Multiscale modeling of PECVD generated Silicon films ... - Lammps

More documents

Recommendations

Info

LAMMPS MD Results: Diffusion and Mean Square Displacement:4msd <strong>of</strong> film with DR=5%4msd <strong>of</strong> film with DR=6%3HSi3HSimsd2msd21100 2 4 6 8 10 1200 2 4 6 8 10 12t [ns]t [ns]DR = 5 % DR = 6 %
LAMMPS MD Results: Autocorrelation functions:1DR 5%1DR 6%ACF Si-Si0.90.82.0 A2.5 A3.0 A3.5 A4.0 A4.5 A5.0 A5.5 AACF Si-Si0.90.82.0 A2.5 A3.0 A3.5 A4.0 A4.5 A5.0 A5.5 A0.70 2 4 6 8 10 12 14 16t [ns]0.70 2 4 6 8 10 12t [ns]DR = 5 % DR = 6 %
Page 1 and 2: LAMMPS User Group MeetingAugust 7-8
Page 3 and 4: Plasma Enhanced Vapor Deposition Ch
Page 5 and 6: Kinetic Monte Carlo(n- fold method)
Page 7 and 8: KMC Results: Snapshot of KMC genera
Page 9 and 10: KMC Results: Void distribution
Page 11 and 12: Tersoff Potential Bond Order Potent
Page 13: LAMMPS MD Results: Convergence of t
Page 17 and 18: LAMMPS MD Results: Bond Angle Distr
Page 19 and 20: Figure 12 - Example Attack Tree for
Page 21 and 22: LAMMPS MD Performance with modified
Page 23 and 24: Monte Carlo based Tools
Page 25 and 26: Conclusions Silicon films growth by

Multiscale modeling of PECVD generated Silicon films ... - Lammps

Create successful ePaper yourself

Delete template?

Save as template?