ME 141B: The MEMS Class Introduction to MEMS and MEMS Design

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MEMS: History• Some starting points: 1961 first silicon pressuresensor (Kulite)• Diffused Si piezoresistorsmounted onto package to formdiaphragm Mid 60’s: WestinghouseResonant Gate Transistor Mid 70’s Stanford GasChromatograph (1975)• Way ahead of its time9/21/10 12/45
Page 1 and 2: ME 141B: The MEMS ClassIntroduction
Page 3 and 4: Handouts• Syllabus/Schedule Hando
Page 5 and 6: Course Overview• First week - Ove
Page 7 and 8: Outline• Class odds and ends• I
Page 9 and 10: What are MEMS?• Microfabrication
Page 11: What are MEMS?• Now, many “MEMS
Page 15 and 16: MEMS: History• Electrostatic Micr
Page 17 and 18: MEMS: RF MEMS• Smaller, cheaper,
Page 19 and 20: MEMS: Commercial• This isn’t ju
Page 21 and 22: Outline• Class odds and ends• I
Page 23 and 24: MEMS Design• MEMS design is hard
Page 25 and 26: MEMS Design• Different levels of
Page 27 and 28: Course Goal• Course goal: Learn h
Page 29 and 30: Course outline• MEMS fabrication
Page 31 and 32: Microfabrication Outline• Substra
Page 33 and 34: Silicon: Notation• A direction in
Page 35 and 36: Wafer Orientation9/21/10 35/45
Page 37 and 38: Other substrates• Glass (cheap, h
Page 39 and 40: Microfabrication Outline• Substra
Page 41 and 42: Methods of optical lithography I•
Page 43 and 44: Mask Making• Highest quality - ch
Page 45 and 46: • Spin castNegative/image reversa
Page 47 and 48: Double-sided aligned lithography•
Page 49 and 50: Special purpose lithographictechniq
Page 51 and 52: Details that matter for lithographi
Page 53 and 54: More cleaning!9/21/10 53/45
Page 55: Design Rules• Alignment of onepat

ME 141B: The MEMS Class Introduction to MEMS and MEMS Design

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