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'Thin films & coatings' Roadmap - Nano Mahidol

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2.3 The Thin <strong>films</strong> & coatings’ pipeline<br />

This section deals with each of the steps in the thin <strong>films</strong> pipeline, from their<br />

production to their application.<br />

The following table summarises the production techniques considered within this<br />

chapter. For each of them a brief description is given and main bottlenecks outlined.<br />

Thin film production &<br />

application<br />

• Chemical Vapour<br />

Deposition (CVD)<br />

• Physical Vapour Deposition<br />

(PVD)<br />

• Sol-gel<br />

• Electrodeposition /<br />

Electroplating<br />

• Spin coating<br />

• Spray coating<br />

• Self-assembly<br />

• Positional assembly<br />

Thin film posttreatment<br />

• Annealing<br />

• Thermal oxidation<br />

• Ultra Violet (UV)<br />

Patterning<br />

• Optical Lithography<br />

• Plasma etching<br />

• <strong>Nano</strong>imprint lithography<br />

(NIL)<br />

• Electron beam<br />

nanolithography<br />

• Ion beam nanolithography<br />

• DipPen nanolithography<br />

• Inkjet<br />

• Sputter etching<br />

• Ion milling<br />

However, it should be underlined that thin <strong>films</strong> production does not always follow<br />

this linear approach. In fact, for many applications only the first 2 steps are normally<br />

implemented whereas for applications in the semiconductors’ industry thin <strong>films</strong><br />

undergo the complete process.<br />

Within the thin film production and application processes, on one hand there are<br />

processes that provide the raw materials for thin film application (i.e. sol-gel)<br />

chemical that are then applied using another technique (i.e. spin-coating). On the<br />

other hand, process like PVD or CVD deal both with the chemical composition as<br />

well as the application of the thin film.<br />

In general, most of the experts having participated in this roadmapping exercise do<br />

have in-house knowledge for designing (or formulating) the thin <strong>films</strong> they are<br />

presently researching or applying.<br />

10 <strong>Roadmap</strong> report on<br />

Thin <strong>films</strong> and coatings

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