ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
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Microfabrication Outline• Substrates• Lithography <strong>and</strong> patterning• Doping• Thin Films9/21/10 39/45