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11 months ago

GBS smartWLI prime

Sub Nanometer Resolution

Sub Nanometer Resolution for the Scanning of Glass Surfaces µm 20 15 10 5 0 -5 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 m micro lenses nm 1 0 -1 -2 0 50 100 150 200 250 300 350 µm flat partial area

Accurate Reproduction of Certified Step Heights Calibrated standards are used for the verification of the absolute measuring accuracy.

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