予稿集 - 応用物理学会

第 1 回 集 積 化 MEMS 技 術 研 究 ワークショップ 講 演 予 稿 集Microfluidic technologies for emulsification and microparticle design P&I, Tokyo Tech, Takasi Nisisakonisisako@pi.titech.ac.jpMEMS (a) (b) MEMS (Fig. 1)[1-5]Fig. 1 Biphasic Janus droplets. Scale bar is 50 m.[1] T. Nisisako, "Microstructured devices for preparing controlled multiple emulsions", Chem. Eng. Technol. 2008, 31, 1091–1098.[2] T. Nisisako et al., "Microfluidic large-scale integration on a chip for mass production of monodisperse droplets and particles", Lab Chip 2008, 8, 287–293.[3] T. Nisisako et al., "Formation of biphasic Janus droplets in a microfabricated channel for the synthesis of shape-controlled polymer microparticles", Adv. Mater. 2007, 19, 1489–1493.[4] T. Nisisako et al., "Synthesis of monodisperse bicolored Janus particles with electrical anisotropy using a microfluidic co-flow system", Adv. Mater. 2006, 18, 1152–1156.[5] T. Nisisako et al., "Droplet formation in a microchannel network", Lab Chip 2002, 2, 24–26.P17RF MEMS Evaluation of RF MEMS inductors characteristicsRF CMOS () MEMS (MEMS ) MEMS CMOS IC Si MEMS Si 9 MEMS 1050100 μm 1.5 ○ Tokyo Inst. of Tech. ○ Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya MasuE-mail: paper@lsi.pi.titech.ac.jpL [nH]1510# of turns1.5 3.5 5.5inside radius: 50μm302051000 5 10 15 20 0Frequency [GHz] 1: L Q Qfreq. width (Q > 20) [GHz]54rad.=100um32 rad.=10um rad.=50um100 5 10 15L@100MHz [nH] 2: Q > 20 3.55.5 Au 20 μm×20 μm Si 1kΩ·cm 1 50 μm 3 L Q 2 9 Q > 20 Q 22 31Q > 20 2.1 GHz 4.6 GHz Q RF CMOS CMOS IC MEMS MEMS Q 14 2009.7.14 東 京 工 業 大 学 すずかけホール