Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
Multiscale modeling of PECVD generated Silicon films ... - Lammps
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LAMMPS MD Results: Autocorrelation functions:1DR 5%1DR 6%ACF Si-Si0.90.82.0 A2.5 A3.0 A3.5 A4.0 A4.5 A5.0 A5.5 AACF Si-Si0.90.82.0 A2.5 A3.0 A3.5 A4.0 A4.5 A5.0 A5.5 A0.70 2 4 6 8 10 12 14 16t [ns]0.70 2 4 6 8 10 12t [ns]DR = 5 % DR = 6 %