Flare distance

Parameter η (flare magnitude)1.20Optimum Dose η1.151.101.051.00η= 0.1η= 0.05η= 0.2Resist A: long DL (η = 0.184)Resist B: short DL (η = 0.0654)Resist C: long DL (η = 0.146)Lines : best fit curves0.950 10 20 30 40 50 60PATTERN DENSITY (%)Optimum η values values are are 18.4, 18.4, 6.45, 6.45, & 14.6% 14.6% for for 3 Resists A, A, B & C, C, respectively.Long Long DL DL resists resists show show higher higher η values. η strongly depends on on resist resist material.2008 International Symposium on Extreme Ultraviolet Lithography 13