ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
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Other substrates• Glass (cheap, high impurity content) Inexpensive base for soft lithography Transparent for optical access Can be very strongly attached <strong>to</strong> silicon wafers via anodic bonding• Quartz/Fused silica• Compound semiconduc<strong>to</strong>rs Optical applications• Plastics• PDMS• Titanium• Sapphire Strong, wear resistant, transparent, insulating substrate Compatible with CMOS (so transparent CMOS <strong>ME</strong>MS) Expensive, hard <strong>to</strong> etch9/21/10 37/45
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