Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
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Combine KMC and MDExperiment conditionsFullgrowthKMCStepwisegrowthKMCmap to atomisticmap to atomisticMDMDmap to KMCFilm properties