Lithography Lecture No. 1 - Foundation Coalition

More documents

Recommendations

Info

Discuss Reading Assignment 1 1 Introducing Nano 2 2 Size Matters 3 3 Interlude One-The Fundamental Science Behind Nanotechnology Electrons, Atoms, Ions, Molecules Metals, Ceramics, Polymers Biosystems Electrical Conduction and Ohm’s Law Quantum Effects Optics 2
Nanofabrication - 2 principal approaches Top-Down Miniaturizing existing processes at the Macro/Microscale Traditional approach in industrial applications E.g. <strong>Lithography</strong>, backbone of computing systems Bottom-Up Assembling structures from the atomic/molecular level <strong>No</strong>vel approach, conceptually imitating nature E.g. chemical self-assembly 3
Page 1: MEEN 489-500 Nanoscale Issues in Ma
Page 5 and 6: Lithography in Art Invented by Aloi
Page 7 and 8: Materials used for lithography draw
Page 9 and 10: Optical/UV Lithography Workhorse of
Page 11 and 12: Wafer cleaning Cleans wafer chemica
Page 13 and 14: Photoresist application After the f
Page 15 and 16: Soft baking During this stage, most
Page 17 and 18: Exposure Photoresist - exposed thro
Page 19 and 20: Development At low-exposure energie
Page 21 and 22: Hard-baking The final step in photo
Page 23: Assignment Review this PowerPoint s

Lithography Lecture No. 1 - Foundation Coalition

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?