Lithography Lecture No. 1 - Foundation Coalition
Lithography Lecture No. 1 - Foundation Coalition
Lithography Lecture No. 1 - Foundation Coalition
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Photolithographic process<br />
Wafer cleaning<br />
Barrier layer formation<br />
Photoresist application<br />
Soft baking<br />
Mask alignment<br />
Exposure and development<br />
Hard-baking<br />
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