Bosch Process

Company Report
Global SOI materials supplier
China’s best Epitaxial foundry
Company Background
Simgui was formed in 2001, specialized in SOI ( silicon
on insulator) materials and Epi foundry service.
Its 3,400 square meters facilities contain a 700square-meter
clean room with class 10. The company
was built for high volume manufacturing. The
management team has over 20 years of combined
experience in SOI study, primarily from the semiconductor
and MEMS industries. Simgui currently has
more than 80 employees and more than 100 customers
in diverse applications, including photonics,
MEMS, MOEMS, semiconductor, microprocessor,
smart power devices, opto-electronic circuits, wireless
communications ICs, RF telecommunications
applications and many other kind of devices.
Capabilities Summary
Simgui has the broadest product portfolio to supply
the needs of any MEMS/MOEMS/Semiconductor
customers. Simgui manufactures everything from
100mm to 200mm wafers and a full range of Epi products.
Our SOI technology encompasses thick active
layer wafers manufactured using our bonding
process and thin active layer wafers manufactured
using SIMOX process. For customers requiring thick
buried layers with excellent SOI thickness uniformity,
our originated Simbond® process can be used to
offer the best characteristics of both processes.
As the first joint venture for Epi foundry business in
China , Simgui has established a world class epitaxial
facilities, serving the market in Epitaxy for
Discrete, Si BiCMOS Devices, Si Bipolar Devices, Si
CMOS Devices, Si Power Devices and Si on
Insulator (SOI). Simgui specialize in the production
of 76mm, 100mm, 125mm, 150mm wafers and we
also have the capability to produce 200mm wafers.
All our processed wafers have good surface quality
and outstanding uniformities in thickness and resistivity.
We now have a wide business presence in US,
Japan, Korea, India, covering both the traditional
and emerging markets. Combing the Strong Epi specialists
team, advanced equipments, stable supply
channel and our powerful, flexible processing ability,
we are ready to design competitive Epi solutions for
MEMS
Your Best
SOI Materials & Epi Foundry Partner
current and future applications to feed our worldwide
customers, distinguished ourselves among domestic
and oversea competitors.
Simgui boasts the most advanced facilities to deliver
world –class products. All the equipment used by
Simgui is absolutely the most advanced available,
imported from the top suppliers in the US and Japan.
The most stringent quality assurance is Simgui’s
commitment to its customers. Every product, every
process and every facility is constantly monitored
with the aid of advanced quality characterizing tools
and a statistical process control (SPC) system. In
2003, the company got its ISO 9001:2000 certificate
issued by BVQI.
Simgui Key Capabilities Include
Simbond & Bonded SOI
Typical SOI thickness:>30nm
SOI uniformity: +/- 5%
Typical BOX thickness: 0.05-5.0 um
BOX uniformity: +/-2%
Simgui SIMOX SOI
Typical SOI thickness: 20-200nm
Typical BOX thickness: 100-400nm
Simgui Epi services
Thick Epitaxy: up to 100 microns, to 99% slip free
Thin Epitaxy: Down to 1 Micron
Contact
Dr. Meng Chen, VP SOI, mchen@simgui.com.cn
Dr. Feng Zhang, VP Epi, fzhang@simgui.com.cn
http://www.simgui.com.cn/en/about.asp
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July 2005 - n° 38 9