TMC Catalog

CSP ®Compact Sub-Hertz PendulumVibration Isolation SystemU.S. Patent No. 5,779,010The Compact Sub-Hertz PendulumVibration Isolation System (CSP ® )is a very low frequency horizontalvibration isolation system. Its usesinclude reducing the settling time ofplatforms subjected to horizontal(payload generated) impulses commonto semi conductor manufacturingequipment.Features• An adjustable and stable horizontalresonant frequency which is bothload-independent and insensitive toenvironmental changes. The frequencyrange can be adjusted from 1 Hz downto 0.5 Hz or below.• Overall height under 17 in., less thanhalf the length of a pendulum of thesame frequency.• A lightweight pendulum designdramatically reduces the “intermediatemass” resonance common to priorpendulum system designs; the totalfloating mass is only a few poundsand its associated resonance is above20 Hz in most applications.Acceleration TransmittedAcceleration Input )(Transmissibility =1010.10.010Horizontal Transmissibilityfor CSP ® vs Gimbal Piston CSP ® 90%1Frequency, HzGimbal Piston Modular systemdesign allowseasy retrofit.Horizontalmotion dampingdashpotLightweight“intermediatemass”• Fully modular design fitsTMC System 1 leg shells and allowsfor easy removal and main tenanceof the diaphragm assembly.• Simple two-screw adjustmentallows isolator’s level to be adjusted withthe payload floating. Adjustments arereadily accessible on isolator’s top plate.• TMC’s standard mechanical over travellimit prevents dangerous diaphragmruptures if the system is inflatedunloaded.• A horizontal damper providesexcellent horizontal damping withoutincreasing the system’s resonantfrequency.1000%99%10www.techmfg.com • 978-532-6330 • 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales@techmfg.comIsolation AmplificationAngled cables reduceheight required toachieve a lowresonant frequency.Multi positionlower flange allowshorizontal naturalfrequencyadjustment.• Reduced tilt-to-horizontal couplingmakes the system ideal for use withTMC’s line of active products – includingthe PEPS ® II (Precision ElectronicPositioning System) and our PEPS-VX ®3 degrees-of-freedom active cancellationsystem.• An improved vertical dampingcharacteristic due to the increasedratio of the surge tank (not shown)to top chamber volumes• Available in a range of loadcapabilities from 250 lb to 2,500 lbper isolator695