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Franz Bechtold - VIA electronic

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… O utlook on the Future of Cera mics and Ceramic Microsyste ms:<br />

Perspective : Integrated Fluidics<br />

Fluidic channel<br />

0,1 x 0,1 m m<br />

Fluidic channel<br />

0,2 x 0,2 m m<br />

Fluidic channel<br />

0,4 x 0,6 m m<br />

IMAPS/ACerS 2 nd International Conference on Ceramic Interconnect<br />

and Ceramic Microsystem Technologies, Denver, April 24 – 27, 2006<br />

<strong>Franz</strong> <strong>Bechtold</strong>, <strong>VIA</strong> <strong>electronic</strong> GmbH<br />

Sensorpackage<br />

withintegrated<br />

Fluidic

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