Analysis of 320X240 uncooled microbolometer focal plane array ...
Analysis of 320X240 uncooled microbolometer focal plane array ...
Analysis of 320X240 uncooled microbolometer focal plane array ...
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LIST OF FIGURESFigurePage1.1 System configuration for the <strong>microbolometer</strong> imaging system 32.1 Simplified bolometer structure 72.2 A simple bolometer circuit 112.3 Microbolometer thermal equivalent model 142.4 UFPA responsivity for 300K irradiance in the 8 to 13ium 162.5 Typical <strong>microbolometer</strong> values for U3000 <strong>microbolometer</strong> <strong>array</strong> 162.6 NETD temperature fluctuation and background fluctuation noise limits 202.7 <strong>320X240</strong> Microbolometer <strong>array</strong> structure with readoout electronics 222.8 Diagram showing FPA and a unit cell 232.9 A photograph <strong>of</strong> <strong>microbolometer</strong> <strong>array</strong> 242.10 A figure <strong>of</strong> a microbridge or air-bridge 242.11 A photograph <strong>of</strong> a <strong>microbolometer</strong> unit cell, where the bridge structure isshown 252.12 UFPA packaging 252.13 Array package 262.14 Simplified fabrication steps for the microbridge structure 282.15 Three external clock to operate UFPA: mater clock ICLOCK, line sync pulseLSYNC, and frame sync pulse FSYNC 293.1 UFPA interface board block diagram 323.2 Microbolometer test fixture 34viii
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