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Advanced ProductsPneumatic Vibration Isolators for OEM Applications (continued)MaxDamp ®Vibration Isolation SystemU.S. Patent No. 5,918,86210,000 and 20,000 lb. CapacityMaxDamp ® is a highly damped version of our Gimbal Piston Air Isolator. MaxDamp is idealfor OEM equipment with motorized X-Y stages or robots which require high performancevibration isolation and aggressive settling time for stage-induced motionof the isolated payload in a low cost, passive system.5,700 lb. CapacityMaxDamp ® is available in a wide range of lift capacities. MaxDamp ®System may be configured for payload ranging from a few poundsto one hundred tons.2,500 lb. Capacity1,000 lb. Capacity350 lb. CapacityRelative size of isolators not to scaleBenefits• Faster payload settling times• Faster throughput and higher yields for LCD and semiconductormanufacturing/inspection tools• “Stiffer” feel to isolated surface while maintaining high vibrationisolation performance• Less vibration induced by air currents and acoustic noise aswell as “on-board” generated forcesVertical PayloadAcceleration vs. TimeHorizontal PayloadAcceleration vs. Time Transmissibility = ( Acceleration Transmitted )Acceleration InputVibration isolation transfer function(vertical and horizontal) of MaxDamp ®Transmissibility6Mount vs. Attenuation 0.1 0.01 0.001Standard mount (twist) 1.8 3.7 5.5Standard mount (X, Y, Z) 1.1 2.2 3.3<strong>TMC</strong> MaxDamp ® mounts(X, Y, Z, twist)0.4 0.7 1.1Comparison of settling times in seconds(isolator/DOF vs. attenuation from initialacceleration)70 www.techmfg.com • 978-532-6330 • 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales@techmfg.com

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