Flare distance
Flare distance
Flare distance
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How to determine flare <strong>distance</strong> ? (50nm LS pattern)GDS dataexamplemeasurement100um50nmLS area50nm : Effective area is 50%45nm : <strong>Flare</strong> effective area is 40%40nm : <strong>Flare</strong> effective area (density) is 25%SPACE CD<strong>Flare</strong><strong>Flare</strong><strong>distance</strong><strong>distance</strong>Space CD should be affected bypattern density <strong>distance</strong> from dark regionDistance from dark region (μm)2008 International Symposium on Extreme Ultraviolet Lithography 9
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