Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
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Plasma Enhanced Vapor Deposition Chemical Reaction SiH 4-> Si + 2 H 2 Deposits thin <strong>films</strong> from a gas state (vapor) to a solid state on asubstrate Used for electronics, optoelectronics and photovoltaic applications Fast deposition at low temperatures Surface interactions and film growth not yet fully understood