ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
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Silicon: Notation• A direction in crystal coordinates indenoted by square brackets, e.g. [100]• <strong>The</strong> set of symmetrically equivalentdirections is written with braces, e.g.• <strong>The</strong> plane perpendicular <strong>to</strong> a direction isdenoted with parentheses, e.g. (100)• <strong>The</strong> set of symmetrically equivalent planesis written with curly brackets, e.g. {100}9/21/10 33/45
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