ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
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Course outline• <strong>ME</strong>MS fabrication is intimately coupledwith design Not true of many other worlds Example: diaphragm pressure sensor• Would like <strong>to</strong> use Si because of piezoresis<strong>to</strong>rs• Material choice sets fabrication technology: KOH• Fabrication technology determines shapes <strong>and</strong>physical limits: diaphragm thickness• This in turn affects performanceDeflection ~ (thickness)^-39/21/10 29/45
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