Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
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LAMMPS MD Results: Convergence <strong>of</strong> total energy:Total Energy (MeV)-2.6-2.7-2.8-2.9-3.0-3.1Total Energy (MeV)-3.180-3.182-3.184-3.186-3.188DR=6%-3.1905.0 5.5 6.0 6.5time (ns)DR=6%Total Energy (MeV)-1.80-1.81-1.82Total Energy (MeV)-1.821-1.822-1.823DR=5%DR=5%-1.8246.0 6.5 7.0 7.5 8.0time (ns)-3.20 1 2 3 4 5 6 7time (ns)-1.830 1 2 3 4 5 6 7 8time (ns)