Lithography Lecture No. 1 - Foundation Coalition
Lithography Lecture No. 1 - Foundation Coalition
Lithography Lecture No. 1 - Foundation Coalition
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Mask alignment<br />
Use a photomask - square glass plate with a<br />
patterned emulsion of metal film on one side<br />
The mask is aligned with the wafer to<br />
transfer the pattern onto the wafer surface.<br />
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