Department of Physics annual report 2000 - Fysiikan laitos - Helsinki.fi

sizes were 1 to 14 mm in diameter. The
frequency was 5 MHz and the probing
depths were 25, 50 and 75 mm. All of
the FB’s investigated could be detected
and identified in one of the tested
food products.
using water or other compounds for an
oxygen source, oxygen is obtained from
a metal alkoxide. It serves as both an
oxygen and metal source when it reacts
with another metal compound such as a
metal chloride or metal alkyl. These
reactions generally enable deposition of
STORMS - A THREE-SATELLITE
CONSTELLATION
An international team led by Prof.
Koskinen proposed a three-satellite
constellation called STORMS to study
the physics of the inner magnetosphere
E. Hæggström and M. Luukkala, Ultrasonic
oxides of many metals. With this ap-
and magnetic storms to ESA’s medium-
monitoring of beef temperature during
proach, an alumina film has been de-
size flexi-mission programme. From
roasting, Food Science & Technology 33
posited on silicon without creating an
the total of 42 candidates this was
(2000) 465-470
interfacial silicon oxide layer that other-
selected among the 6 proposals whose
E. Hæggström and M. Luukkala, Ultrasound
wise forms easily. The grown films were
feasibility was further assessed during
detection and identification of foreign
depth profiled by the time-of-flight
an intensive study period March-June
bodies in food products, Journal of Food
elastic recoil detection analysis.
2000. Although the mission was finally
Control 12 (1) (2001) 37-45
This finding adds to the other ben-
not selected, the concept was favoura-
efits of the ALD method the atomic-
bly received and will be promoted in
NEW GATE DIELECTRICS BY
ATOMIC LAYER DEPOSITION
level thickness control and excellent
uniformity. It makes possible a major
step towards the scientifically challeng-
future competitions.
STORMS, A three-spacecraft constellation
20
The search for new gate dielectrics is
motivated by the shrinkage of microelectronics
devices. The replacement of
aluminium with copper has begun and
ing and technologically important task
of replacing silica as the gate dielectric
in the future generations of metal oxide
semiconductor field effect transistors.
for Earth magnetic storms and inner magneto–spheric
studies, ESA-SCI(2000)7, 68 pp.
new dielectric substitutes for silica are
being studied.
M. Ritala, K. Kukli, A. Rahtu, P. I. Räisänen,
M. Leskelä, T. Sajavaara and J. Keinonen,
A chemical approach to atomic
Atomic Layer Deposition of Oxide Thin
layer deposition (ALD) of oxide thin
films is reported in our work. Instead of
Films with Metal Alkoxides as Oxygen
Sources, Science 288 (2000) 319-321
High-resolution transmission electron microscope
image of an interface between
ALD grown Al 2
O 3
film and a silicon substrate.
The orbits of the three spacecraft of the
proposed STORMS mission cross the most
interesting region of the inner magnetosphere.
The three-satellite constellation
yields synoptic observations in three widely
separated spatial locations.