ims chips
ims chips
ims chips
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Nanostructuring: ProductsDirect writingCMOS personalizationNano componentsDiffractive optical elementsReplication master (Qz(Qz, , Si)MEMSMembranesCMOS & MEMSMasksEUV masksBinary masksPSMServiceEvaluation of tools, materials,Process development18 IMS Overview 2010© IMS 2009