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Sub Nanometer Resolution for the Scanning of Glass Surfaces<br />
µm<br />
20<br />
15<br />
10<br />
5<br />
0<br />
-5<br />
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 m<br />
micro lenses<br />
nm<br />
1<br />
0<br />
-1<br />
-2<br />
0 50 100 150 200 250 300 350 µm<br />
flat partial area
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