'Thin films & coatings' Roadmap - Nano Mahidol
'Thin films & coatings' Roadmap - Nano Mahidol
'Thin films & coatings' Roadmap - Nano Mahidol
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2.3 The Thin <strong>films</strong> & coatings’ pipeline<br />
This section deals with each of the steps in the thin <strong>films</strong> pipeline, from their<br />
production to their application.<br />
The following table summarises the production techniques considered within this<br />
chapter. For each of them a brief description is given and main bottlenecks outlined.<br />
Thin film production &<br />
application<br />
• Chemical Vapour<br />
Deposition (CVD)<br />
• Physical Vapour Deposition<br />
(PVD)<br />
• Sol-gel<br />
• Electrodeposition /<br />
Electroplating<br />
• Spin coating<br />
• Spray coating<br />
• Self-assembly<br />
• Positional assembly<br />
Thin film posttreatment<br />
• Annealing<br />
• Thermal oxidation<br />
• Ultra Violet (UV)<br />
Patterning<br />
• Optical Lithography<br />
• Plasma etching<br />
• <strong>Nano</strong>imprint lithography<br />
(NIL)<br />
• Electron beam<br />
nanolithography<br />
• Ion beam nanolithography<br />
• DipPen nanolithography<br />
• Inkjet<br />
• Sputter etching<br />
• Ion milling<br />
However, it should be underlined that thin <strong>films</strong> production does not always follow<br />
this linear approach. In fact, for many applications only the first 2 steps are normally<br />
implemented whereas for applications in the semiconductors’ industry thin <strong>films</strong><br />
undergo the complete process.<br />
Within the thin film production and application processes, on one hand there are<br />
processes that provide the raw materials for thin film application (i.e. sol-gel)<br />
chemical that are then applied using another technique (i.e. spin-coating). On the<br />
other hand, process like PVD or CVD deal both with the chemical composition as<br />
well as the application of the thin film.<br />
In general, most of the experts having participated in this roadmapping exercise do<br />
have in-house knowledge for designing (or formulating) the thin <strong>films</strong> they are<br />
presently researching or applying.<br />
10 <strong>Roadmap</strong> report on<br />
Thin <strong>films</strong> and coatings