Multiscale modeling of PECVD generated Silicon films ... - Lammps

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Multiscale modeling of PECVD generated Silicon films ... - Lammps

Multiscale modeling of PECVD generated Silicon films ... - Lammps

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LAMMPS MD Results: Bond Angle Distribution:0.6000Si-Si-Z angle : DR 5%0.0100Si-Si-Z angleP0.50000.40000.30000.2000P0.00800.00600.0040DR=5%DR=6%0.10000.00200.00000 20 40 60 80 100 120 140 160 180 200θ [deg]0.00000 20 40 60 80 100 120 140 160 180 200θ [deg]After MCAfter MD

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Dynamics Of Entangled Polymers: Using LAMMPS For Large Scale

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LAMMPS MD Results: Bond Angle Distribution:0.6000Si-Si-Z angle : DR 5%0.0100Si-Si-Z angleP0.50000.40000.30000.2000P0.00800.00600.0040DR=5%DR=6%0.10000.00200.00000 20 40 60 80 100 120 140 160 180 200θ [deg]0.00000 20 40 60 80 100 120 140 160 180 200θ [deg]After MCAfter MD

LAMMPS MD Results: Bond Angle Distribution:

Page 1 and 2: LAMMPS User Group MeetingAugust 7-8
Page 3 and 4: Plasma Enhanced Vapor Deposition Ch
Page 5 and 6: Kinetic Monte Carlo(n- fold method)
Page 7 and 8: KMC Results: Snapshot of KMC genera
Page 9 and 10: KMC Results: Void distribution
Page 11 and 12: Tersoff Potential Bond Order Potent
Page 13 and 14: LAMMPS MD Results: Convergence of t
Page 15: LAMMPS MD Results: Autocorrelation
Page 19 and 20: Figure 12 - Example Attack Tree for
Page 21 and 22: LAMMPS MD Performance with modified
Page 23 and 24: Monte Carlo based Tools
Page 25 and 26: Conclusions Silicon films growth by