Flare distance
Flare distance
Flare distance
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DxHow was = derived ?D501+η1+2ηx• Assumption (1): pattern area > flare <strong>distance</strong> > LS pitchEDxEx = (0.5 + ηx) DxEx….….0.5 DxηxDx (=<strong>Flare</strong>)Ex: Optimized energyX : pattern densityDx: Optimized dose(We can think of η as ratio of flare in BF.)• Assumption (2): optimum energy for target CDs shouldbe at the same Ex, even if its pattern densities aredifferent. (in this case, base-line density is 50%.)Ex = (0.5+ ηx) Dx = (0.5+ η 0.5) D50 = E50Dx =1+ η1+ 2ηxD502008 International Symposium on Extreme Ultraviolet Lithography 12
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