12.07.2015 Views

Multiscale modeling of PECVD generated Silicon films ... - Lammps

Multiscale modeling of PECVD generated Silicon films ... - Lammps

Multiscale modeling of PECVD generated Silicon films ... - Lammps

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

KMC Results: Surface thickness dependent on SiH content:5 % SiH 6 % SiH

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!