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GBS smartWLI prime

Sub Nanometer Resolution

Sub Nanometer Resolution for the Scanning of Glass Surfaces µm 20 15 10 5 0 -5 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 m micro lenses nm 1 0 -1 -2 0 50 100 150 200 250 300 350 µm flat partial area

Accurate Reproduction of Certified Step Heights Calibrated standards are used for the verification of the absolute measuring accuracy.

Focus on modern frontiers of matter wave optics and interferometry
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