GBS smartWLI prime
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Technical Product Specification<br />
Measurement Technique<br />
Dimension<br />
Weight<br />
Power Supply<br />
Algorithms<br />
Scanner<br />
<strong>smartWLI</strong> <strong>prime</strong><br />
White-light interferometry<br />
app. 400 x 360 x 260 mm³<br />
app. 13 kg<br />
Scan Range 400 µm<br />
Resolution<br />
System Software<br />
Evaluation Software<br />
Focus<br />
xy-positioning<br />
Tilt +-3°<br />
100 to 240 VAC, 50/60 Hz<br />
vertical scanning<br />
phase shifting<br />
combined method<br />
Precision piezo drive with capacitive gauge control<br />
Linearity 0.03 %<br />
1 nm VSI<br />
0.1 nm PSI<br />
smartVIS 3D / Speedytec on GPU / real time 3D calculation<br />
MountainsMap with <strong>GBS</strong> programmed extensions<br />
70 mm fast and 1.9 mm fine manual z adjustment<br />
manual xy table 73 x 55 mm²<br />
motorized xy table 75 x 50 mm²<br />
3
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