ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
ME 141B: The MEMS Class Introduction to MEMS and MEMS Design
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Course Goal• Course goal: Learn how <strong>to</strong> design/fabricateany microfabricated device/system• Learn how <strong>to</strong> Underst<strong>and</strong> the design process Partition the system Determine <strong>and</strong> model relevant physics Evaluate different designs & fabricationtechniques Underst<strong>and</strong> the linkage between fabrication <strong>and</strong>design9/21/10 27/45