model. The numerical values given in this table are typical values for a CCS-Prima controller.<br />

(3) The max measurable slope angle applies to specular (mirror-like) surfaces only. For scattering surfaces the maximal slope angle is higher (up to 87° for perfect diffusers); however<br />

the intensity of the collected signal decreases with increasing slope angle. The values given in this table were measured on a mirror at a rate of 100 Hz, with no averaging.<br />

(4) The reference plate is a glass window that can be either located inside the optcal pen, or fixed on the same surface.<br />

(5) For “axial” optcal pens the measuring range is parallel to the mechanical axis of the pen.<br />

For “radial” optcal pens the measuring range is normal to the mechanical axis, allowing to measure inside holes.<br />

(6) The lateral resoluton is defined as half the spot diameter.<br />

(7) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this table are<br />

typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a model with low photometric efficiency in order to avoid<br />

saturaton. For measuring diffusive or low-reflectng samples, select a model with high photometric efficiency in order to avoid a poor signal-to-noise rato.<br />

(8) Length and weight excluding the fiber optcs cable. The values given here are for the “axial” model.<br />

(9) The performances given in this table were measured for a CCS Prima controller.<br />

(10) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the center of the measuring<br />

range. Two values are given, with internal averaging set to 1 and to 10, respectvely. This parameter is measured immediately after distance calibraton and is specified on the<br />

calibraton certficate which is delivered with each sensor.<br />

(11) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a 1-nm<br />

accurate encoder. This parameter is measured with the following settings: “Auto-adaptve LED” mode, optmal rate, slope angle=0°, internal averaging = measuring rate/10.<br />

This parameter is measured immediately after distance calibraton and is specified on the calibraton certficate which is delivered with each sensor.<br />

(12) R = Recommended for measuring rough metallic samples (these samples can be measured with full performances)<br />

NR = Not recommended for measuring rough metallic samples (these samples may be measured, but with reduced performances)<br />

(13) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical.<br />

(14) Performances in thickness mode, and in partcular the accuracy of thickness measurement, depend on the characteristcs of the sample as well as on a procedure of “Thickness<br />

calibraton” that should be performed by the user. For more informaton contact us.<br />

(15) Typical values measured at the center of the measuring range at optmal rate, with no averaging.<br />

These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be divided by 1.5)<br />

N.B. : the values are subject to change without notce.<br />

E1204<br />

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Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

Miniature optical pens (ENDO Line)<br />

SENSORS<br />

3D SYSTEMS<br />

<strong>STIL</strong> introduce ENDO, a new line of confocal chromatc pens providing an amazing tny size.<br />

The ENDO optcal pens are ideal for non-contact measurements applicaton in reduced space environnements.<br />

These miniature pens are very useful fot the measurement of holes or cavites with small diameter.<br />

Thanks to their small size (6 mm diameter), their integraton in inspecton machines in the producton line is made easier.<br />

SPECTRO<br />

COLORIMETERS<br />

Working with any <strong>STIL</strong> optoelectronic controllers, the ENDO series allow performing a precise measurement with submicron resoluton.<br />

GONIO<br />

PHOTOMETERS<br />

Axial measuring directon configuraton<br />

20<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

Miniature Series<br />

Model ENDO0.1 ENDO0.3/90 ENDO1.2 ENDO1.2/90 ENDO1.5 ENDO1.5/90<br />

Nominal measuring range (1) [µm] 100 300 1200 1200 1500 1500<br />

Working distance [mm] 1.1 0.8 2.3 0.4 2.1 0.5<br />

Minimum radius measurable (2) [mm] - 3.8 - 3.4 - 3.5<br />

Axial resoluton in distance mode [µm] 0.02 * 0.1 0.15 0.1 *<br />

Axial accuracy in distance mode [µm] 0.05 * 0.2 0.25 0.2 *<br />

Max object slope (3) [deg] +/-24° +/-10° +/- 13° +/- 11° +/- 13° +/- 10°<br />

Spot size diameter [µm] 6.2 6 15 15 7.1 20<br />

Lateral resoluton [µm] 3.1 3 7.5 7.5 3.5 10<br />

Length (4) [mm] 58.9 69.8 75.2 82 100.6 90<br />

Weight (4) [g] 10 * 10 10 12 12<br />

Mechanical diameter [mm] 6 6 6 6 6 6<br />

Measuring directon - Axial Radial Axial Radial Axial Radial<br />

(1) The precise values of the measuring range, the resoluton and the working distance depend on the controller type. The values in these tables are for the<br />

CCS PRIMA controller.<br />

(2) The minimum radius measurable is the distance from the axial axis to the beginning of the measuring range for radial configuraton.<br />

(3) The values in these tables are for specular samples, for diffusive samples, the maximum slope can be much higher. The values are theoretcal.<br />

(4) The length and weight do not include the optcal fiber.<br />

(*) These parameters will be soon available, contact us.<br />

Radial measuring directon configuraton (zoom)<br />

N.B. : the values are subject to change without notce.<br />

E1204<br />

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GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Introducing Spectral Confocal Interferometry technology<br />

The measurement accuracy in non contact profilometric techniques is generally limited by mechanical vibratons and by positonal<br />

inaccuracies of the micro-scanning table. In order to free the measurement from these environnemental perturbatons, <strong>STIL</strong> has<br />

developed a new vibraton insensitve interferometric method. With this new type of interferometric system, the potental subnanometric<br />

accuracy of interferometric microscopy is effectve.<br />

Moreover this new sensor can be used for measuring transparent films that are too thin to allow the “Chromatc Confocal” technique<br />

to be used. The minimum measurable thickness is 0.4 µm.<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

Confocal Spectral Interferometry principle<br />

The <strong>STIL</strong> interferometric method is based on Spectroscopic Analysis of White Light Interferograms (SAWLI). It consists in analysing<br />

the interference signal observed on a spectrometer in order to measure the air gap thickness between the reference plate and the<br />

sample. The originality of the developed system lies in the fixaton of the reference plate on the inspected object. As reference<br />

plate and sample are fixed together, the mechanical vibratons do not affect the measurements.<br />

The interferometric signal is a channelled spectrum. From this signal, the spectral phase is calculated using a numerical seven<br />

points phase shifting algorithm allowing the measurement of the local height of the analyzed surface with a subnanometric<br />

resoluton.<br />

22<br />

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SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

The <strong>STIL</strong> DUO controller line<br />

The new sensor <strong>STIL</strong> DUO double technology, a new standard in the world of dimensional measurement.<br />

The sensor <strong>STIL</strong> DUO is the first system in the world that offers two simultaneous measurement technologies: the Confocal<br />

Chromatc and the White Light Spectral Interferometry with an original confocal setup.<br />

By associatng these two technologies (two <strong>STIL</strong> processes) the sensor <strong>STIL</strong> DUO creates a new standard in the world of dimensional<br />

measurement because it allows the user to get the very best out of these two operatng principles:<br />

- <strong>STIL</strong>’s Confocal Chromatc principle makes it possible to work with a large measurement scale going from 130 µm<br />

to 42 mm. This characteristc is perfect for rugosity and surface topography measurements, which give very high<br />

precision results on any type of material, be it reflectve or diffusing. The measurement is in compliance with the<br />

new ISO 25178 standard.<br />

- <strong>STIL</strong>’s Confocal Spectral Interferometry process gives access to sub-nanometric resolutons (


GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Advantages<br />

- Vibraton insensitve (OPILB-RP optcal pen),<br />

- High signal to noise rato (OPILB-RP optcal pen),<br />

- No vertcal scanning required,<br />

- Minimum measurable thickness 0.4 µm,<br />

- Subnanometric resoluton inherent to the optcal principle,<br />

- No cross talk between neighbouring points, thanks to confocality,<br />

- Exceptonnal performances in thickness measurement (0.3 nm resoluton, 10 nm accuracy)<br />

Configurations<br />

The sensor consists of:<br />

- A <strong>STIL</strong> DUO controller,<br />

- One or more interference optcal pen(s),<br />

- One or more chromatc confocal optcal pen(s) (optonal),<br />

- a fiber optc cable for each optcal pen.<br />

3D SYSTEMS<br />

<strong>STIL</strong>-DUO controller: technical specifications<br />

DUO<br />

Measuring frequency<br />

up to 2000 Hz<br />

Wavelength range<br />

400-900 nm<br />

Spectral resoluton<br />

0.6 nm / pixel<br />

SPECTRO<br />

COLORIMETERS<br />

Light Source<br />

Digital outputs<br />

Synchronizaton I/O<br />

Optcal fiber connectors<br />

Humidity limits<br />

Temperature in use<br />

Dimensions<br />

Weigth<br />

Measuring mode:<br />

Distance/Thickness<br />

Tungsten halogen lamp and White LED<br />

Ethernet / RS232<br />

1 input (TTL) / 1 output (TTL)<br />

E2000<br />

5%-80% HR without condensaton<br />

5 - 50° C<br />

376mm x 363mm x 114mm<br />

6 Kg<br />

1- Confocal Chromatc<br />

2- Confocal spectral Interferometry<br />

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SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

Interferometric optical pens (OPILB line)<br />

OPILB Line<br />

Model OPILB-RP OPILB-LWD-D OPILB-LWD-T OPILB<br />

Measuring mode - Distance Distance Thickness Thickness<br />

Measuring range [µm] 135 135 - -<br />

Working distance [mm] 5.3 5.3 5.3 42<br />

Max. object slope [deg] +/- 7° +/- 7° +/- 7° +/- 7°<br />

Reference plate (1) - Yes No No No<br />

Magnifier model MG210 MG140 MG210 MG140 MG70 MG35 MG20 -<br />

LATERAL (XY) PROPERTIES<br />

Spot size (diameter)<br />

Lateral resoluton (2)<br />

[µm]<br />

[µm]<br />

3.8<br />

1.9<br />

5.6<br />

2.8<br />

3.8<br />

1.9<br />

5.6<br />

2.8<br />

11.4<br />

5.7<br />

22.8<br />

11.4<br />

40<br />

20<br />

40<br />

20<br />

MECHANICAL INTERFACE<br />

Length (4)<br />

Diameter (4)<br />

Weight<br />

[mm]<br />

[mm]<br />

[g]<br />

200<br />

27<br />

200<br />

164<br />

27<br />

127<br />

200<br />

27<br />

200<br />

164<br />

27<br />

127<br />

131<br />

27<br />

126<br />

100<br />

27<br />

67<br />

84<br />

27<br />

52<br />

145.5<br />

27<br />

155<br />

Performances<br />

DISTANCE MEASUREMENT<br />

Axial resoluton (5)<br />

Accuracy (6)<br />

Measuring rough metal surface (7)<br />

[nm]<br />

[nm]<br />

-<br />

0.5<br />

10<br />

NR<br />

2<br />

10<br />

NR<br />

- -<br />

ROUGHNESS MEASUREMENT<br />

Min. measurable Ra (8) [nm] 0.5 3 - -<br />

THICKNESS MEASUREMENT<br />

Min. measurable thickness (9)<br />

Max. measurable thickness (9)<br />

Axial resoluton (5)<br />

Accuracy (6)<br />

[µm]<br />

[µm]<br />

[nm]<br />

[nm]<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

-<br />

0.4<br />

90<br />

0.3<br />

10<br />

0.4<br />

90<br />

0.3<br />

10<br />

0.4<br />

90<br />

0.3<br />

10<br />

0.4<br />

90<br />

0.3<br />

10<br />

(1) The reference plate is placed directly on the sample. The reference plate of the OPILB-RP acts as an absolute reference. It compensates for the mechanical imperfectons<br />

of the scanning system.<br />

(2) The lateral resoluton is defined as half the spot diameter.<br />

(3) The photometric efficiency is the amount of energy collected by different optcal pens when measuring the same sample, in relatve units. The numerical values in this<br />

table are typical, they are given only as a guide for selectng the magnifier model: For measuring a highly-reflectng sample, select a magnifier model with low photometric<br />

efficiency in order to avoid saturaton. For measuring diffusive or low-reflectng samples, select a magnifier with high photometric efficiency in order to avoid a poor<br />

signal-to-noise rato.<br />

(4) Length and weight excluding the fiber optcs cable.<br />

(5) Axial resoluton is defined as the RMS noise level measured on a statc sample. Measurement is performed at optmal rate on a sample located at the optmal poston.<br />

(6) The accuracy is the max error observed in the entre measuring range when comparing the distance measured by the sensor with sample positon determined by a<br />

1-nm accurate encoder.<br />

(7) R = Recommended for measuring metallic samples (these samples can be measured with full performances)<br />

NR = Not recommended for measuring metallic samples (these samples may be measured, but with reduced performances)<br />

(8) The precise value of the min measurable Ra depends on the characteristcs of the sample. The values given in the table are typical.<br />

(9) These values are for a sample with a refractve index = 1.5 (When measuring the thickness of an air-gap they should be multplied by 1.5)<br />

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Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Fiber optic cables<br />

E2000 «push/pull» connector<br />

Model Length Core Ø Ø max Sheath Connector type<br />

E50-3 3 m 50/125 µm 2.8 mm Standard E2000<br />

E50-5 5 m 50/125 µm 2.8 mm Standard E2000<br />

E50-10 10 m 50/125 µm 2.8 mm Standard E2000<br />

E20-2 2 m 10/20 µm 1.9 mm Standard E2000<br />

E50-3-M 3 m 50/125 µm 5 mm Metal armored E2000<br />

E50-5-M 5 m 50/125 µm 5 mm Metal armored E2000<br />

E50-10-M 10 m 50/125 µm 5 mm Metal armored E2000<br />

E50-20-M 20 m 50/125 µm 5 mm Metal armored E2000<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

Standard E2000 connector optcal fiber<br />

Metallic armored E2000 connector optcal fiber<br />

FC/APC connector<br />

Model Length Core Ø Ø max Sheath Connector type<br />

F50-3 3 m 50/125 µm 2.8 mm Standard FC/APC<br />

F50-4 4 m 50/125 µm 2.8 mm Standard FC/APC<br />

F50-10 10 m 50/125 µm 2.8 mm Standard FC/APC<br />

F20-2 2 m 10/20 µm 1.9 mm Standard FC/APC<br />

F50-3-M 3 m 50/125 µm 5 mm Metal armored FC/APC<br />

F50-4-M 4 m 50/125 µm 5 mm Metal armored FC/APC<br />

F50-10-M 10 m 50/125 µm 5 mm Metal armored FC/APC<br />

F20-4-M 4 m 10/20 µm 5 mm Metal armored FC/APC<br />

F20-10-M 10 m 10/20 µm 5 mm Metal armored FC/APC<br />

F50-5-M 5 m 10/20 µm 5 mm Metal armored FC/APC<br />

F50-10-M 10 m 10/20 µm 5 mm Metal armored FC/APC<br />

GONIO<br />

PHOTOMETERS<br />

Standard FC/APC connector optcal fiber<br />

Metallic armored FC/APC connector optcal fiber<br />

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SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

Accessories<br />

Mechanical accessories<br />

Model<br />

ST3<br />

DT3x3<br />

Description<br />

Single turreti<br />

Mechanical assembly allowing to combine one magnifier with three different chromatc lenses.<br />

Double turreti<br />

Mechanical assembly allowing to combine three magnifiers with three different chromatc lenses.<br />

The new concept of Modular Optcal Pen (consistng of the combinaton of a<br />

chromatc objectve and an achromatc magnifier) offers the major opportunity<br />

to design a more flexible combinaton : the MULTIPEN which can be available in<br />

two different configuratons : ST and DT.<br />

Based on a microscope turret, the MULTIPEN ST consists of the combinaton of<br />

one achromatc magnifier with three different chromatc lenses, thus offering<br />

three different depths of field in one single mechanical assembly.<br />

The MULTIPEN DT (for double turret) comprises a second turret equipped with<br />

three different magnifiers, thus offering three different spot sizes for each of<br />

the three chromatc objectves. This corresponds to nine different Modular<br />

Optcal Pens in one single mechanical assembly.<br />

Light source and exchange bulbs<br />

Model<br />

XS300<br />

LED300<br />

LED100<br />

XE-300<br />

HL50W<br />

Description<br />

300 Watts Xenon Arc Generatori<br />

External light source for CCS and CHR controllers<br />

Multchannel illuminator: 18 LEDS (5W, white light) including a bundle of fibers, lightng area:<br />

11 mm x 0.2 mm. External light source for MPLS and vision system.<br />

Multuichannel illuminator: 9 LEDS (5W, white light) including a bundle of fibers, lightng area:<br />

4.8 mm x 0.2 mm. External light source for MPLS and vision system.<br />

300 W exchange Xenon Arc bulb<br />

Pack of 5 exchange Halogen lamps of 50 W (for CHR150 controllers)<br />

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GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

XS300 Light source<br />

SENSORS<br />

3D SYSTEMS<br />

LED300 Light source<br />

SPECTRO<br />

COLORIMETERS<br />

Measurement standards<br />

Model<br />

Description<br />

GS10 10 µm depth groove (non calibrated, optonal DKD calibraton certficate)<br />

RS08 Roughness standard, Ra~0.8µm (optonal DKD calibraton certficate)<br />

FS140 140 mm diameter optical flat (ZERODUR uncoated)<br />

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SELECTION<br />

GUIDE<br />

SENSORS 3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Non-contact «point» sensors<br />

Softwares<br />

Model<br />

Description<br />

CCSMAN CCS Manager software<br />

CHRMON CHR Monitor software<br />

CHRSET CHR Setup Software<br />

<strong>STIL</strong>DLL <strong>STIL</strong>DLL (Dynamic Link Library) for CHR 150 and CCS controllers<br />

OPTMIMAX Min/Max software for CHR 150<br />

OPTLVDT LVDT-type output for CHR 150<br />

DLL for <strong>STIL</strong> point sensors:<br />

The “<strong>STIL</strong>DLL” provides a powerful high-level software development toolkit enabling an easy interfacing of <strong>STIL</strong>’s sensors to<br />

custom applicatons.<br />

It may be used with all <strong>STIL</strong> point sensors<br />

DLL Compatbility<br />

- ANSI-C programs<br />

- Microsoft Visual C++ Tm (versions 6, 2005, 2010)<br />

- .NET (framework 3.5) languages<br />

The main features of the DLL are:<br />

- Initalize and connect to the sensor through RS232, Ethernet or USB2;<br />

- Get/Set the sensor settings, e.g.:<br />

• Sampling rate,<br />

• Measuring mode (Distance/Thickness),<br />

• Optcal pen selecton,<br />

• Digital output settings (data selecton, ascii/binary mode, baud rate...)<br />

• Analog output settings (data selecton, scaling of the data on the 0-5V range),<br />

- Measure the sensor «Dark» signal,<br />

- Enable/disable hardware trigger mode,<br />

- Launch measurement with other processes,<br />

- Synchronize the measurement with other processes,<br />

- Get the sensor status and the «last error» parameter.<br />

The “<strong>STIL</strong>DLL” is delivered with a detailed User Manual and a large number of code samples.<br />

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SPECTRO<br />

COLORIMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

CHR Setup Software<br />

CHR Setup is a useful software utlity to configure the CCS and the CHR sensors, to display and save the measured data.<br />

The CHR Setup Software offers a full palette of advanced features, including real<br />

tme visualizaton of the signals delivered by the sensor on-board spectrometer.<br />

The user-friendly interface enables the operator to view and to modify all the<br />

sensor’s settings:<br />

SENSORS<br />

- Acquisiton rate and temporal averaging,<br />

- Optcal pen selecton,<br />

- Measuring mode (distance or thickness measurement),<br />

- Digital output configuraton,<br />

- Analog output configuraton.<br />

These signals may be captured, saved and compared with reference signals.<br />

This feature is very useful for adjustng the positon of the optcal pen relatvely to the sample, or for analyzing the sensor<br />

performance in partcularly difficult measuring conditons ( very low signal to noise rato, sample located at the very end of the<br />

measuring range, measuring the thickness of thin layers,…).<br />

3D SYSTEMS<br />

This interface comprises a dedicated Command Terminal allowing to send ASCII commands to the sensor and to view its response.<br />

Example: by typing in “$TRG”, the operator may implement and test the triggered operaton mode.<br />

Thanks to this software, measurements may be easily configured (sensor rate, number of points to measure, trigger mode) and<br />

launched. The operator may select the data for display: Distance, Thickness, Intensity… This data is displayed in real tme in the<br />

graphic window. Moreover, it may be saved on the hard disk or sent to the printer.<br />

At the end of the measurement, statstcal informaton (minimum, maximum, average, standard deviaton) is automatcally<br />

displayed.<br />

This utlity facilitates maintenance tasks, by a single mouse click the operator may interrogate the sensor for its serial number<br />

or send a new firmware version.<br />

GONIO<br />

PHOTOMETERS<br />

Minimal computer configuraton<br />

Windows XP TM<br />

512 MB RAM, 1 GHz<br />

RS232, Ethernet or USB port (depending on the sensor type)<br />

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COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

CHR Monitor Software<br />

The CHR Monitor software allows to display, to print and to save the signal delivered by CHR sensors.<br />

A simple mouse click offers the possibility to:<br />

- Launch the Dark Signal acquisiton;<br />

- Select:<br />

• The optcal pen connected to the CHR sensor,<br />

• The parameters to be displayed (alttude, intensity…),<br />

• The Acquisiton and sampling rates,<br />

• The temporal averaging factor.<br />

Available operatng modes<br />

Contnuous visualizaton<br />

Acquisiton (N measurements) at a constant sampling rate<br />

Acquisiton in CMM mode (alttude statement)<br />

Licence<br />

The program requires a “dongle” (hardware) to be installed on the parallel port. A printer or any other parallel port device<br />

may stll be connected to the parallel port through the “dongle”.<br />

Minimal computer configuraton<br />

Windows 2000 / NT<br />

256 MB RAM, 1 GHz<br />

Serial port<br />

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SPECTRO<br />

COLORIMETERS<br />

Non-contact «point» sensors<br />

SELECTION<br />

GUIDE<br />

CCS Manager Software<br />

The CCS Manager software is a powerful software which allows to start measuring with your new CCS-Prima sensor, <strong>STIL</strong>-Inital<br />

or <strong>STIL</strong>-Duo in minutes.<br />

Thanks to its very user-frendly interface, the CCS Manager software<br />

is the simplest way to get accurate measurements from the sensor<br />

and to have a full control over all the settings of your CCS sensor.<br />

Moreover, CCS Manager provides advanced maintenance functons :<br />

SENSORS<br />

- Update of the sensor’s firmware to take advantage of the latest<br />

enhancements and the new functons developped by <strong>STIL</strong>’s engineers.<br />

- In situ calibraton of your controller.<br />

- Download to the sensor’s memory of additonal calibraton tables<br />

allowing to use more optcal pens with your CCS controller.<br />

- Unique «Diagnostcs» functon, allowing to record the current status of the sensor into a file, which can be directly sent<br />

by email to <strong>STIL</strong>’s Applicaton and Support department. Thanks to these detailed informaton, our engineers are able to<br />

give help and advice in minutes, even if the product is used thousands of kilometers away from our premises.<br />

GONIO<br />

PHOTOMETERS<br />

3D SYSTEMS<br />

Minimal computer configuraton<br />

Window XP TM ,Windows 7 TM -32 bits, 7 TM -64 bits<br />

512 MB RAM, 1 GHz<br />

RS232 or USB port (depending on the sensor type)<br />

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SELECTION<br />

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SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «point» sensors<br />

3D measurement examples: chromatic confocal technology<br />

Human Skin measurement<br />

Surface microtopography of a TF insert<br />

3D measurement examples: confocal spectral interferometry<br />

Commercial gratng<br />

Solar cells<br />

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Non-contact «line» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

MPLS180 «line» sensors<br />

The MPLS180 is the first «line» chromatc confocal sensor in the world.<br />

It pushes one step forward the amazing non-contact sensing technology<br />

based on <strong>STIL</strong>’s patented confocal chromatc imaging.<br />

The MPLS180 offers an ultra-high measuring frequency of up to 1800<br />

lines per second (each line being made of 180 discrete points) providing<br />

up to 324 000 measured points per second.<br />

This outstanding performance is the result of a high level of technological<br />

integraton, made possible thanks to <strong>STIL</strong>’s know-how design and<br />

advanced manufacturing processes.<br />

The MPLS180 sensor has received the «Silver Photon» Innovaton Award<br />

at the Opto 2008 fair in Paris.<br />

3D SYSTEMS<br />

MPLS180 optical principle<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Each of the 180 white light source pinholes is imaged through a common<br />

chromatc objectve, into a contnuum of monochromatc images<br />

along the optcal axis, thus providing a series of «color coded»<br />

optcal axes.<br />

When an object is placed in these colored fields, a unique wavelength<br />

is perfectly focused at its surface for each point, and then<br />

efficiently reflected into the objectve. These monochromatc light<br />

beams go through a series of filtering pinholes into an array of spectrographs.<br />

The analysis of the wavelengths that have passed through the filtering<br />

pinholes allow for each point to accurately determine its positon<br />

in the measuring field.<br />

The MPLS180 sensor then provides instant profile measurements,<br />

each profile being made of 180 points simultaneously acquired.<br />

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SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «line» sensors<br />

Basic sensor constitution<br />

The MPLS180 Chromatic Confocal sensor comprises:<br />

- An Optoelectronic controller including the light source, the spectrographs arrays, the acquisiton and processing<br />

electronic unit,<br />

- An optical fiber bundle linking the controller with the optcal head,<br />

- A Chromatic Confocal Optical head generatng the Mult-Point Line.<br />

Optionally, it can be equipped with a scanning mirror to generate a full field measurement.<br />

MPLS 180 sensors with a scanning mirror opton.<br />

Optoelectronic controller : technical specifications<br />

Model<br />

MPLS180<br />

Number of measured points along the line 180<br />

Maximum measuring rate 1.800 lines per second x 180 points per line = 324.000 measured points per second<br />

Data transmission<br />

USB 2.0 link<br />

Software package<br />

Dedicated DLL for Windows XP SP2<br />

Measurement Synchronizaton<br />

Input and output TTL trigger signals<br />

Power supply<br />

Consumpton<br />

Optonal field scanning functon<br />

Field scan duraton<br />

Mechanical interface<br />

100 - 240 Vac<br />

100W with standard LED light source / 150W with optonal 12V/50W halogen bulbs<br />

180 x 230 points acquired per field<br />

0.13 second (at a line frequency of 1800 lines/sec)<br />

Table top controller<br />

Advantages<br />

- Ultra fast non-contact measurement<br />

- Confocal chromatc sensor<br />

- High accuracy measurements<br />

- Passive optcal head<br />

- Works on any kind of material<br />

- Insensitve to ambient lightng<br />

- Perfect for online inspecton<br />

- Scanning mirror (optonal) for direct 3D acquisitons<br />

- Easy interfacing thanks to the DLL toolkit<br />

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Non-contact «line» sensors<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Optical heads<br />

Model Wavy Cobra DeepView Microview<br />

Line length (x axis) mm 44.75 14 4 1.8<br />

Number of points along the line - 180 180 180 180<br />

Spot size diameter (for each point) µm 41 38 15 4.8<br />

Pitch (distance between 2 points) µm 250 78 22 10<br />

Maximum slope angle deg 11 6.5 20 30<br />

Working distance mm 40 1 46 10<br />

Measuring range mm 1.6 15 5 0.5<br />

Axial resolution µm 0.5 2.5 1.5 0.125<br />

Accuracy µm 2.5 8 5 0.5<br />

Field scanning (x,y)<br />

mm<br />

44.75 x 45.8<br />

(optonal)<br />

14 x 17<br />

(standard)<br />

-<br />

1.8 x 1.8<br />

(optonal)<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

MICROVIEW<br />

(x,z) = 1.8x0.5 mm 2<br />

DEEPVIEW<br />

(x,z) = 4x5 mm 2<br />

GONIO<br />

PHOTOMETERS<br />

COBRA<br />

(x,y,z) = 14x17x15 mm 3<br />

WAVY<br />

(x,z) = 44.75x1.6 mm 2<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact «line» sensors<br />

Measurement examples<br />

Warpage measurement of Printed Circuit Board (measured with WAVY optcal head)<br />

3D view<br />

Alttude measurement<br />

Dental measurements (measured with COBRA optcal head)<br />

3D views<br />

Mechanical measurements (measured with MICROVIEW optcal head)<br />

Alttude measurement<br />

3D view<br />

E1204<br />

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Non-contact 3D Measurement Systems<br />

SELECTION<br />

SENSORS<br />

GUIDE<br />

3D SENSORS SYSTEMS<br />

MICROMESURE 2 Systems<br />

The MICROMESURE 2 system, equipped with CCS-Prima, CHR or <strong>STIL</strong>-DUO Confocal<br />

or Chromatc CHR150 Sensors sensors is the ideal tool for non contact surface measurement,<br />

including 3D roughness, shape metrology and 3D microtopography.<br />

Designed BY the Confocal Chromatc Sensor creators, FOR the Confocal<br />

Chromatc Sensor use, the MICROMESURE 2 system fully exploits<br />

The MICROMESURE 2 system fully exploits the extraordinary performances<br />

of <strong>STIL</strong>’s non contact sensors in various applicatons and<br />

the extraordinary performances of <strong>STIL</strong>’s non contact sensors in various<br />

applicatons and fields.<br />

fields.<br />

Delivered with all the necessary control & acquisiton hardware and<br />

software, the MICROMESURE 2 system is a «turn key» device that is<br />

immediately operatonal after its installaton.<br />

Advantages<br />

SPECTRO<br />

3D SYSTEMS<br />

COLORIMETERS<br />

Due to Confocal Chromatic sensors<br />

- Non contact dimensional measurement<br />

- Nanometric and Micrometric resolutons<br />

- White light sensor (no speckle, wide measuring range)<br />

- Coaxial measurement (no shadowing)<br />

- High local slopes on specular (reflectve) surfaces<br />

- Insensitve to ambient light<br />

- Insensitve to object’s reflectvity: allows working on any<br />

type of surface<br />

- Thickness & Form Measurement of transparent objects<br />

- Wide measuring ranges capabilites (from 20 µm to 24 mm)<br />

Due to high quality scanning system<br />

- Point scanning system allows to define scans dimensions and<br />

resoluton without hardware constraints<br />

- Real metrology on each measured points thanks to linear<br />

encoders<br />

- Flatness and orthogonality correctons<br />

- Equipped with double turret<br />

- User friendly Software<br />

- Modular design (1, 2 or 3 axes) to adapt the configuraton to<br />

the exact needs of the user<br />

OPTICAL GONIO<br />

PHOTOMETERS<br />

COMPONENTS<br />

SPECTRO GONIO<br />

COLORIMETERS<br />

PHOTOMETERS<br />

38 44<br />

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E1204 E1104


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact 3D Measurement Systems<br />

Applications<br />

- Shape and texture analysis<br />

- Fine mechanics inspecton<br />

- Surface characterizaton<br />

- 3D alttude and thickness topography / profilometry<br />

- Roughness measurement<br />

- Dimensional metrology<br />

Industrial and Research Laboratories Fields<br />

- Mechanics (roughness, tribology, 3D metrology, corrosion analysis …)<br />

- Glass industry (float glass on line thickness control, 3D metrology …)<br />

- Microelectronics (roughness, 3D metrology, defects analysis …)<br />

- Optcs (roughness, 3D metrology...)<br />

- Cosmetcs (tribology, 3D metrology …)<br />

- Road & tres (tribology, 3D metrology …)<br />

- Nuclear fuel industry (roughness, tribology, 3D metrology, corrosion analysis …)<br />

- Textle (3D metrology, thickness topography …)<br />

Options & Accessories<br />

- Linear encoders on X & Y axes<br />

- Video Camera<br />

- Double turret<br />

- Vibraton damping stand<br />

- Metrology artfacts:<br />

• Calibrated groove (depth 10 µm)<br />

• Roughness standard (Ra=0.8µm)<br />

• Optcal flat (140 mm diameter)<br />

• Offset setting retcle<br />

- Post processing software: SPIP from Image Metrology<br />

Technical specifications<br />

Scanning system Specifications<br />

Translations Units X Axis Y Axis Z Axis Remarks<br />

Travel mm 100 100 50 Up to 300mm on request<br />

Positioning accuracy (max) µm/100mm 10 10 - without encoder<br />

Positioning accuracy (max) µm/100mm 1 1 1 with encoder<br />

Positioning resolution µm 0.1 0.1 0.1<br />

Flatness (with correction) µm/100mm 1 1 -<br />

Maximum speed mm/s 20 20 5<br />

E1204<br />

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Non-contact 3D Measurement Systems<br />

SELECTION<br />

GUIDE<br />

Optoelectronic Controllers Specifications<br />

The MICROMESURE2 system can be used with almost any of the <strong>STIL</strong> point sensors<br />

controllers:<br />

For detailed specificatons about controllers, refer to the following pages:<br />

SENSORS<br />

- CCS-PRIMA........Page 16<br />

- CHR150..............Page 16<br />

- <strong>STIL</strong>-DUO...........Page 24<br />

Optical Pens Specifications<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

The MICROMESURE2 system can accept all the range of <strong>STIL</strong>’s confocal<br />

chromatc and white light interferometry optcal pens :<br />

For detailed specificatons about single point optcal pens, refer to the<br />

following pages:<br />

- CL-MG series....... Page 18<br />

- OP series............. Page 19<br />

- ENDO series.........Page 21<br />

- OPILB series.........Page 25<br />

GONIO<br />

PHOTOMETERS<br />

Video Camera Specifications<br />

Video Camera (Optional) Units VCX50 VCX250<br />

Type - Color CCD<br />

Resolution [pixels] - 752 x 582<br />

Gain - Automatc<br />

Field of view mm² 5.2 x 4.1 1 x 0.8<br />

Pixel size on object µm² 7 x 7 1.4 x 1.4<br />

Lighting - 4 quadrants LED<br />

40<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact 3D Measurement Systems<br />

Control and Acquisition Software Functions<br />

SurfaceMap Control & Acquisition Software<br />

Main Functions<br />

Profile Scanning (X, Y, Oblique)<br />

Surface Scanning<br />

Points series acquisiton<br />

Type of acquisition<br />

Repettve Measurements<br />

Mult acquisiton sequence<br />

Video image (if camera opton)<br />

Dimensions<br />

Scanning parameters setting<br />

Step along each axis<br />

Alttude Mode<br />

Thickness Mode<br />

Sensor parameters setting<br />

Optcal pen choice<br />

Averaging<br />

Double frequency (if available)<br />

Constant speed (with backlash compensaton)<br />

Constant speed (back & forth)<br />

Scanning type<br />

Step by step<br />

Z following<br />

Folder selecton<br />

Data saving<br />

Format selecton (binary, csv)<br />

Measurement Progress<br />

User’s Supervision<br />

X, Y & Z Coordinates<br />

Sensor Status<br />

Hardware homing<br />

Leveling<br />

Automatic Procedures<br />

Autofocus<br />

Recentering<br />

Preview<br />

E1204<br />

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Non-contact 3D Measurement Systems<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Post Processing Software Functions<br />

Basic Module<br />

SPIP Post processing<br />

Main Functons<br />

4 modules<br />

Version<br />

8 modules<br />

Version<br />

Plane correcton / Flattening yes yes<br />

Cross secton & Profiling yes yes<br />

Alttude Histogram yes yes<br />

Fourier Transform yes yes<br />

Correlaton functons yes yes<br />

Image Substracton & Additon yes yes<br />

Color coding yes yes<br />

Zoom yes yes<br />

Transformaton : Mirrors, rotatons yes yes<br />

Plug-in interface yes yes<br />

Copy, print & save functons yes yes<br />

Roughness Analysis (ISO 25178 + ANSI B46.1) yes yes<br />

3D Visualization Studio yes yes<br />

Filter Module yes yes<br />

Extended Fourier Analysis<br />

Grain Analysis<br />

Batch processing<br />

ImageMet Explorer<br />

Scanning Probe Image Processor SPIP<br />

Image Metrology was founded as a world-wide leading supplier of software for nano and microscale image processing.<br />

Over the years, the Scanning Probe Image Processor, SPIP, has become the de-facto standard for image processing at<br />

nanoscale.<br />

SPIP provides customers with state-ofthe-art<br />

image processing software for<br />

microscopy, including:<br />

• Correcton tools for creatng the most<br />

accurate presentaton of the “true” surface,<br />

• Automated analysis techniques ensuring<br />

high accuracy, quality and cost efficiency,<br />

• Visualizaton and reportng tools enabling<br />

convincing and impressive communicaton<br />

of results.<br />

yes<br />

yes<br />

yes<br />

yes<br />

42<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact 3D Measurement Systems<br />

Measurement examples<br />

Porosity in brake lining material<br />

3D view<br />

Color filters for LCD display panels<br />

3D view<br />

Tribology – metallic part wearing test<br />

3D view<br />

Laser impacts on a metal plate<br />

Height measurement<br />

E1204<br />

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Non-contact Spectrocolorimeter<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

Introducing Colorimetry<br />

Color only exists through the combinaton of three elements: a light source, an object and an observer. Color becomes a subjectve<br />

sensaton, which can be described with a color name. The Internatonal Commission on Illuminaton defined some standards<br />

allowing us to quantfy colors. In consequence, colorimetric spaces are defined for different pairs of illuminant/observer and the<br />

color is identfied by three coordinates, for example CIELAB, CIELUV…<br />

Two categories of instrument are used for characterizing the color of an object: the colorimeters and the spectrocolorimeters. A<br />

colorimeter is a very simple system proposing a series of colored filters in order to simulate the normalized curves of a standard<br />

observer. The measurement is not very accurate and it does not allow users to detect differences that are invisible for some illuminants<br />

and visible for others (metameric colors). In contrast, a spectrocolorimeter includes a dispersive component (gratng,<br />

prism) allowing the measurement of the light reflected by the object in a much more precise manner, for the whole range of visible<br />

wavelengths.<br />

RUBY spectrocolorimeter<br />

RUBY is a perfect soluton for real tme measurement of color. The fast detecton of color<br />

drifts and servo-controlling producton tools possibilites allow a cost reducton for a low<br />

level of investment.<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

• High acquisiton speed,<br />

• Non contact measurement,<br />

• Synchronizaton with custom machines,<br />

• Stand-alone use.<br />

In additon to color monitoring, different kinds of applicaton are available:<br />

Whiteness measurement, formulaton, counter-typing, characterizaton<br />

of the effects of materials and light stability measurement (artficial<br />

or natural ageing).<br />

Applications<br />

Spectroscopic and colorimetric measurements are used for analyzing: Reflectance of diffusing materials and samples, Intensity<br />

and color of light sources and displays, transmittance of filters and liquids.<br />

Plastc Paper Cosmetcs Paints Inks<br />

GONIO<br />

PHOTOMETERS<br />

Food Drugs Fabrics Wood Ceramics<br />

44<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact Spectrocolorimeter<br />

Advantages<br />

- Real tme measurements for spectroscopy,<br />

- Internal light source,<br />

- Selectable spot size on the sample,<br />

- Long working distance,<br />

- Ergonomic and removable grip,<br />

- Color and irradiance measurements,<br />

- Metameric sample detecton,<br />

- Automatc color sortng,<br />

- Integrated software soluton<br />

- Portable system allowing in situ measurements.<br />

Technical specifications<br />

Power Supply<br />

Consumption<br />

Light Source<br />

RUBY CONTROLLER<br />

85 to 240 V (50 / 60 Hz)<br />

200 Watts<br />

Tungsten halogen lamp<br />

Measuring frequency<br />

Data processing<br />

Analog outputs<br />

Digital outputs<br />

Synchronization I/O<br />

Optical fiber connectors<br />

Wavelength range<br />

Spectral resolution<br />

Humidity limits<br />

Temperature in use<br />

Dimensions<br />

Weight<br />

up to 2000 Hz<br />

Embedded FPGA board<br />

2 outputs 0 - 10V<br />

Ethernet / RS232<br />

1 input (TTL) / 1 output (TTL)<br />

SMA905 and FC/PC<br />

400-800 nm<br />

(other ranges on request)<br />

0.6 nm / pixel<br />

5%-80% HR without condensation<br />

5 - 50° C<br />

376mm x 363mm x 114mm<br />

6 Kg<br />

Optical head<br />

Spot size<br />

RUBY OPTICAL HEAD<br />

1 / 2 / 4 / 7 mm<br />

Working distance<br />

Depth of field<br />

80 mm<br />

10 mm<br />

Fastening thread 1/4’’<br />

Accessories thread<br />

30.5 mm<br />

Accessories<br />

Contact tip, pods<br />

Dimensions 60 mm diam. / 178 mm length<br />

Weight<br />

0.5 Kg<br />

E1204<br />

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Non-contact Spectrocolorimeter<br />

SELECTION<br />

SENSORS<br />

GUIDE<br />

Software<br />

Model<br />

LRM<br />

Descripton<br />

RUBY Manager software<br />

RUBYDLL<br />

DLL (Dynamic Link Library) for RUBY controller<br />

3D SENSORS SYSTEMS<br />

SPECTRO<br />

3D SYSTEMS<br />

COLORIMETERS<br />

SPECTRO GONIO<br />

COLORIMETERS<br />

PHOTOMETERS<br />

DLL for RUBY controllers<br />

The “RUBYDLL” provides a powerful high-level interface enabling user’s-programs written in C/C++ language to communicate<br />

with RUBY controllers.<br />

DLL compatbility<br />

ANSI-C programs<br />

Microsoft Visual C++ TM compilers (6, 7, 8 and .net versions)<br />

Microsoft Visual C++ TM MFC<br />

The main features of the DLL are:<br />

- Initalize and connect to the controller through RS232 or Ethernet;<br />

- Get/Set the sensor settings, e.g:<br />

• Color coordinates,<br />

• Color difference,<br />

• Spectral difference,<br />

• Colorimetry settings (observers, illuminants),<br />

• Spectral sampling,<br />

• Analog output settings,<br />

• Digital output settings,<br />

- Calibrate Black,<br />

- Calibrate White,<br />

- Acquire a target to compare with the current measurement,<br />

- Enable / Disable hardware trigger mode,<br />

- Launch the measurement with other processes,<br />

- Synchronize the measurement,<br />

with other processes,<br />

- Get the controller status and the “last error” parameter,<br />

OPTICAL GONIO<br />

PHOTOMETERS<br />

COMPONENTS<br />

The “RUBYDLL” is delivered with a detailed User Manual and a large number of samples.<br />

46 52<br />

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E1204 E1104


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Non-contact Spectrocolorimeter<br />

RUBY MANAGER Software<br />

Data processing is performed inside the RUBY controller.<br />

A desktop or notebook PC and the RUBY Manager software could complete<br />

the system in order to perform sophistcated measurements and analysis.<br />

RUBY Manager is a powerful sofware which allows you to start measuring<br />

color with your new RUBY controller in minutes.<br />

Thanks to its user-friendly interface, RUBY Manager software is the simplest<br />

way to gain complete control over all the settings of your RUBY controller.<br />

The interface offers two different display modes:<br />

The measurement mode dedicated to color conformity control, and the spectrum mode, dedicated to curve display<br />

and comparison.<br />

All the data is displayed in real tme and allows the visualizaton of the historic of producton process or chemical kinetc<br />

experiment monitoring.<br />

Morever, RUBY manager provides advanced maintenance functons:<br />

- Update of the controller’s firmware to take advantage of the latest enhancements and the new<br />

functon developed by <strong>STIL</strong>’s engineers.<br />

- Unique “Diagnostcs” functon, allowing to record the current status of the controller into a file,<br />

wich can be directly sent by email to <strong>STIL</strong>’s applicaton and support department.<br />

The last version of RUBY Manager includes two new functons:<br />

- Management of a database of reference colors, - Monitoring of the quality of a producton.<br />

The first functon allows the user to create a reference colors library that can be used for the online control of a varied<br />

producton. In spectroscopy applicatons, the comparison with reference spectra enables the possible recogniton of characteristc<br />

signatures.<br />

The second functon (Save in Regular Intervals) allows the user to save these data at a determined interval. This functon<br />

is important for controling the quality of a producton over a long period.<br />

Minimal computer configuraton<br />

Windows XP<br />

512 MB RAM, 1 GHz<br />

RS232 (exported data: color coordinantes) or Ethernet (exported data: all)<br />

E1204<br />

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GONIO<br />

PHOTOMETERS<br />

Goniophotometers<br />

SELECTION<br />

GUIDE<br />

SENSORS<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

REFLET goniophotometer<br />

“REFLET” is a general purpose goniospectrophotometer for measuring back-scattering and forward scattering from diffusing<br />

samples or specular surfaces.<br />

A goniophotometer is an instrument for measuring light scattering in the visible spectral band, through a photopic filter V(λ)<br />

or in the near infrared range.<br />

Characterizaton of backscattering lobes (angular reflectance) and forward scattering<br />

lobes (angular transmittance) of samples reveals the optcal propertes of materials<br />

and serves as a useful tool in industrial and scientfic research of light scattering<br />

and light emission mechanisms and of surface propertes (texture, roughness, polish<br />

quality…).<br />

Goniophotometry is fundamental to the understanding of visual percepton of objects:<br />

in our daily experience the observer, the objects and the natural lightng (sun)<br />

are always in moton, so that illuminaton and observaton angles are constantly varying.<br />

CAD/CAM Software uses data based on goniophotometric measurements for<br />

providing a realistc representaton of complex scenes.<br />

The spectrograph opton allows analysis of the scattered light; at each angular configuraton<br />

they provide an entre spectrum, so that the reflectance (or transmittance)<br />

of the sample can be measured independently at each individual wavelength. Goniocolorimetry<br />

is fundamental to study effect materials (automotve paintng, fabrics).<br />

Features<br />

- Real BRDF / BTDF measurement<br />

- Full hemisphere (2π sr)<br />

- Visible or near infrared range,<br />

- Selectable spot size<br />

- Very high dynamic range (1:10 9 )<br />

- High angular resoluton (0.1°)<br />

- Operates in ambient light conditons<br />

- Compact, portable system<br />

48<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Goniophotometers<br />

REFLET technical specifications<br />

Model REFLET-90 REFLET-180<br />

Light Box<br />

Spot size on the sample surface<br />

Illuminance on the sample<br />

Goniometer<br />

ILLUMINATION<br />

Halogen 100W bulb<br />

Option: 6-positions filter wheel (color & ND filters)<br />

Manually adjustable from Ø1 mm to Ø13 mm<br />

Manually selectable from 100 lux to 25000 lux<br />

REFLECTION MODE<br />

- 0°-90° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.5°<br />

TRANSMISSION MODE<br />

- Fixed, θ = 180°<br />

DETECTION<br />

Integrated-flux Detector Very High Dynamic range (10 9 )<br />

REFLECTION MODE<br />

- 0°-180° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.3°<br />

TRANSMISSION MODE<br />

- 0°-180° motorized<br />

Spectrometer<br />

Optical system<br />

Goniometer<br />

Polarizer/Analyzer set (option)<br />

Useful range: 400-900 nm<br />

Spectral resolution : selectable (0.6, 1, 5 or 10 nm)<br />

3 manually interchangeable optical blocs:<br />

Optical bloc 1 2 3<br />

Angular acceptance ± 2° ± 1.1° ± 0.04°<br />

Observed area size Ø14mm Ø8mm Ø6mm<br />

θ: -90° to 90° motorized<br />

φ: -90° to 90° motorized<br />

Angular resolution: selectable ( 0.1° 1° )<br />

Positioning precision: 0.5°<br />

MEASURING TIME<br />

Rapid insertion<br />

0°-90° manual rotation<br />

180° θ-profile “Integrated flux” mode: 30 s<br />

“Spectrometer” mode: 10 s<br />

REFLET optical head<br />

Applications<br />

- Optcal surface characterizaton:<br />

• Reflectors for luminaries<br />

• Automotve headlights reflectors<br />

• Scattering losses of lenses<br />

- Light source characterizaton:<br />

• LCD backlightng<br />

- Visual appearence:<br />

• Database for realistc rendering software<br />

- Paints and inks:<br />

• automotve metal paints<br />

• angular-effect colored inks<br />

• Countertyping<br />

- Security:<br />

• Watermarking<br />

- Surface characterizaton of:<br />

• metals, powders, paper, ceramics, plastc automotve<br />

angular-effect colored inks<br />

E1204<br />

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GONIO<br />

PHOTOMETERS<br />

Goniophotometers<br />

SELECTION<br />

GUIDE<br />

DIAMOND goniophotometer<br />

DIAMOND is a goniophotometer whose optcal system is specially designed for measuring light scattering from specular surfaces.<br />

SENSORS<br />

Model DIAMOND-90 DIAMOND-180<br />

Light Box<br />

Spot size on the sample surface<br />

ILLUMINATION<br />

Halogen 100W bulb<br />

Option: 6-positions filter wheel (color & ND filters)<br />

Manually selectable Ø0.5 mm, Ø1 mm or Ø1.9 mm<br />

Beam angle Manually selectable ±0.09°, ±0.18°, ±0.35° or ±0.5°<br />

Goniometer<br />

REFLECTION MODE<br />

- 0°-90° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.5°<br />

TRANSMISSION MODE<br />

- Fixed, θ = 180°<br />

DETECTION<br />

Integrated-flux Detector Very High Dynamic range (10 9 )<br />

REFLECTION MODE<br />

- 0°-180° motorized<br />

- Angular resolution: 0.1°<br />

- Positioning precision: 0.3°<br />

TRANSMISSION MODE<br />

- 0°-180° motorized<br />

3D SYSTEMS<br />

Observed area size on the sample<br />

Manually selectable Ø0.5 mm, Ø1 mm or Ø1.9 mm<br />

Beam angle Manually selectable ±0.09°, ±0.18°, ±0.35° or ±0.5°<br />

Goniometer<br />

Polarizer/Analyzer set (option)<br />

θ: -90° to 90° motorized<br />

φ: -90° to 90° motorized<br />

Angular resolution: selectable ( 0.1° 1° )<br />

Positioning precision: 0.5°<br />

MEASURING TIME<br />

Rapid insertion<br />

0°-90° manual rotation<br />

Measuring time of one meridian 30s (one 180° full-precision θ-profile)<br />

DIAMOND optical head<br />

SPECTRO<br />

COLORIMETERS<br />

Applications<br />

Applicaton domains of residual scattering measurement are quite diversified and include ophtalmic optcs, semiconductor,<br />

space industries :<br />

- Control of polish / superpolish quality of mirrors and lenses<br />

- Control of optcal glass quality<br />

- Control of polished semiconductor surfaces (bare wafers, masks):<br />

• surface quality<br />

• presence of dust grains<br />

- Measurement of scattering losses<br />

50<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

REFLET & DIAMOND Goniophotometers<br />

Goniophotometer - 180<br />

Goniophotometer - 90<br />

Options<br />

- Detecton in the near infrared range, intensity mode (0.9 - 1.7 µm)<br />

- Detecton in the near infrared range, spectral mode (1 - 1.7 µm)<br />

- Filter wheel (color and ND filters)<br />

- Sample holder with adjustable tlt plate<br />

- Polarizer/analyser set (easy mountng)<br />

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SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

3D SYSTEMS<br />

SENSORS<br />

52<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

Optoelectronic controllers: outline dimensions<br />

<strong>STIL</strong> Inital controllers<br />

- <strong>STIL</strong> Duo<br />

E1204<br />

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SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CHR controllers<br />

3D SYSTEMS<br />

SENSORS<br />

CHR-4 controllers<br />

54<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

- CCS PRIMA & PRIMA2 controllers<br />

CCS PRIMA4 controllers<br />

E1204<br />

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Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CL1 MG210<br />

CL1 MG140<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

CL2 MG210<br />

GONIO<br />

PHOTOMETERS<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

56<br />

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SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

CL2 MG140<br />

CL2 MG70<br />

CL3 MG140<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

E1204<br />

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Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CL3 MG70<br />

CL4 MG35<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

CL4 MG20<br />

GONIO<br />

PHOTOMETERS<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

58<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

CL5 MG35<br />

CL5 MG20<br />

CL6 MG35<br />

CL6 MG20<br />

(*) The working distance and the measurement range are given as minimum values.<br />

Please refer to the table page.<br />

E1204<br />

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GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

CL6 MG20<br />

OP300VM<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

OP300VM 90°<br />

60<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

OP3000N<br />

OP6000<br />

OP10000<br />

E1204<br />

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SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

OP10000 90°<br />

3D SYSTEMS<br />

SENSORS<br />

OP24000<br />

62<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

OP42000<br />

OPILB LWD-T MG 70<br />

OPILB LWD-T MG 35<br />

E1204<br />

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GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

OPILB LWD-T MG 20<br />

OPILB LWD-D MG140<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

OPILB RP MG140<br />

64<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

OPILB RP MG140<br />

OPILB RP MG70<br />

OPILB RP MG35<br />

E1204<br />

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GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

OPILB<br />

ENDO0.1<br />

3D SYSTEMS<br />

SPECTRO<br />

COLORIMETERS<br />

SENSORS<br />

ENDO0.3 90°<br />

66<br />

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E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

ENDO1.2<br />

ENDO1.2 90°<br />

ENDO1.5<br />

E1204<br />

www.stlsa.com 67


SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

MPLS 180 controllers<br />

3D SYSTEMS<br />

SENSORS<br />

Microview<br />

68<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

DeepView<br />

Wavy<br />

E1204<br />

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SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

Appendix: outline dimensions of all products<br />

SELECTION<br />

GUIDE<br />

Microview-F<br />

3D SYSTEMS<br />

SENSORS<br />

Wavy-F<br />

70<br />

www.stlsa.com<br />

E1204


SELECTION<br />

GUIDE<br />

SPECTRO<br />

COLORIMETERS<br />

GONIO<br />

PHOTOMETERS<br />

SENSORS 3D SYSTEMS<br />

Appendix: outline dimensions of all products<br />

REFLET-90 / DIAMOND-90<br />

REFLET-180 / DIAMOND-180<br />

E1204<br />

www.stlsa.com 71


<strong>STIL</strong> SA - 595, rue Pierre Berthier<br />

Domaine de Saint Hilaire<br />

13855 Aix en Provence Cedex 3 - FRANCE<br />

Tel: +33.(0)4.42.39.66.51<br />

Fax: +33.(0)4.42.24.38.05<br />

email : contact@stlsa.com<br />

Countries with a local distributor:<br />

i i i i i i America<br />

USA<br />

i i i i i i i Canada<br />

Asia / Pacific<br />

i i i i i i i Japan<br />

Malaysia<br />

i i i i i i i South Korea<br />

i i i i i i i Singapore<br />

i i i i i i i Taiwan<br />

i i i i i i i China<br />

Europe / Middle East<br />

i i i i i i i France<br />

Germany<br />

United Kingdom<br />

i i i i i i i Benelux<br />

i i i i i i i Spain<br />

i i i i i i i Switzerland<br />

i i i i i i i Israel<br />

i i i i i i i<br />

Find our local distributor on our website:<br />

NON CONTACT MEASUREMENT SOLUTIONS<br />

E1204<br />

www.stlsa.com

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